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Abstract: Laser damage behaviors of thin-film beam splitters for third harmonic separation were investigated under the simultaneous exposure of fundamental frequency (1ω) and the third harmonics laser beam (3ω). The samples were prepared by conventional e-beam evaporation, and the surface laser-induced damage thresholds (LIDT) of the samples were obtained for the irradiations of 3ω only and 3ω with various fluence of 1ω. It was found that external 1ω can raise damage probability of multilayer films; the higher the 1ω energy density, the lower the damage threshold. Additionally, numerical simulation of damage probability was given for the simultaneous exposure to two beams. [Copyright &y& Elsevier]

Mentions how a Co/Sb multilayer shows the theoretical reflectance of 62% at a photoenergy of 528 eV and the grazing angle of 10.3°. How the measured reflectance is very low, which is considered to result from the low energy resolution of the incidence light; Investigation of the effect of the energy resolution of the incidence light on the measured reflectance; Reference to a new method how to calculate the reflectance of non-monochromatic light; Trend for the calculated data to show that the reflectance of Co/Sb multilayer is very sensitive to the effect of the energy resolution of the incidence light; Findings for it to be very low unless the energy resolution of the incidence light is high enough; Use of a method which gives the fitted result of the reflectance spectrum; Consistency of the fitted result with the measured reflectance spectrum.