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High frequency DC-DC converters are replacing large thyristor converters in the field of DC power supplies in the medium and higher power range. Depending on the given requirements these solutions provide a DC source of higher quality, dynamics and stability for demanding loads. To extend the output power of DC-DC converters to higher ranges the voltage regulator module (VRM) configuration is the most suitable solution. The paper deals with the development of a four-module 100 kW buck converter, operating as a general purpose power supply. The control concept with special respect to the current-sharing technique is also discussed.

Pulse generators in magnetron sputter systems have to generate an electromagnetic field between the magnetrons under different operating conditions. Most of the electric parameters like output power, pulse width and the switching frequency have to be adjustable in a wide range. Another changing parameter is the load behaviour which varies from high impedance to Zener characteristic during every switching period. Starting from a comparison of current topologies, this paper presents a novel pulse generator for pulsed plasma surface technologies (PPST). It is demonstrated that the combination of different basic topologies results in an improved efficiency of the sputter process.