1. Control of growth process for obtaining high-quality a-SiO:H
- Author
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Sobajima, Yasushi, Kinoshita, Shota, Kakimoto, Shinnosuke, Okumoto, Ryoji, Sada, Chitose, Matsuda, Akihisa, and Okamoto, Hiroaki
- Subjects
Electrical conductivity -- Control ,Silicon alloys -- Electric properties -- Optical properties ,Photoconductivity -- Control ,Plasma (Ionized gases) -- Usage ,High temperature plasmas -- Usage ,Physics - Abstract
Film-growth process of hydrogenated amorphous silicon-oxygen alloys (a-SiO:H) from C[O.sub.2]/(C[O.sub.2] + Si[H.sub.4]) plasma has been investigated to control the optoelectronic properties in the resulting materials. Optical emission spectroscopy results and simple simulation results for steady-state density of chemical species in the plasma indicate that main film-growth precursors for a-SiO:H are Si[H.sub.3], OH, and O. Si dangling-bond defect density is drastically increased in a-SiO:H when increasing the C[O.sub.2] gas ratio in C[O.sub.2]/(C[O.sub.2] + Si[H.sub.4]) plasma, being caused by the increase in the contribution ratio of Si-related short-lifetime species (Si[H.sub.x], x < 2) to film growth owing to a severe Si[H.sub.4]-molecule depletion because of high-rate consumption reaction of Si[H.sub.4] with O produced from C[O.sub.2] in the plasma. Considering the primary electron impact dissociation reactions of source gas molecules and several secondary chemical reactions in the plasma, the guiding principle for obtaining high quality a- SiO:H has been proposed. PACS Nos.: 81.05.Gc, 81.15.Gh, 68.55.Ln. Nous etudions le mecanisme de croissance des films d'alliage de silicium-oxygene hydrogene amorphe (a-SiO:H) a partir d'un plasma de C[O.sub.2]/(C[O.sub.2]+Si[H.sub.4]), afin de controler les proprietes optoelectroniques des echantillons qui en resultent. Des resultats de spectroscopie par emission optique et des simulations simples pour des densites stationnaires des elements chimiques dans le plasma, indiquent que les precurseurs principaux des films de a- SiO:H sont Si[H.sub.3], OH, et O. La densite de defauts de liaisons ouvertes augmente dramatiquement dans le a-SiO:H lorsque que le rapport de C[O.sub.2] gazeux augmente dans le plasma de C[O.sub.2]/(C[O.sub.2]+Si[H.sub.4]). Ceci est cause par une augmentation du rapport de contribution a la croissance, des film des especes chimiques de court temps de vie reliees a Si (Si[H.sub.x], x < 2), qui, elle, fait suite un appauvrissement severe en molecules de Si[H.sub.4], lui-meme cause par le haut taux de reaction de Si[H.sub.4] avec O qui est produit dans le plasma a partir de C[O.sub.2]. Considerant l'importance des reactions de dissociation par impact electronique des molecules du gaz source et de plusieurs reactions chimiques secondaires dans le plasma, nous proposons un guide de pratique pour obtenir des films de a-SiO:H de haute qualite. [Traduit par la Redaction], 1. Introduction Control of optoelectronic properties in wide gap materials is one of the key issues for improving the photovoltaic performance of Si-based thin-film solar cells. Hydrogenated amorphous silicon-oxygen alloys [...]
- Published
- 2014
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