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The hydrogen depth profiling in solids has been done by elastic recoil detection (ERD) technique with multicharged 19F ion beam from a small Tandem Accelerator of 2×1.7MV. Details of the experimental technique are described. The depth resolution of about 230A in the near-surface regions (similar 5000A) is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.

Depth profiling of hydrogen in solids has been performed by Elastic Recoil Detection (ERD) with multicharged F ions at a 1.7 MV Tandem accelerator. Both experimental and theoretical analysis show the depth resolution of about 200-300 ? in the near-surface regions of solids. The optimization of the experimental conditions such as scattering geometry and incident beam energy are discussed. The comparison of ERD with multicharged F ions and 1H(19F,αγ)16O resonance reaction at 6.4 MeV for the same samples demonstrated that hydrogen profiling by ERD with F ions is a fast and economic method with low radiation damage and perfect depth resolution.