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45 results on '"Burgnies, L."'

1. Broadband RCS reduction by means of disordered coding metasurfaces.

Author

Mourad, A., Burgnies, L., and Lheurette, É.

Subjects
*RADAR cross sections, *BISTATIC radar, *OPTIMIZATION algorithms, *PRINTED circuits
Abstract

Pattern Search (PS) optimization algorithm has been used for the design of disordered coding metasurfaces with the aim of reducing both monostatic and bistatic Radar Cross Section (RCS) in the 26–40 GHz frequency range. On this basis, high and low phase-state unit-cells have been defined with special attention to the minimization of coupling between the elementary patterns, thus allowing a quasi-constant 180° phase difference over a broad frequency range. Then, finite size metasurfaces have been designed and fabricated using the printed circuit board technological process. Finally, the experimental characterization of various disordered samples leads to −10 dB monostatic RCS reduction over a relative frequency band broader than 35% with a good agreement with both simulated and analytic theoretical predictions. This illustrates the relevance of disordered coded patterns for RCS reduction as well as the PS optimization approach as a design method of coding metasurfaces. [ABSTRACT FROM AUTHOR]

Published
2023
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2. Spoof surface plasmon polariton supported by square ring metasurface for wearable body area network.

Author

Ghaddar, A., Garnier, B., Rault, F., Lheurette, É., and Burgnies, L.

Subjects
POLARITONS, BODY area networks, ELECTRIC currents, DIPOLE antennas, ANTENNAS (Electronics), ELECTRIC fields
Abstract

A metasurface consisting of a 2D periodic square lattice of metallic square ring resonators is considered for supporting spoof surface plasmon polariton (SSPP) modes. First, SSPP modes are highlighted by simulated dispersion curves. The dispersion curves are analyzed by considering hybridization of modes in either a patch or an aperture array with frequency shifts. Hybridization of modes is also supported by means of surface current and electric field mappings showing consistent symmetric and anti-symmetric fields. Second, it is shown that a dipole antenna located near the metasurface is able to generate SSPP modes. The transmission spectra between two antennas located at each extremity of the metasurface show transmission enhancements compared with propagation in free space. The transmission enhancements are shown for different locations of the antennas either facing each other or positioned in diagonal. Finally, the transmission enhancement is connected to SSPP modes by comparing the transmission spectra and the measured dispersion curves with each other. Specifically, two transmission windows measured for an embroidered metasurface are related to the cutoff frequency of the two SSPP modes supported by the metasurface as evidenced by the measured dispersion curves. [ABSTRACT FROM AUTHOR]

Published
2023
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4. Poisson distributions in disordered metamaterials absorbers.

Author

Fernez, N., Burgnies, L., Dereudre, D., Lippens, D., and Lheurette, É.

Subjects
*POISSON distribution, *ABSORPTION, *METAMATERIALS, *PARTICLE density (Nuclear chemistry), *RESONATORS, *MONOMERS, *DIMERS
Abstract

The absorption mechanisms of Poisson-distributed disordered Metal-Insulator-Metal structures are investigated theoretically and numerically. In particular, from the Poisson point process, Slivnyak–Mecke integrals are used to predict the number of isolated particles and majority clusters as a function of the particle density z. Then, the impact of these numbers on peak, mean, and bandwidth absorbance is calculated by full-wave electromagnetic analysis. It is shown that the peak absorbance reaches a maximum value of higher than 0.9 for a particle density of 0.6 cm−2 originating from main contributions of monomers and dimers whereas trimers represent less than 6% of the total number of particles. The conclusions of these studies are experimentally confirmed by means of free-space characterization. [ABSTRACT FROM AUTHOR]

Published
2019
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5. Characterization of doped BST thin films deposited by sol-gel for tunable microwave devices

Author

Khalfallaoui, A., Velu, G., Burgnies, L., and Carru, J.-C.

Subjects
Barium compounds -- Electric properties, Dielectric devices -- Design and construction, Magnesium compounds -- Electric properties, Semiconductor doping -- Analysis, Strontium -- Electric properties, Titanium compounds -- Electric properties, Business, Electronics, Electronics and electrical industries
Published
2010

6. Broadband absorption through extended resonance modes in random metamaterials.

Author

Hao, J., Niemiec, R., Burgnies, L., Lheurette, É., and Lippens, D.

Subjects
METAMATERIALS, COMPOSITE materials research, BROADBAND communication systems, MECHANICAL engineering
Abstract

The properties of disordered metamaterial absorbers are analyzed on the basis of numerical simulations and experimental characterizations. A broadening of the absorption spectrum is clearly evidenced. This effect is the consequence of both the coupling between nearby resonators leading to the occurrence of extended magnetic resonance modes and the interconnection of elementary particles yielding the definition of resonating clusters. The angular robustness of the absorbing structure under oblique incidence is also demonstrated for a wide domain of angles. [ABSTRACT FROM AUTHOR]

Published
2016
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7. Resonant tunneling structures with local potential perturbations

Author

Burgnies, L., Vanbesien, O., Sadaune, V., Lippens, D., Nagle, J., and Vinter, B.

Subjects
Tunneling (Physics) -- Analysis, Thin films, Multilayered -- Research, Physics
Abstract

Band-beading effects in resonant tunneling heterostructures with local potential perturbations are represented by Schrodinger-Poisson model. The structures display state-of-the-art conduction properties with highpeak current density and peak-to-valley current ratio. The feasibility of Thomas-Fermi screening model that causes carrier density distortions at heterointerfaces is analyzed.

Published
1994

8. Textile inspired flexible metamaterial with negative refractive index.

Author

Burgnies, L., Lheurette, É., and Lippens, D.

Subjects
*DIELECTRIC properties of metamaterials, *REFRACTIVE index, *DIELECTRIC materials, *PERMITTIVITY, *PERMEABILITY, *TEXTILE chemistry
Abstract

This work introduces metallo-dielectric woven fabric as a metamaterial for phase-front manipulation. Dispersion diagram as well as effective medium parameters retrieved from reflection and transmission coefficients point out negative values of refractive index. By numerical simulations, it is evidenced that a pair of meandered metallic wires, arranged in a top to bottom configuration, can yield to a textile metamaterial with simultaneously negative permittivity and permeability. While the effective negative permittivity stems from the metallic grid arrangement, resonating current loop resulting from the top to bottom configuration of two meandered metallic wires in near proximity produces magnetic activity with negative permeability. By adjusting the distance between pairs of metallic wires, the electric plasma frequency can be shifted to overlap the magnetic resonance. Finally, it is shown that the woven metamaterial is insensitive to the incident angle up to around 60°. [ABSTRACT FROM AUTHOR]

Published
2015
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9. 3A3_0443_ EMBROIDERED SPLIT RING RESONATOR ANTENNA

Author

Hao, J., primary, Leblanc, A., additional, Burgnies, L., additional, Djouadi, A., additional, Tao, Xuyuan, additional, Cochrane, Cedric, additional, Rault, F., additional, Koncar, Vladan, additional, and Lheurette, É., additional

Published
2019
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11. A fully distributed non linear waveguide using (Pb,Sr)TiO3 thin film: Second and third harmonics generation.

Author

Ponchel, F., Burgnies, L., Ducatteau, D., Lheurette, É., Rémiens, D., and Lippens, D.

Subjects
*NONLINEAR waves, *THIN films, *ELECTRICAL harmonics, *COPLANAR waveguides, *FERROELECTRIC crystals
Abstract

We report on the experimental investigation of a non-linear (NL) Co-Planar Waveguide (CPW) fabricated by means of a ferroelectric film. In contrast to conventional NL-CPW, periodically loaded by lumped varactors, the tunable ferroelectric material is fully distributed along the propagation direction and the transmission line does not intrinsically exhibit Bragg cutoff. The experimental demonstration is carried out by means of a 160 nm-thick Pb0.4Sr0.6TiO3 ferroelectric film voltage-controlled via the 1 μm-slot of a CPW transmission line. In a first stage, complex dielectric constant has been retrieved from scattering parameters measurements up to 60 GHz and for a bias voltage ranging from 0 to 30 V. High performances in terms of tunability have been found by a relative permittivity change under 30 V as high as 60% in the overall frequency band. Subsequently, the tunable ferroelectric CPW was used for second and third harmonics generation for a fundamental at centimeter wavelengths. While for low dc-voltage, third harmonic generation is dominant, it is found a main harmonic generation of rank 2 at higher dc bias voltage in agreement with the symmetry properties of the C(V) characteristics. [ABSTRACT FROM AUTHOR]

Published
2013
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16. Absorption parfaite dans un métamatériau basé sur les résonances de Mie

Author

Hao, J., Véronique Sadaune, Burgnies, L., Lheurette, E., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
[SPI]Engineering Sciences [physics]
Published
2013

17. Multiplication de fréquence par guide coplanaire ferroélectrique

Author

Ponchel, Freddy, Burgnies, L., Ducatteau, D., Lheurette, Eric, Remiens, Denis, Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Published
2013

18. Flexible broadband perfect metamaterial absorber operating at millimeter waves

Author

HAO, J.P., MISMER, C., Ducournau, G., Burgnies, L., Lheurette, E., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Published
2013

19. Ferroelectric metamaterial perfect absorber

Author

Hao, J. P., Véronique Sadaune, Burgnies, L., Lheurette, E., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Published
2013

20. Surfaces absorbantes à base de ferroélectriques

Author

Hao, J. P., Véronique Sadaune, Burgnies, L., Lheurette, E., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Published
2013

21. Résolution de l'équation de Poisson généralisée discrète - Application aux capacités interdigitées ferroélectriques commandables en tension

Author

Ropa, P., Burgnies, L., Carru, J.C., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Unité de Dynamique et Structure des Matériaux Moléculaires (UDSMM), and Université du Littoral Côte d'Opale (ULCO)-Université de Lille

Subjects
[SPI]Engineering Sciences [physics]
Published
2012

22. Métamatériaux à base de microrésonateurs fendus accordables par films minces ferroélectriques

Author

Houzet, G., Burgnies, L., Melique, X., Velu, G., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Unité de Dynamique et Structure des Matériaux Moléculaires (UDSMM), and Université du Littoral Côte d'Opale (ULCO)-Université de Lille

Subjects
[SPI]Engineering Sciences [physics]
Published
2010

23. Propriétés diélectriques de films BST jusqu'à 110 GHz : applications aux varactors en bandes millimétriques

Author

Houzet, G., Burgnies, L., Blary, K., Velu, G., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC ), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), and Université du Littoral Côte d'Opale (ULCO)

Subjects
[SPI]Engineering Sciences [physics]
Abstract

National audience

Published
2009

24. Ligne de transmission composite équilibrée fonctionnant en bandes Ku et K

Author

Houzet, G., Velu, G., Marteau, A., Burgnies, L., Lheurette, E., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), and Université du Littoral Côte d'Opale (ULCO)

Subjects
[SPI]Engineering Sciences [physics]
Published
2009

25. Microstrip transmission lines loaded by SRRs tunabled by ferroelectrics

Author

Houzet, G., Melique, X., Velu, G., Burgnies, L., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), and Université du Littoral Côte d'Opale (ULCO)

Subjects
[SPI]Engineering Sciences [physics]
Published
2009

26. Permittivité complexe du ferroélectrique BaSrTiO3 aux longueurs d'ondes millimétriques

Author

Houzet, G., Burgnies, L., Lepilliet, S., Velu, G., Blary, K., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Dispostifs Opto et Micro Electronique - IEMN (DOME - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Université du Littoral Côte d'Opale (ULCO), and Unité de Dynamique et Structure des Matériaux Moléculaires (UDSMM)

Subjects
[SPI]Engineering Sciences [physics]
Abstract

International audience

Published
2008

27. Voltage-controlled composite metamaterials via the loaded transmission line approach

Author

Houzet, G., Marteau, A., Velu, G., Lheurette, E., Burgnies, L., Carru, J.C., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), and Université du Littoral Côte d'Opale (ULCO)

Subjects
[PHYS]Physics [physics]
Published
2007

28. A 310°/3.6dB K-band phaseshifter using paraelectric BST thin films

Author

Vélu, G., Blary, K., Burgnies, L., Carru, J.C., Delos, E., Marteau, A., Lippens, D., Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), Université du Littoral Côte d'Opale (ULCO), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Coplanar waveguides, Dielectric materials, Atomic force microscopy, [SPI]Engineering Sciences [physics], Ferroelectric materials, Binary search trees, Sputtering, Capacitors, Frequency, Transistors, Scanning electron microscopy
Abstract

International audience; Ferro- and para-electric BaSrTiO/sub 3/ (/spl epsiv//sub r//spl sim/350 and tg/spl delta//spl sim/5/spl times/10/sup -2/ at 0V) thin films were deposited by low-cost sol-gel techniques. Subsequently, the films were used for fabricating coplanar waveguide phaseshifters using tunable finger-shaped capacitors. A 310/spl deg/ phaseshift was obtained at 30GHz and 35V of tuning voltage with 3.6dB of insertion loss yielding a figure of merit of 85/spl deg//dB.

Published
2006

29. A 310 degrees K-band phaseshifter using tunable BaSrTiO3 interdigitated capacitors

Author

Velu, G., Blary, K., Burgnies, L., Carru, J.C., Delos, E., Marteau, A., Lippens, D., Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), Université du Littoral Côte d'Opale (ULCO), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Dielectric loss measurement, [SPI]Engineering Sciences [physics], Ferroelectric materials, Frequency measurement, Permittivity, Binary search trees, Sputtering, Voltage, K-band, Capacitors, Ferroelectric films
Abstract

International audience; BaSrTiO/sub 3/ thin films were deposited by low-cost sol-gel techniques and exhibit relative permittivity of 300 and loss tangent of 0.012 with a roll off above 5 GHz. Subsequently the films were used for fabricating coplanar waveguide phaseshifters using tunable finger-shaped capacitors. A 310/spl deg/ phaseshift was thus obtained at 30 GHz and 35 V of tuning voltage with 3.6 dB of insertion loss yielding a figure of merit of 85/spl deg//dB.

Published
2005

39. Ionic Polarization Occurrence in BaSrTiO 3 Thin Film by THz-Time Domain Spectroscopy.

Author

Houzet, G., Blary, K., Lepilliet, S., Lippens, D., Burgnies, L., Vélu, G., Carru, J. C., Nguéma, E., and Mounaix, P.

Subjects
THIN films, TITANIUM oxides, BARIUM strontium titanate, IONS, POLARIZATION (Electricity), TERAHERTZ spectroscopy, MICROWAVE measurements, PERMITTIVITY
Abstract

BaSrTiO3 thin films in a paraelectric phase were characterized on the one hand from 1 GHz to 200 GHz by microwave measurements on interdigitated capacitance and coplanar waveguides and on the other hand up to 3 THz by Time Domain Spectroscopy. An overlap of the polar nanoregion relaxation mechanism with a characteristic frequency around 800 GHz and of the ionic polarization with a relaxation frequency around 3 THz is directly evidenced experimentally. [ABSTRACT FROM PUBLISHER]

Published
2012
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41. A 310°/3.6-dB K-band phaseshifter using paraelectric BST thin films.

Author

Velu, G., Blary, K., Burgnies, L., Carru, J.C., Delos, E., Marteau, A., and Lippens, D.

Abstract

Ferro- and para-electric BaSrTiO3 (εr∼350 and tgδ∼5×10-2 at 0V) thin films were deposited by low-cost sol-gel techniques. Subsequently, the films were used for fabricating coplanar waveguide phaseshifters using tunable finger-shaped capacitors. A 310° phaseshift was obtained at 30GHz and 35V of tuning voltage with 3.6dB of insertion loss yielding a figure of merit of 85°/dB. [ABSTRACT FROM PUBLISHER]

Published
2006
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42. Ferroelectric metamaterial perfect absorber based on Mie-resonance

Author

Hao, J. P., Véronique Sadaune, Burgnies, L., Lheurette, E., Lippens, D., Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

43. Application des concepts de gap de photons aux structures micro-ondes accordables

Author

Vanbésien, O., Akalin, T., Fernandez Diego, M., Arscott, S., Lippens, D., Burgnies, L., Velu, G., Carru, J. C., ERIC CATTAN, El Hadj Dogheche, Denis Remiens, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire de Physico-Chimie de l'Atmosphère (LPCA), Université du Littoral Côte d'Opale (ULCO)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
[SPI]Engineering Sciences [physics]
Abstract

National audience

45. Downscaling at submicrometer scale of the gap width of interdigitated Ba0.5Sr0.5TiO3 capacitors.

Author

Khalfallaoui A, Burgnies L, Blary K, Velu G, Lippens D, and Carru JC

Abstract

The goal of this work was to study the influence of shrinking the gap width between the fingers of interdigitated tunable capacitors (IDCs). Voltage control of the capacitance was achieved with a 500-nm-thick Ba0.5Sr0.5TiO3 film which is in paraelectric state at room temperature. Eight devices with finger spacing ranging from 3 μm down to 0.25 μm were fabricated by the sol-gel deposition technique, electron beam patterning, and gold evaporation. The equivalent capacitance, quality factor, and tunability of the devices were measured subsequently by vector network analysis from 40 MHz to 40 GHz and for a dc bias voltage varying from -30 V to +30 V. This experimental study mainly shows that a decrease of the gap below 1 μm 1) introduces a frequency dependence of the capacitance caused by resonance effects with the finger inductance; 2) degrades the quality factor above 20 GHz, and 3) optimizes the tunability of the devices by enhancing the local electric field values. As a consequence, some trade-offs are pointed out related to the goal of ultra-thin ferroelectric film which can be voltage controlled by means of finger-shaped electrodes with deep submicrometer spacing.

Published
2015
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