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State-of-the-art THz pulsed commercial systems operating over large bandwidth suffer from high dispersion or low radiation efficiency due to the poor coupling between the transmitter and receiver photoconductive antennas (PCAs). In this work, we present the fabrication and characterization of a leaky-lens PCA that has the potential to solve this problem. The presented PCA is based on a low-temperature grown gallium arsenide (LT-GaAs) membrane with a 1:15 bandwidth coverage (0.1-1.5 THz), where the frequency response is constant. In order to fabricate the PCA on an LT-GaAs membrane, a novel fabrication process is developed. This process is dramatically faster than previously used processes (∼1.5 h instead of ∼20 h). Furthermore, an experimental validation of the radiated power together with the comparison to a standard bow-tie-based PCA fabricated on the same LT-GaAs wafer is shown in this article. We show that the PCA source on the LT-GaAs membrane is more efficient due to the enhanced leaky wave radiation. The leaky-lens PCA stands out as a great candidate to improve the coupling efficiency in THz pulsed commercial systems, where the maximum laser power that can be used is limited by the dispersion in the optic fiber., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronics, EKL Processing, Tera-Hertz Sensing

Drude's description of the response of low-temperature gallium arsenide to optical pulse excitation is used to evaluate the components of a time-domain Norton equivalent circuit of a photoconductive antenna (PCA) source. The saturation of the terahertz (THz) radiated power occurring at large optical excitation levels was previously associated by the scientific community to radiation and charge screening of the bias. With the present circuit, we are able to model accurately the measured saturation as only due to the EM feedback from the antenna to the bias. The predicted THz radiated power is shown to match very accurately the measurements when the circuit is combined with an accurate description of the experimental conditions and the modeling of the THz quasi-optical (QO) channel., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, EKL Processing, Electronics

Photoconductive antennas (PCAs) are used for imaging and sensing applications because of their ability to radiate short pulses with large bandwidths in the THz regime. The characterization of PCAs has previously been done using a time-domain Norton equivalent circuit. Thanks to a recent contribution, the size of the excited photoconductive area of PCAs that results in an impedance match with the antenna can be determined analytically using only the available optical power and the material parameters of the photoconductor. Through the impedance matching, the radiated THz power is maximized. These insights are used for the dimensioning of a wide-band photoconductive connected array to be used in the low THz band, excited by a high power laser (∼1W)., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

In this paper, we present an experimental strategy to analyze the harmonic content of mm-wave frequency extenders using the VNA (absolute) power calibration step, without requiring spectrum analyzers and/or separate downconverters. The spectral purity of the upconverted band of the extenders is a key requirement to enable entirely software-based power control required for the accurate analysis of an (active) device under test. The proposed approach is based on the complementary response provided by the calorimeter-based power meter (i.e. VDI PM5) capable of integrating the entire spectral content of the waveguide band, in respect to the extreme frequency selectivity of the narrow-band mixer-based downconverter of the VNA. This complementary integration bandwidth response allows to compare the two results at each input drive level (at the power calibration setup, in-situ) and link the difference to the increased harmonic content contribution, with respect to the spectral content value at the saturation drive level, i.e. nominal manufacturer specified. The paper presents tests carried out in the WR10 (75–110 GHz) and WR6 band (110–170 GHz). The WR10 resulted in a harmonic contribution on the total output power of a maximum of 0.3 dB down to -33 dBc power back off from saturation level, and less than 1 dB down to -38 dBc while the WR6 the same parameter is less than 1 dB over the entire frequency band excluding the lower frequency points., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronics

Photoconductive antennas (PCAs) are promising candidates for sensing and imaging systems. We have investigated their properties under pulsed laser illumination both in transmission and reception. First, a transmitting PCA has been characterized including a power measurement. Then, a Quasi-Optical (QO) link between a transmitter and a receiver was modelled and analyzed. In this work, we characterize this link with measurement. We use bow-tie based PCAs as examples, and measure the radiated power of the transmitter and the detected current of the receiver. The measurement shows very good agreement with the simulation., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

This contribution presents the development of an electrically small lens antenna using an artificially loaded thermoplastic at 140-170GHz. We will present the on-going development of the Fly’s Eye front end antenna concept that was presented in [1]. The antenna is composed on a dual plastic lens, a core lens and a shell lens, fed by a double slot. The core-lens, being presented in this contribution, is a spherical lens made from an artificially loaded plastic of permittivity 9.5. To the best of our knowledge, this thermoplastic material has not been used for lens antennas in this frequency range before. A 4mm lens prototype has been developed using this material, which includes an antireflective layer synthesized by drilling sub-wavelength holes on the lens contour. Full-wave simulations show a negligible degradation of the performance of the anti-reflection layer compared to an ideal homogeneous matching layer. Physical measurements and antenna measurements confirm that the antenna's performance matches the design specifications., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

Photoconductive antennas are devices that provide power up to THz frequencies at a relatively low cost. However, the power radiated by each antenna is typically quite low and arrays have been proposed to increase it. In this paper we present the design of a leaky enhanced array architecture that surpasses the state of the art as it operates efficiently for frequencies up to 1THz, without excessive complications in the manufacturing. This architecture is compared with a ‘standard’ array, showing a broader bandwidth and a higher emitted detected signal., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronics, Tera-Hertz Sensing, EKL Processing

We present the design, fabrication and characterization of a broadband lossless matching layer for shallow lens arrays. The matching layer we propose is based on silicon pyramids fabricated on top of the lens array by means of laser ablation. This matching layer has the advantage that it covers over an octave of bandwidth. We have compared the performance of this matching layer with the commonly used parylene-C matching layer at the center of the targetted band, 500 GHz. The matching layer based on the silicon pyramids has 1.6 dB higher transmission., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronics, Tera-Hertz Sensing

Advances in far infrared astronomy have been, and will be, defined by instrument capabilities. Especially relevant is the development of imaging spectrometers for the wavelength range of 0.03-3 mm, which are not available at all at this moment. We will discuss recent advances in this field: First, we discuss the development of miniature on-chip spectrometers, that can operate in a 0.09-1 THz by using lossless superconducting circuits to create miniature spectrometers. For higher frequencies this is not possible due to material limitations, moreover instruments have to be operated in space due to the opacity of the atmosphere. Recent proposals for new missions focus on space-based observatories with optics cooled down to 4K, which offer unprecedented spectral imaging speeds, but require large arrays of extremely sensitive detectors. In the second part of this paper we will discuss the development of microwave Kinetic Inductance detectors with a sensitivity of NEP. 3.1.10-20 W/ãHz, sufficient for these applications., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

A novel transmit lens array is proposed to provide broadband quasi-optical power distribution and beam-steering capabilities for array architectures in future submillimeter-wave heterodyne instruments. The transmit array is composed of a double array layer of lens antenna elements with high aperture efficiency. To enable broadband and low loss quasi-optical (QO) power distribution, the transmit lens array is coupled with a high aperture efficiency single lens antenna. The high aperture efficiency is achieved by using a recently introduced multi-mode leaky wave feed. The top lens array can be used to achieve beam-steering capabilities when fed coherently and mechanically translated using a piezo-motor. In this contribution, we present the development of a prototype based on a transmit lens array of 7 elements at 450-650 GHz with measurements showing a good agreement with simulations. This prototype demonstrates a quasi-optical power coupling efficiency of nearly 60%. Moreover it also shows beam-steering of a 36dBi directivity beam to few discrete angles up to +/-25 degrees with less than 2dB scan loss, Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

We present the design, fabrication and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer is based on silicon frusta (truncated pyramids) on top of the lens array fabricated by means of laser ablation. This matching layer is advantageous over quarter-wavelength dielectric matching layers since it covers more than an octave of bandwidth. We compare the performance of this matching layer with the commonly-used parylene-C matching layer at the center of the targetted band (500 GHz) in a lens-antenna integrated system. We measure a 1.6 dB higher transmission of the proposed silicon frusta matching compared to the parylene-C matching layer., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronics, Tera-Hertz Sensing

A focal plane array of extended-hemispherical silicon lenses coupled to aluminum coplanar-waveguide (CPW) Microwave Kinetic Inductance Detectors (MKIDs) has been designed to operate at 7.8 THz. Low-dispersive leaky-wave radiation has been used to efficiently illuminate the antireflection-coated lenses. To minimize the radiation loss from the antenna feeding lines at these high frequencies, the CPWs have been miniaturized and placed on a dielectric membrane. A test device has been fabricated and its experimental characterization in terms of sensitivity, optical coupling, and beam patterns is ongoing., Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, Electronics

This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up to 500μ m-deep vias. Full conformality of Al sputtering was made possible by shaping the vias with a tailored hourglass profile, which allowed a metallic layer as thick as 430 nm to be deposited in the center of the vias. Single-via electric resistance as low as 160 mΩ at room temperature and superconductivity at 1.27 K were measured by a three-dimensional (3D) cross-bridge Kelvin resistor structure. This work establishes a CMOS-compatible fabrication process suitable for arrays of superconducting TSVs and 3D integration of superconducting silicon-based devices. [2020-0354]., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., EKL Processing, Electronic Components, Technology and Materials, Tera-Hertz Sensing, Electronics

The time evolution of voltages and currents in a pulsed photo conductive antenna (PCA) source is evaluated resorting to a rigorous procedure that stems from semiconductor physics first, to define the phenomena involved in the generation of the photocurrent, and then relies on an equivalent circuit in time domain, providing a direct estimation of the power generated by the PCA as well as its spectral distribution. The circuit model is validated via a campaign of measurements of standard PC antenna sources. The saturation phenomena in the THz radiated power occurring at large optical excitation levels, previously observed by the scientific community and associated to different phenomena, are accurately predicted by the present method, which ascribe their main cause to the feedback from the antenna: indeed, the electromagnetic field generated by the device tend to reduce the strength of the forcing field used to accelerate the photo-carriers., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, EKL Processing, Electronics

We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm-deep and 50μm-wide vias with a mere 2μm-thick layer of Al, a widely available metal in for IC manufacturing, was demonstrated. Single-via electric resistance as low as 468 mΩ at room temperature and superconductivity at 1.25 K were measured by a cross-bridge Kelvin resistor structure. This work establishes the fabrication of functional superconducting interposers suitable for 3D integration of high-density silicon-based quantum computing architectures., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Electronic Components, Technology and Materials, EKL Processing, Tera-Hertz Sensing

This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall profile for the axisymmetric vias. Single-via electric resistance as low as 80.44 mΩ at room temperature and superconductivity below 1.28 K were measured by a crossbridge Kelvin resistor structure. This work thus demonstrates the fabrication of functional superconducting interposer layers, suitable for high-density 3D integration of silicon-based quantum computing architectures., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., EKL Processing, Electronic Components, Technology and Materials, Tera-Hertz Sensing

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with a detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of ∼960 pixels and fabricated on monolithic 55 mm × 55 mm × 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference, an array with a low Tc superconducting film as a phonon absorber on the opposite side of the substrate, and arrays with MKIDs on membranes. The idea is that the low Tc layer down converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1% for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers., Tera-Hertz Sensing, QN/Quantum Nanoscience, QN/van der Zant Lab

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with a detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of ∼960 pixels and fabricated on monolithic 55 mm × 55 mm × 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference, an array with a low Tc superconducting film as a phonon absorber on the opposite side of the substrate, and arrays with MKIDs on membranes. The idea is that the low Tc layer down converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1% for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers., Tera-Hertz Sensing, QN/Quantum Nanoscience, QN/van der Zant Lab

Astronomical observations at infrared, sub-millimetre, and millimetre wavelengths are essential for addressing many of the key questions in astrophysics. Future ground- and space based observatories need large detector arrays with a sensitivity limited only by the noise of the radiation background. We demonstrate that antenna coupled Microwave Kinetic Inductance Detectors allow us to create kpixel large arrays with background limited sensitivity over the entire FIR/mmwavelength range. We discuss in detail the readout system and experimental results of a 961 pixel array, optimised for 850 GHz radiation that is read out with a single readout chain., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, QN/Quantum Nanoscience, QN/Mol. Electronics & Devices

Astronomical observations at infrared, sub-millimetre, and millimetre wavelengths are essential for addressing many of the key questions in astrophysics. Future ground- and space based observatories need large detector arrays with a sensitivity limited only by the noise of the radiation background. We demonstrate that antenna coupled Microwave Kinetic Inductance Detectors allow us to create kpixel large arrays with background limited sensitivity over the entire FIR/mmwavelength range. We discuss in detail the readout system and experimental results of a 961 pixel array, optimised for 850 GHz radiation that is read out with a single readout chain., Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public., Tera-Hertz Sensing, QN/Quantum Nanoscience, QN/Mol. Electronics & Devices

There is an increasing demand for large format detector arrays with large bandwidths and high antenna efficiencies for future THz astronomical radiometric applications. For direct detection instruments, it is also desired to have antennas with dual polarization reception in order to increase the received power from incoherent sources, thereby improving the observing speed of the instrument. The main goal of this work is the validation of the incoherent detection of two orthogonal polarizations by a leaky lens antenna, coupled to a single Microwave Kinetic Inductance Detector (MKID). Depending on the absorbed power over a distributed transmission line, the resonant frequency of the MKID changes. The proposed antenna is composed of two crossed leaky wave slots feeding a silicon extended hemispherical lens. The slots are coupled to four aluminum (Al) coplanar waveguide (CPW) lines that incoherently absorb the incoming THz radiation. The antenna and the power absorbing CPW lines are embedded inside the MKID, allowing an efficient radiation detection at THz frequencies where no lossless superconductors are available. The proposed dual-polarized device absorbs power incrementally over four different CPWs incoherently and is therefore simulated in reception (deriving a plane-wave response) similarly to what is done in distributed absorbers. We compare numerically and experimentally the proposed dual-polarized leaky lens coupled MKID and its single polarization counterpart and show that the dual polarized device receives twice as much power as the single-polarized one. Eventually, the dual-polarized device, when used with air-bridges, provides the same angular selectivity and twice the throughput of the single-polarized one., Tera-Hertz Sensing

This contribution presents the design and sub-mm wave measurements of a wideband dual polarized leaky lens antenna coupled to kinetic inductance detector (KIDs) to be specifically used for tightly spaced focal plane arrays. The antenna is planar and composed by two crossed slots, fed by two orthogonal coplanar waveguide (CPW) lines. In transmission, the crossed CPW lines are fed differentially in order to couple the radiation into the slots. The slot antenna feeds a dielectric lens to achieve directive patterns. The main goal of this work is to show the measurement results of the patterns and efficiency, and compare this antenna with its singly polarized version. The measured received power from an incoherent source is increased by a factor of 2 compared to a single-polarized version of the antenna., Accepted Author Manuscript, Tera-Hertz Sensing

This contribution presents the design and sub-mm wave measurements of a wideband dual polarized leaky lens antenna coupled to kinetic inductance detector (KIDs) to be specifically used for tightly spaced focal plane arrays. The antenna is planar and composed by two crossed slots, fed by two orthogonal coplanar waveguide (CPW) lines. In transmission, the crossed CPW lines are fed differentially in order to couple the radiation into the slots. The slot antenna feeds a dielectric lens to achieve directive patterns. The main goal of this work is to show the measurement results of the patterns and efficiency, and compare this antenna with its singly polarized version. The measured received power from an incoherent source is increased by a factor of 2 compared to a single-polarized version of the antenna., Accepted Author Manuscript, Tera-Hertz Sensing

We present the design, fabrication, and full characterisation (sensitivity, beam pattern, and frequency response) of a background limited broadband antenna coupled kinetic inductance detector covering the frequency range from 1.4 to 2.8 THz. This device shows photon noise limited performance with a noise equivalent power of 2.5 × 10-19W/Hz1/2 at 1.55 THz and can be easily scaled to a kilo-pixel array. The measured optical efficiency, beam pattern, and antenna frequency response match very well the simulations., Tera-Hertz Sensing