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We report on the development of multi-absorber transition edge sensors (TESs), referred to as hydras. A hydra consists of multiple x-ray absorbers each with a different thermal conductance to a TES. Position information is encoded in the pulse shape. With some trade-off in performance, hydras enable very large format arrays without the prohibitive increase in bias and read-out components associated with arrays of individual TESs. Hydras are under development for the next generation of space telescope such as Lynx. Lynx is a NASA concept under study that will combine a < 1 arcsecond angular resolution optic with 100,000-pixel microcalorimeter array with energy resolution of deltaE_FWHM ~ 3 eV in the soft x-ray energy range. We present first results from hydras with 25-pixels for Lynx. Designs with absorbers on a 25 micron and 50 micron pitch are studied. Arrays incorporate, for the first time, microstrip buried wiring layers of suitable pitch and density required to readout a full-scale Lynx array. The resolution from the coadded energy histogram including all 25-pixels was deltaE_FWHM = 1.66+/-0.02 eV and 3.34+/-0.06 eV at an energy of 1.5 keV for the 25 micron and 50 micron absorber designs respectively. Position discrimination is demonstrated from parameterization of the rise-time., Comment: 7 pages, 5 figures. Low Temperature Detectors 18 Conference, Milan Italy

The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\,0.95$ from ${\rm 1-20\,THz}$ (${\rm 300-15\,\mu m}$) over a temperature range spanning ${\rm 5-300\,K}$. The meta-material, realized from an array of tapers ${\rm \approx 100\,\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model., Comment: 6 pages, 2 figures, published -- Review of Scientific Instruments 87, 054701 (2016)

In many superconducting transition-edge sensor (TES) microcalorimeters, the measured electrical noise exceeds theoretical estimates based on a thermal model of a single body thermally connected to a heat bath. Here, we report on noise and complex impedance measurements of a range of designs of TESs made with a Mo/Au bilayer. We have fitted the measured data using a two-body model, where the x-ray absorber and the TES are connected by an internal thermal conductance Gae. We find that the so-called excess noise measured in these devices is consistent with the noise generated from the internal thermal fluctuations between the x-ray absorber and the TES. Our fitted parameters are consistent with the origin of Gae being from the finite thermal conductance of the TES itself. These results suggest that even in these relatively low resistance Mo/Au TESs, the internal thermal conductance of the TES may add significant additional noise and could account for all the measured excess noise. Furthermore, we find that around regions of the superconducting transition with rapidly changing derivative of resistance with respect to temperature, an additional noise mechanism may dominate. These observations may lead to a greater understanding of TES devices and allow the design of TES microcalorimeters with improved performance.

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Lynx is a proposed NASA X-Ray telescope flight mission aimed at achieving state-of-the-art angular and energy resolution with a 100 kilopixel array to probe the hot energetic young universe in unprecedented detail. To achieve these goals, our team plans on leveraging our current work in development of the focal plane for the Athena X-Ray Integral Field Unit (X-IFU) while advancing the state-of-the-art in transition edge sensor (TES) X-ray detector technology. The TES is an optimal technology for achieving both high energy and fine angular resolution at the same time because pixel features can be made extremely small and the absorber which dominates the heat capacity can be tuned to meet resolution requirements. Specifically, the proposed mission concept calls for a hybrid detector of three different arrays fabricated in the same planar process in one focal plane and optimized for different science goals. The main arrays consist of 5x5 hydras, 25 pixels of 4 micron thick Au absorbers each with a different thermal link to one common TES. The outer array has absorbers on a 50-micron pitch for most of the 5 arc-minute field-of-view, and the inner array has 25-micron absorbers for the central 1 arc-minute region. A high resolution array consisting of single pixel 1 micron thick Au absorbers on 50-micron pitch will lie off to the side. Reading out an array of this magnitude will likely require improvements in indium bump bonding to superconducting flexible wiring. Fabrication of absorbers of two different sizes requires electroplating through a photoresist mold by careful tuning of the current density to achieve uniform flat absorbers on a fine pitch scale, followed by ion milling to yield narrow streets separating the pixels while preserving high quantum efficiency. We report on progress made at fabricating the hybrid array with different absorber sizes and thicknesses. Further, we also report on ongoing work to adequately heat sink the pixels with backside wire bonding and copper coating. We also report on work to improve detector pixel yield and top side indium bump bonding to flexible wiring.

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

The X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of 3840 AC-biased transition edge sensors (TESs), read out using frequency domain multiplexing (FDM). In this paper we describe details of the latest pixels geometries that are being designed for the current baseline array configuration. This includes details on how important TES properties (transition parameters, thermal design of the pixels, absorber composition) are being optimized to meet the target energy resolution, count-rate and quantum efficiency. We also present the latest design optimizations specifically targeted at mitigating AC-bias phenomena in Mo/Au TESs that can degrade performance.

The performance of Transition-Edge Sensors (TES) and their SQUID multiplexed read-outs are very sensitive to the ambient magnetic field from Earth and fluctuations that can arise due to fluctuating magnetic fields outside of the focal plane assembly from the Adiabatic Demagnetization Refrigerator (ADR).Thus, the experimental platform we are building to test the FPA of the X-ray Integral Field Unit (X-IFU) of the Athena mission needs to include a series of shields and a coil in order to meet the following requirement of magnetic field density and uniformity.

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

Exploring the effects of size and geometry of normal metal features on the transition shapes and performance of transition-edge sensor microcalorimeters. The spectral resolution of transition-edge sensor (TES) microcalorimeters is very sensitive to the specific dependencies of the resistance R in the superconducting transition on the current I, magnetic field B, and temperature T. In particular, it has been shown that transitions that are very steep in (R,T) space lead to a significant noise term, in excess of conventional expectations. This so-called unexplained noise is known to be reduced by the addition of normal metal stripes across the TES perpendicular to the direction of current flow. These normal metal stripes have been shown to drastically alter the oscillatory patterns seen in measurements of the critical current as a function of magnetic field. However, there are many remaining questions about the exact impact of the stripes on current distributions within the TES, the Fraunhofer pattern and, therefore, the shape of the R(I, B, T) surface. Through measurements of the resistance under DC bias of TES devices of various sizes, with different stripe patterns and dimensions, we will discuss how these stripes can affect the R(I, B, T) surface. In addition, using measurements and analysis of the noise spectra of various devices we will present how these changes to the stripe pattern may affect the performance of the TES. In particular, we will discuss strategies to reduce the presence of localized discontinuities in the derivative of R, associated with increased noise, while maintaining the globally low levels of unexplained noise currently achieved with conventional metal stripe patterns. Implementing these strategies is a path towards producing large arrays with highly uniform transitions and high spectral resolution. These large uniform arrays will be required for future x-ray astronomy applications, such as the X-IFU on ATHENA.

We have been developing superconducting transition-edge sensor (TES) microcalorimeters for a variety of potential astrophysics missions, including Athena. The X-ray Integral Field Unit (X-IFU) instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. The traditional approach within our group has been to use square TES bilayers on molybdenum and gold that are between 100 and 140 microns in size, deposited on silicon nitride membranes to provide a weak thermal conductance to a 50 mK heat bath temperature. It has been shown that normal metal stripes on top of the bilayer are needed to keep the unexplained noise at a level consistent with the expected based upon estimates for the non-equilibrium non-linear Johnson noise.In this work we describe a new approach in which we use a square TES bilayer that is 50 microns in size. While the weak link effect is much stronger in this size of TES, we have found that excellent spectral performance can be achieved without the need for any normal metal strips on top of the TES. A spectral performance of 1.58 eV at 6 KeV has been achieved, the best resolution seen in any of our devices with this pixel size. The absence of normal metal stripes has led to more uniform transition shapes, and more reliable excellent spectral performance. The smaller TES size has meant that that the thermal conductance to the heat bath, determined by the perimeter length of the TES and the membrane thickness, is lower than on previous devices, and thus has a lower count rate capability. This is an advantage for low count-rate applications where the slower speed enables easier multiplexing in the read-out, thus potential higher multiplexing factors. In order to recover the higher count rate capabilities, a potential path exits using thicker silicon nitride membranes to increase the thermal conductance to the heat bath.

We have developed large-format, close-packed X-ray microcalorimeter arrays fabricated on solid substrates, designed to achieve high energy resolution with count rates up to a few hundred counts per second per pixel for X-ray photon energies upto 8 keV. Our most recent arrays feature 31-micron absorbers on a 35-micron pitch, reducing the size of pixels by about a factor of two. This change will enable an instrument with significantly higher angular resolution. In order to wire out large format arrays with an increased density of smaller pixels, we have reduced the lateral size of both the microstrip wiring and the Mo/Au transition-edge sensors (TES). We report on the key physical properties of these small TESs and the fine Nb leads attached, including the critical currents and weak-link properties associated with the longitudinal proximity effect.

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.