1. High-Performance Thin-Film Lithium Niobate Mach–Zehnder Modulator on 8-inch Silicon Substrates
- Author
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Zhou, Jingjie, Lv, Liming, Yao, Zhanshi, Zhu, Shiyang, Wang, Yuxi, Cong, Qingyu, Li, Zhaoyi, Fan, Zuowen, Zeng, Xianfeng, Hu, Ting, and Jia, Lianxi
- Abstract
Lithium niobate modulators have primarily been fabricated on chip-level or 4/6-inch wafers. Here, thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulators (MZM) are demonstrated for the first time on an 8-inch silicon substrate. The fabricated LN modulator has an on-chip loss of less than 1 dB with a waveguide loss of lower than 0.5 dB/cm. The half-wave voltage- length product (V
$\pi \cdot $ $\cdot $ - Published
- 2024
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