16 results on '"Busch, Jens"'
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2. Automatic Generation of Control Programs for Walking Robots Using Genetic Programming
3. How to Program Artificial Chemistries
4. RESAC: eine resolutionsbasierte Künstliche Chemie und deren Anwendungen
5. Effects of focus difference of nested and isolated features for scanner proximity matching
6. Multilayer reticles: advantages and challenges for 28nm chip making
7. Improving lithographic performance for 32 nm
8. Mask parameter variation in the context of the overall variation budget of an advanced logic wafer fab
9. Meeting overlay requirements for future technology nodes with in-die overlay metrology
10. Multilayer reticles: advantages and challenges for 28nm chip making.
11. Mask parameter variation in the context of the overall variation budget of an advanced logic wafer fab.
12. Meeting overlay requirements for future technology nodes with in-die overlay metrology.
13. In-field overlay uncertainty contributors: a back end study.
14. Effects of focus difference of nested and isolated features for scanner proximity matching
15. Western Europe could reduce CO{sub}2 emissions by a third
16. Renewable energy could stop the greenhouse effect
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