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698 results on '"Elwenspoek M"'

1. Macroscopic equivalence for microscopic motion in a turbulence driven three-dimensional self-assembly reactor

Author

Hageman, T. A. G., Löthman, P. A., Dirnberger, M., Elwenspoek, M., Manz, A., and Abelmann, L.

Subjects
Condensed Matter - Soft Condensed Matter, Nonlinear Sciences - Adaptation and Self-Organizing Systems, Nonlinear Sciences - Chaotic Dynamics, Physics - Data Analysis, Statistics and Probability, Physics - Fluid Dynamics
Abstract

We built and characterised a macroscopic self-assembly reactor that agitates magnetic, centimeter-sized particles with a turbulent water flow. By scaling up the self-assembly processes to the centimeter-scale, the characteristic time constant scale also drastically increases. This makes the system a physical simulator of microscopic self-assembly, where the interaction of inserted particles are easily observable. Trajectory analysis of single particles reveals their velocity to be a Maxwell-Boltzmann distribution and it shows that their average squared displacement over time can be modelled by a confined random walk model, demonstrating a high level of similarity to Brownian motion. The interaction of two particles has been modelled and verified experimentally by observing the distance between two particles over time. The disturbing energy (analogue to temperature) that was obtained experimentally increases with sphere size, and differs by an order of magnitude between single-sphere and two-sphere systems (approximately 80 $\mathrm{\mu J}$ versus 6.5 $\mathrm{\mu J}$, respectively)., Comment: 10 pages, 11 figures

Published
2017
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3. Low-Drift Flow Sensor with Zero-Offset Thermopile-Based Power Feedback

Author

Dijkstra, M., Lammerink, T. S. J., De Boer, Meint, Berenschot, J. W., Wiegerink, Remco, and Elwenspoek, M.

Subjects
Computer Science - Other Computer Science
Abstract

A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 ul/min, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified., Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Published
2008

4. Long range diffusion noise in platinum micro-wires with metallic adhesion layers

Author

Moktadir, Z., van Honschoten, J. W., and Elwenspoek, M.

Subjects
Condensed Matter - Statistical Mechanics
Abstract

Voltage fluctuations of Platinum wires hosted by silicon nitride beams were investigated. We considered four variants of the wires: three with an adhesion layer and one with no adhesion layer. We found that the presence of an adhesion layer changes the nature of the power spectrum which is $1/f$ for wires with no adhesion layers and $1/f^{3/2}$ for wires with an adhesion layer. We attribute the value of the exponent $\alpha=3/2$ to the long range diffusion of hydrogen originating from adhesion layers that undergo a migration through the Pt wires., Comment: 3 pages, 5 figures

Published
2007
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14. Case studies

Author

Elwenspoek, M., Wiegerink, R., Kaliszky, Sandor, editor, Sayir, Mahir, editor, Schneider, Wilhelm, editor, Schrefler, Bernhard, editor, Bianchi, Giovanni, editor, Tasso, Carlo, editor, and Suleman, Afzal, editor

Published
2001
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16. Silicon Micromachining

Author

Elwenspoek, M., Wiegerink, R., Kaliszky, Sandor, editor, Sayir, Mahir, editor, Schneider, Wilhelm, editor, Schrefler, Bernhard, editor, Bianchi, Giovanni, editor, Tasso, Carlo, editor, and Suleman, Afzal, editor

Published
2001
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17. Small and Large: Scaling

Author

Elwenspoek, M., Wiegerink, R., Kaliszky, Sandor, editor, Sayir, Mahir, editor, Schneider, Wilhelm, editor, Schrefler, Bernhard, editor, Bianchi, Giovanni, editor, Tasso, Carlo, editor, and Suleman, Afzal, editor

Published
2001
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18. Microelectromechanical Systems

Author

Elwenspoek, M., Wiegerink, R., Kaliszky, Sandor, editor, Sayir, Mahir, editor, Schneider, Wilhelm, editor, Schrefler, Bernhard, editor, Bianchi, Giovanni, editor, Tasso, Carlo, editor, and Suleman, Afzal, editor

Published
2001
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30. HTS Bolometers for FIR Applications

Author

Steinbeiß, E., Michalke, W., Köhler, T., Eick, T., Schwierzi, B., Burnus, M., Heidenblut, T., Neff, H., Laukemper, J., De Korte, P. A. J., De Nivelle, M. J. M. E., De Vries, R., Bruijn, M. P., Wijnbergen, J. J., Sanchez, S., Elwenspoek, M., Khrebtov, I. A., Tkachenko, A. D., Groll, Horst, editor, and Nedkov, Ivan, editor

Published
1997
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39. The profile of a capillary liquid bridge between solid surfaces

Author

van Honschoten, J.W., Tas, N.R., and Elwenspoek, M.

Subjects
Atomic force microscopy -- Methods, Atomic force microscopy -- Usage, Meniscus (Anatomy) -- Properties, Physics
Abstract

Scanning force microscopy, such as atomic force microscopy (AFM) is complicated by the capillary force of a water meniscus formed in air between the probe tip and the sample. This small liquid bridge between the hydrophilic sample and the sharp AFM tip can be formed by capillary condensation from the vapor phase. We present an analytical model that describes the shape of the meniscus in which the pressure difference across the curved liquid air interface is taken into account. The analysis is based on a minimization of the liquid surface energy, together with the boundary condition of a given pressure drop across the surface as determined by the relative humidity of the vapor. The capillary forces that the wetting liquid exerts on the AFM tip are derived from the model. The resulting expressions can be used to describe arbitrary axial symmetric liquid air interfaces with nonzero total curvature, such as fluid bridges between two surfaces and droplets under a uniform force. The model illustrates some of the basic concepts of capillarity, such as surface tension forces and interfacial pressure drops. [c] 2010 American Association of Physics Teachers. [DOI: 10.1119/1.3273854]

Published
2010

40. Macroscopic equivalence for microscopic motion in a turbulence driven three-dimensional self-assembly reactor.

Author

Hageman, T. A. G., Löthman, P. A., Dirnberger, M., Elwenspoek, M. C., Manz, A., and Abelmann, L.

Subjects
BROWNIAN motion, CRYSTAL growth, PROTEIN folding, DNA folding, SEMICONDUCTOR industry
Abstract

We built and characterised a macroscopic self-assembly reactor that agitates magnetic, centimeter- sized particles with a turbulent water flow. By scaling up the self-assembly processes to the centimeter-scale, the characteristic time constants also drastically increase. This makes the system a physical simulator of microscopic self-assembly, where the interaction of inserted particles is easily observable. Trajectory analysis of single particles reveals their velocity to be a Maxwell-Boltzmann distribution and it shows that their average squared displacement over time can be modelled by a confined random walk model, demonstrating a high level of similarity to the Brownian motion. The interaction of two particles has been modelled and verified experimentally by observing the distance between two particles over time. The disturbing energy (analogue to temperature) that was obtained experimentally increases with sphere size and differs by an order of magnitude between single-sphere and two-sphere systems (approximately 80 µJ versus 6.5 µJ, respectively). [ABSTRACT FROM AUTHOR]

Published
2018
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43. Nanofluidic bubble pump using surface tension directed gas injection

Author

Tas, N.R., Berenschot, J.W., Lammerink, T.S.J., Elwenspoek, M., and van den Berg, A.

Subjects
Nanotechnology -- Research, Surface tension -- Research, Liquids -- Research, Chemistry
Abstract

A new concept for liquid manipulation has been developed and implemented in surface-micromachined fluid channels. It is based on the surface tension directed injection of a gas into the liquid flow through micrometer-sized holes in the microchannel wall. The injected gas is directed to an exhaust by a cross-sectional asymmetry of the microchannel and thereby moves minute liquid volumes. Successful pumping experiments were performed with single stroke volumes of tens of picoliters at frequencies around 1 Hz. The minimum actuation pressure is 0.6 bar for a 2-[micro]m channel height, in accordance with theoretical predictions.

Published
2002

44. The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide

Author

van Veenendaal, E., van Suchtelen, J., van Enckevort, W.J.P., Sato, K., Nijdam, A.J., Gardeniers, J.G.E., and Elwenspoek, M.

Subjects
Crystals -- Growth, Semiconductor wafers -- Research, Semiconductors -- Etching, Physics
Abstract

A follow-up study to previous work applies a two-step construction method for analytical orientation-dependent crystal growth and etch rate, using wet chemical etching of silicon in potassium hydroxide as an example application.

Published
2000

46. High-Tc bolometers with silicon-nitride spiderweb suspension for far-infrared detection

Author

Nivelle, M.J.M.E. de, Bruijn, M.P., Korte, P.A.J. de, Sanchez, S., Elwenspoek, M., Heidenblut, T., Schwierzi, B., Michalke, W., and Steinbeiss, E.

Subjects
High temperature superconductors -- Usage, Infrared detectors -- Research, Superconductive devices -- Research, Business, Electronics, Electronics and electrical industries
Abstract

High-temperature GdBa2Cu3O(sub 7-delta) superconducting transition edge bolometers with operating temperatures near 90 K were developed for far-infrared detection applications. The fabricated bolometers have closed silicon-nitride membranes and patterned silicon-nitride spiderweb-like suspension structures. The low thermal conductivity of these structures provide these bolometers high sensitivity and low noise power.

Published
1999

47. The effect of surface roughness on direct wafer bonding

Author

Gui, C., Elwenspoek, M., Tas, N., and Gardeniers, J.G.E.

Subjects
Semiconductor wafers -- Research, Surfaces (Technology) -- Research, Physics
Abstract

A study was conducted to analyze a theory which characterizes the initial direct wafer bonding process. The influence of surface microroughness on the bondability was examined based on the theory of contact and adhesion of elastic solids. An effective bonding energy was then proposed to describe the real binding energy of the bonding interface. In addition, factors affecting the wafer bonding process at room temperature and at standard atmospheric pressure were examined.

Published
1999

49. Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection

Author

de Nivelle, M.J.M.E., Bruijn, M.P., de Vries, R., Wijnbergen, J.J., de Korte, P.A.J., Sanchez, S., Elwenspoek, M., Heidenblut, T., Schwierzi, B., Michalke, W., and Steinbeiss, E.

Subjects
High temperature superconductors -- Design and construction, Silicon nitride -- Usage, Infrared detectors -- Design and construction, Physics
Abstract

High-temperature GdBa2Cu3O7-delta superconductor bolometers were developed with very high detectivity, 0.95,,2 receiving areas and almost 89 K operation temperatures. Epitaxial growth was achieved using a special silicon-on-nitride layer. The bolometers, which feature 0.62 micrometer thick silicon nitride membranes, were found to remain accurate after thermal cycling, vibration testing and six months storage.

Published
1997

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