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4. Highly Scaled BEOL-Compatible Thin Film Transistors With Ultrathin Atomic Layer Deposited Indium–Tin–Zinc–Oxide Channel

5. First Demonstration of Highly Scaled Atomic Layer Deposited Ultrathin InSnZnO Channel Thin Film Transistor Exhibiting Superior Electrical Characteristics

6. Single‐Gate In‐Transistor Readout of Current Superposition and Collapse Utilizing Quantum Tunneling and Ferroelectric Switching

7. Corrections to “Low-Temperature Microwave Annealing Processes for Future IC Fabrication—A Review” [Mar 14 651-665]

11. Aggressively Scaled Atomic Layer Deposited Amorphous InZnOx Thin Film Transistor Exhibiting Prominent Short Channel Characteristics (SS= 69 mV/dec.; DIBL = 27.8 mV/V) and High Gm(802 μS/μm at VDS = 2V)

14. Ti supersaturated Si by microwave annealing processes

15. Antiferroelectric Hf0.25Zr0.75O2 With Ferroelectric Properties and Low Voltage Operation of AFeRAM and AFeFET by Using Low-Temperature Atomic Layer Deposition

16. Ti supersaturated Si by microwave annealing processes

17. Highly Stable Short Channel Ultrathin Atomic Layer Deposited Indium Zinc Oxide Thin Film Transistors with Excellent Electrical Characteristics

23. A Harmonic Radar Tag With High Detection Range Utilizing Ge FinFETs CMOS Technology

26. First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3-D Integration With Dual Work Function Gate for Ultralow-Power SRAM and RF Applications

38. Fabrication of Bilayer Stacked Antiferroelectric/ Ferroelectric HfxZr1-xO2 FeRAM and FeFET With Improved Leakage Current and Robust Reliability by Modifying Atomic Layer Deposition Temperatures

39. Reliability of Multiple-Layer Stacked Gate-All-Around Poly-Si Nanosheet Channel Ferroelectric HfxZr1-xO2FETs With NH3 Plasma Treatment

43. Novel one-step aqueous solutions to replace pregate oxide cleans

45. Effect of CF4 plasma pretreatment on low temperature oxides

46. Comparison of novel cleaning solutions with various chelating agents for post-CMP cleaning on poly-Si film

47. Improved low temperature characteristics of P-channel MOFSETs with Si[subscript 1-x]Ge[subscript x] raised source and drain

48. High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices

50. Comparison of ultrathin CoTi03 and NiTi03 high-k gate dielectrics

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