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In glass molding to produce biochips with micro holes, cavities, and channels, it is important to machine micro molds. This study presents a novel process for fabricating micro pin arrays on carbon graphite, one of the glass molding materials. The micro pin array was used as a mold to fabricate a glass-based micro hole array. Using conventional micro endmill tools, machining micro-cylindrical pins requires complex toolpaths and is time-consuming. In order to machine micro pin arrays with high efficiency, a micro eccentric tool was introduced. Micro pin arrays with a diameter of 200 µm and a height of 200 µm were easily fabricated on graphite using the micro eccentric tool. In the machining of micro pin arrays using eccentric tools, the machining characteristics such as cutting force and tool wear were investigated.

Although glass is in high demand as a material for microfluidic chips, it is still difficult to fabricate microstructures on glass. In this paper, polycrystalline diamond tools were fabricated through electrical discharge machining, and the microgrinding process for fused silica using the tools was studied. In order to improve the productivity, the machining effects of the high feed rate and depth of cut on the surface roughness of the channel bottoms and edge chipping were studied. A toolpath for the microchannels of a microfluidic chip was also studied and a microfluidic chip array was fabricated using this method.