47 results on '"Florent Bassignot"'
Search Results
2. Demonstrating quantum properties of triple photons generated by $$\chi ^3$$ processes
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Kamel Bencheikh, Marina F. B. Cenni, Enky Oudot, Véronique Boutou, Corinne Félix, Joel Compte Prades, Augustin Vernay, Julien Bertrand, Florent Bassignot, Mathieu Chauvet, Félix Bussières, Hugo Zbinden, Ariel Levenson, and Benoît Boulanger
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Atomic and Molecular Physics, and Optics - Abstract
Abstract Triple-photon generation (TPG) is based on a third-order nonlinear optical interaction, which is the most direct way to produce pure quantum three-photon states. These states can exhibit three-body quantum correlations, and their statistics cannot be reproduced by any Gaussian statistics of coherent sources or optical parametric twin-photon generator, making them potentially useful for quantum information processing tasks such as quantum state distillation, quantum error-correction and universal quantum computing. Furthermore, the generation of entangled photon pairs heralded by the detection of a third photon can be used in advanced quantum communication protocols. We made the first experimental demonstration of TPG in 2004 using a bi-stimulation scheme in a bulk KTP crystal, followed by the quantum theory. The new challenges are now to achieve a spontaneous TPG and the corresponding quantum experiments and protocols using oriented ridge KTP waveguides, which ensures both birefringence phase-matching and light confinement. The waveguides are cut by a precision dicing saw. We recently performed their characterization using third-harmonic generation measurements, which showed their good quality. A rate of about 5 triplets per second is expected when pumping a 5-cm-long waveguide with a 5-W 532 nm beam in the CW regime. Such a spontaneous TPG exhibits low rate of triple photons, which makes the certification of quantum features hard. In this article, we review our theoretical and experimental work on TPG and the associated quantum modeling. We also develop theoretical tools for the certification of quantum features of spontaneous triple-photon states. Graphic abstract
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- 2022
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3. Influence of the input-stage architecture on the in-laboratory test of a mid-infrared interferometer: application to the ALOHA up-conversion interferometer in the L band
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Jean-Michel Le Duigou, Ludovic Grossard, Laurent Delage, Lucien Lehmann, Florent Bassignot, Mathieu Chauvet, François Reynaud, Julie Magri, and Rodolphe Krawczyk
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Physics ,L band ,business.industry ,Mid infrared ,Astronomy and Astrophysics ,01 natural sciences ,Interferometry ,Laboratory test ,Optics ,Space and Planetary Science ,Aloha ,0103 physical sciences ,Up conversion ,Stage (hydrology) ,010306 general physics ,business ,010303 astronomy & astrophysics - Abstract
In the framework of the Astronomical Light Optical Hybrid Analysis (ALOHA) laboratory mid-infrared (MIR) up-conversion fibred interferometer in the L band, we report on the influence of the input-stage architecture. Using an amplitude division set-up in the visible or near-infrared is a straightforward choice in most cases. In the MIR context, the results are slightly different and we show that a wavefront division set-up is needed. These in-laboratory principle experiments allow us to measure a reliable 88 per cent instrumental contrast with high flux and to obtain fringes from faint sources at 3.5 μm with a spectral bandwith of 37 nm converted to 817 nm. An equivalent limiting L-band magnitude around 3.9, equivalent to 3.0 fW nm−1, could be demonstrated on 1 m class telescopes. This opens the possibility of planning future on-sky tests at the Center for High Angular Resolution Astronomy (CHARA) array and of predicting the performance attained.
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- 2020
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4. Birefringence phase-matched direct third-harmonic generation in a ridge optical waveguide based on a KTiOPO
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Augustin, Vernay, Véronique, Boutou, Corinne, Félix, David, Jegouso, Florent, Bassignot, Mathieu, Chauvet, and Benoit, Boulanger
- Abstract
Birefringence phase-matched third-harmonic generation at 1594 nm is performed for the first time in a KTiOPO
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- 2021
5. Third-order nonlinear optics in KTP ridge waveguides
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David Jegouso, Benoît Boulanger, Corinne Felix, Florent Bassignot, Augustin Vernay, Mathieu Chauvet, Véronique Boutou, Optique et Matériaux (OPTIMA), Institut Néel (NEEL), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Optique et microscopies (POM), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[PHYS]Physics [physics] ,Physics ,Photon ,Birefringence ,business.industry ,Lithium niobate ,Potassium titanyl phosphate ,Nonlinear optics ,Electromagnetic radiation ,Transverse plane ,chemistry.chemical_compound ,Optics ,chemistry ,business ,Quantum ,ComputingMilieux_MISCELLANEOUS - Abstract
Ridges waveguides carved in bulk nonlinear crystals such as LiNbO 3 [1] or KTiOPO 4 (KTP) [2] are a good alternative to reach a strong confinement of electromagnetic waves with large second-order or third-order non-linearity. We report here on our most recent experiments where we show the possibility to shape the birefringence phase-matching (BPM) conditions for direct Third-Harmonic Generation (THG: ω + ω + ω → 3ω) in micrometric KTP ridge waveguides by acting on their transverse dimensions. This study is the preliminary step for designing quantum optical experiments based on Triple Photons Generation (TPG: 3ω → ω + ω + ω) that is the reverse process of THG, thus exhibiting the same BPM conditions.
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- 2021
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6. Birefringence phase-matched direct third-harmonic generation in a ridge optical waveguide based on a KTiOPO4 single crystal
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Corinne Felix, David Jegouso, Mathieu Chauvet, Véronique Boutou, Florent Bassignot, Benoît Boulanger, Augustin Vernay, Optique et Matériaux (OPTIMA), Institut Néel (NEEL), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Optique et microscopies (POM), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[PHYS]Physics [physics] ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,Optical fiber ,Photon ,Birefringence ,business.industry ,Energy conversion efficiency ,Phase (waves) ,Physics::Optics ,Second-harmonic generation ,Pulse duration ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,7. Clean energy ,Atomic and Molecular Physics, and Optics ,law.invention ,010309 optics ,Optics ,law ,0103 physical sciences ,0210 nano-technology ,business ,Single crystal - Abstract
Birefringence phase-matched third-harmonic generation at 1594 nm is performed for the first time in a KTiOPO4 single crystal micrometric ridge waveguide. The energy conversion efficiency reaches 3.4% for a pump energy as low as 2 µJ over a pulse duration of 15 ps at a repetition rate of 10 Hz. Strong agreements between theory and experiments for both phase-matching and conversion efficiency is obtained, which let us envision future triple photon generation quantum experiments.
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- 2021
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7. Highly Coupled and Low Frequency Vibrational Energy Harvester Using Lithium Niobate on Silicon
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Ausrine Bartasyte, Djaffar Belharet, Merieme Ouhabaz, Samuel Margueron, Ludovic Gauthier-Manuel, Florent Bassignot, Bernard Dulmet, Giacomo Clementi, Miguel Angel Suarez, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, MN2S
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[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics] ,[SPI.OTHER]Engineering Sciences [physics]/Other ,Materials science ,Fabrication ,Physics and Astronomy (miscellaneous) ,Silicon ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,[SPI.MAT] Engineering Sciences [physics]/Materials ,7. Clean energy ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,chemistry.chemical_compound ,0103 physical sciences ,Figure of merit ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS ,Power density ,010302 applied physics ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,[SPI.OTHER] Engineering Sciences [physics]/Other ,business.industry ,021001 nanoscience & nanotechnology ,Piezoelectricity ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Energy harvesting ,Beam (structure) - Abstract
LiNbO3 has been little studied for the piezoelectric energy harvesting applications. Although it is a cheap piezoelectric material without lead and toxic elements, it beneficiates of technological maturity in single crystal fabrication for optical and acoustic applications. In this Letter, we propose to investigate a (YXlt)/128°/90° LiNbO3 cut as it offers a transverse piezoelectric coupling of k23 = 0.49, which is comparable to that of commonly used PZT ceramics. A flexible beam of 65 mm length and a tip mass made of a LiNbO3 thick film bonded on silicon were studied under 0.1 g sinusoidal acceleration. The beam presented an open-circuit resonance frequency of 105.9 Hz and a displacement up to 1.5 mm. In the frame of a single degree of freedom lumped model with a rectifying bridge, the electromechanical coupling of the device (km2), the figure of merit km2Q, and the normalized average power density were compared to both Pb-based and Pb-free current devices. The generated power density by our device was 965 μW/cm2/g2, which is among the highest reported values compared to both Pb- and Pb-free vibrational harvesting devices.
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- 2021
8. Third-Harmonic Generation at 1594 nm in a KTP Ridge Optical Waveguide
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Augustin Vernay, Véronique Boutou, Corinne Félix, David Jegouso, Jérôme Debray, Sébastien Pairis, Florent Bassignot, Mathieu Chauvet, and Benoît Boulanger
- Abstract
We achieved birefringence phase-matched Third-Harmonic Generation at 1594 nm in a KTiOPO4 single crystal ridge optical waveguide. The energy conversion efficiency reached 3.4% for a pump energy as low as 2 µJ over a pulse duration of 15 ps. Strong agreements between theory and experiments for phase-matching and conversion efficiency were obtained.
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- 2021
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9. Triple photons
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Augustin Vernay, Véronique Boutou, Corinne Félix, Florent Bassignot, Mathieu Chauvet, Kamel Bencheikh, Ariel Levenson, Félix Bussières, Hugo Zbinden, Benoit Boulanger, Optique et Matériaux (OPTIMA), Institut Néel (NEEL), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Optique et microscopies (POM), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Centre de Nanoscience et de Technologie (C2N)
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[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Physics::Optics - Abstract
International audience; Triple photon generation (TPG)is based on a third-order nonlinear optical interaction, which is the most direct way to produce pure quantum three-photon states. These states can exhibit three-body quantum entanglement and their statistics go beyond the usual Gaussian statistics of coherent sources and optical parametric twin-photon generators, offering new tools for quantum mechanics(Fig. 1 –left).Furthermore, from the application point of view, the generation of entangled photon pairs heralded by the detection of a third photon can be used in advanced quantum communication protocols.We made the first experimental demonstration of TPG in 2004 using a bi-stimulation schemein a bulk KTiOPO4(KTP)crystal[1], followed by the quantum theory [2,3].
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- 2020
10. Towards a mid-infrared L band up-conversion interferometer: first on-sky sensitivity test on a single arm
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Mathieu Chauvet, F. Martinache, Laurent Delage, Jean-Pierre Rivet, Frédéric Morand, Lucien Lehmann, François-Xavier Schmider, François Reynaud, Ludovic Grossard, David Vernet, Florent Bassignot, Photonique Fibre et Sources Cohérentes (XLIM-PHOT), XLIM (XLIM), Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Joseph Louis LAGRANGE (LAGRANGE), Université Côte d'Azur (UCA)-Université Nice Sophia Antipolis (... - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Observatoire de la Côte d'Azur, COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Université Côte d'Azur (UCA)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS), Observatoire de la Côte d'Azur (OCA), and Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)
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Physics ,L band ,business.industry ,media_common.quotation_subject ,Mid infrared ,Astronomy and Astrophysics ,02 engineering and technology ,01 natural sciences ,Interferometry ,020210 optoelectronics & photonics ,Optics ,Sensitivity test ,Space and Planetary Science ,Sky ,[SDU]Sciences of the Universe [physics] ,0103 physical sciences ,0202 electrical engineering, electronic engineering, information engineering ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Up conversion ,business ,010303 astronomy & astrophysics ,ComputingMilieux_MISCELLANEOUS ,media_common - Abstract
International audience
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- 2019
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11. Numerical Simulation on Periodically Poled Lithium Niobate Transducers on Rotated Cuts
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Florent Bassignot, Alexandre Matic, and Thomas Baron
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010302 applied physics ,Materials science ,Computer simulation ,business.industry ,Computation ,Lithium niobate ,02 engineering and technology ,Substrate (electronics) ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ferroelectricity ,chemistry.chemical_compound ,Optics ,Transducer ,chemistry ,Orientation (geometry) ,0103 physical sciences ,0210 nano-technology ,business - Abstract
Rotated cut Periodically Poled Structures (PPS) are a promising technology allowing to generate bulk acoustic waves from ferroelectric domains periodicity. In this work, evolution of frequency-period product and k2 is investigated in function of the substrate orientation. Numerical computation points out Periodically Poled Lithium Niobate (PPLN) transducers with k2 up to 15% as well as frequency-period factor up to 12600m.s-1 Experimental comparison with the numerical computation for a (YXl)/64° PPLN transducer shows a relative difference of the frequency-period product less than 5%.
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- 2019
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12. Quantum holography with biphotons of high Schmidt number
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Florent Bassignot, Alexis Mosset, Fabrice Devaux, Eric Lantz, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,Physics ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Photon ,business.industry ,Schmidt number ,Phase (waves) ,Holography ,Physics::Optics ,Near and far field ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,010305 fluids & plasmas ,law.invention ,Transverse plane ,Optics ,law ,0103 physical sciences ,Charge-coupled device ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,010306 general physics ,business ,Quantum - Abstract
International audience; We report the results of two-photon quantum holography where spatial information stored in phase holograms is retrieved by measuring quantum spatial correlations between two images formed by spatially entangled twin photons with a Schmidt number of 450 in the two-dimensional transverse space. In our experiments, the entire flux of spontaneous down-converted photons illuminates the phase holograms and the photons of signal-idler pairs transmitted by the holograms are detected separately in the far field on two electron-multiplying charge coupled device cameras.
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- 2019
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13. Quantum holography with twin photons of large spatial dimensionality
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Fabrice Devaux, Alexis Mosset, Florent Bassignot, and Eric Lantz
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Quantum optics ,Physics ,Photon ,business.industry ,Phase (waves) ,Holography ,Physics::Optics ,law.invention ,Computer Science::Graphics ,Optics ,law ,business ,Spatial analysis ,Phase modulation ,Quantum ,Curse of dimensionality - Abstract
We report results of quantum holography where spatial information stored in phase hologram is retrieved by measuring spatial coincidences between two images formed by spatially entangled twin photons of high-dimensionality transmitted by the hologram.
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- 2019
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14. A flux grown KTP crystal ridge optical waveguide for birefringence phase-matched second-harmonic generation
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Benoît Boulanger, Mathieu Chauvet, Dominique Lupinski, Corinne Felix, Augustin Vernay, Florent Bassignot, Véronique Boutou, Optique et Matériaux (OPTIMA ), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Optique et microscopies (POM), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,Birefringence ,business.industry ,Phase (waves) ,Potassium titanyl phosphate ,Physics::Optics ,Second-harmonic generation ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Ridge (differential geometry) ,01 natural sciences ,010309 optics ,Crystal ,chemistry.chemical_compound ,Optics ,chemistry ,0103 physical sciences ,Transmission coefficient ,Photonics ,0210 nano-technology ,business ,ComputingMilieux_MISCELLANEOUS - Abstract
Birefringence phase-matched type II second-harmonic generation has been achieved in a ridge waveguide cut in a KTP crystal. A good agreement is obtained between experiments and simulations, which opens new opportunities for integrated photonics waveguides.
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- 2018
15. Low-loss BSO photonic waveguides
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Fadi Issam Baida, M-P. Bernal, Alexis Caspar, Nadège Courjal, Florent Behague, Ludovic Gauthier-Manuel, Venancio Calero, Florent Bassignot, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,business.industry ,Physics::Instrumentation and Detectors ,Physics::Optics ,02 engineering and technology ,021001 nanoscience & nanotechnology ,7. Clean energy ,020210 optoelectronics & photonics ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,Photonics ,0210 nano-technology ,business - Abstract
International audience; We report for the first time the fabrication of low loss ridge-waveguides in Bismuth-Silicon-oxide (BSO) by optical grade-dicing. This approach promises to be powerful for compact and highly sensitive electric-field sensors, scintillators and laser applications.
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- 2018
16. Lithium Niobate Optical Waveguides and Microwaveguides
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Miguel Angel Suarez, Ludovic Gauthier-Manuel, Gwenn Ulliac, Florent Bassignot, Nadège Courjal, Alexis Caspar, and Maria-Pilar Bernal
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010309 optics ,chemistry.chemical_compound ,020210 optoelectronics & photonics ,Materials science ,chemistry ,business.industry ,0103 physical sciences ,Lithium niobate ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,02 engineering and technology ,business ,01 natural sciences - Published
- 2018
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17. Phase-matched second-harmonic generation in a flux grown KTP crystal ridge optical waveguide
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Mathieu Chauvet, Véronique Boutou, Benoît Boulanger, Florent Bassignot, Augustin Vernay, Corinne Felix, Dominique Lupinski, Optique et Matériaux (OPTIMA ), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Optique et microscopies (POM), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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Optical amplifier ,[PHYS]Physics [physics] ,Materials science ,business.industry ,Phase (waves) ,Second-harmonic generation ,Flux ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Ridge (differential geometry) ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,010309 optics ,Crystal ,Wavelength ,Optics ,0103 physical sciences ,0210 nano-technology ,business ,Refractive index ,ComputingMilieux_MISCELLANEOUS - Abstract
Type II second-harmonic generation was performed in a 15.8-mm-long KTiOPO4 (KTP) micrometric ridge waveguide with an average transversal section of 38 μm2. Theoretical predictions are compared with experiments. Strong agreements are obtained for both phase-matching wavelengths and second-harmonic intensity. This work opens wide perspectives for integrated parametric optics.
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- 2018
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18. Periodically poled LiNbO3 transducer on (YXl)/128° cut for RF applications
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Florent Bassignot, Alexandre Matic, and Thomas Baron
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010302 applied physics ,Fabrication ,Materials science ,Computer simulation ,Silicon ,Acoustics ,Lithium niobate ,Poling ,chemistry.chemical_element ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,chemistry.chemical_compound ,Transducer ,chemistry ,0103 physical sciences ,Electromechanical coupling ,0210 nano-technology - Abstract
Previous studies have shown Periodically Poled Lithium Niobate structures on Z-cut LiNbO 3 could be used as acoustic transducers to generate acoustic waves. Investigations on Periodically Poled LiNbO 3 (YXl)/128° transducers have been conducted. Simulations have pointed out interesting electromechanical coupling from such transducers. Fabrication of Periodically Poled (YXl)/128° LiNbO 3 transducers bonded/thinned on Silicon is presented and confirm the possibilities of rotated cuts poling for new transducers.
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- 2017
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19. Single photon MIR upconversion detector at room temperature with a PPLN ridge waveguide
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Mathieu Chauvet, Lucien Lehmann, Laurent Delage, Ludovic Grossard, Florent Bassignot, François Reynaud, Photonique Fibre et Sources Cohérentes (XLIM-PHOT), XLIM (XLIM), Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
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[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,Photon ,Sum-frequency generation ,Optical fiber ,business.industry ,Detector ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,7. Clean energy ,Atomic and Molecular Physics, and Optics ,Photon upconversion ,Power (physics) ,law.invention ,010309 optics ,Internal conversion ,Optics ,law ,0103 physical sciences ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,0210 nano-technology ,business ,Noise-equivalent power ,ComputingMilieux_MISCELLANEOUS - Abstract
International audience; In this paper we describe an upconversion detector in the mid infrared (around 3.5 μm). We take advantage of the PPLN ridge waveguide technology to achieve single photon detection at room temperature on a single spatial mode. With a pump power of 192 mW we obtain a detection efficiency of 0.4% for 22k dark count per second, which corresponds to a noise equivalent power of 3.0 fW · Hz−1/2 and an internal conversion efficiency of 85 %/W of pump.
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- 2019
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20. Periodically poled LiNbO3ridge waveguides on silicon for second-harmonic generation
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Mathieu Chauvet, Ludovic Gauthier-Manuel, Fabien Henrot, Florent Bassignot, Hervé Maillotte, Fabrice Devaux, Brahim Dahmani, and Vincent Pecheur
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010302 applied physics ,Fabrication ,Materials science ,Silicon ,business.industry ,Physics::Optics ,Second-harmonic generation ,Polishing ,Nonlinear optics ,chemistry.chemical_element ,01 natural sciences ,Grinding ,010309 optics ,Wavelength ,Optics ,chemistry ,0103 physical sciences ,Wafer dicing ,business - Abstract
Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are micromachined with a precision dicing machine and/or by grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 600%/W in a 20mm long device. Influence of geometrical non uniformities of waveguides due to fabrication process is asserted. Components characteristics are studied notably their robustness and tunability versus temperature.
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- 2016
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21. New Radio-Frequency resonators based on Periodically Poled Lithium Niobate thin film and ridge structures
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Fabien Henrot, Emilie Courjon, Hervé Maillotte, Ludovic Gauthier-Manuel, J. M. Lesage, Sylvain Ballandras, Florent Bassignot, G. Haye, B. Guichardaz, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, MN2S
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[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,Silicon ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,[SPI.MAT] Engineering Sciences [physics]/Materials ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,Resonator ,chemistry.chemical_compound ,Optics ,Stack (abstract data type) ,0103 physical sciences ,Thin film ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,010302 applied physics ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,business.industry ,Poling ,Acoustic wave ,021001 nanoscience & nanotechnology ,chemistry ,Radio frequency ,0210 nano-technology ,business - Abstract
International audience; In this paper, we present new results on the development of an original acoustic waveguides concept based on a Periodically Poled Lithium Niobate transducer. Periodically poled transducers have been investigated recently as an alternative to classical inter-digital transducers for the excitation and detection of guided acoustic waves. We expose here two different structures of RF resonators based on this concept: a “Silicon/Gold layer/PPLN thin film/Gold layer/Silicon” stack and a PPLN-ridge structure. Simulations, fabrication and experimental results of both resonators are presented. “Si/10 μm-thick PPLN/Si” and “PPLN-ridge (11 μm-wide and 250 μm-deep)” resonators with a poling period of 50 μm have been achieved. The experimental admittances of these devices have pointed out the existence of an isolated mode operating at frequencies near 110 MHz for the stack structure and near 160 MHz with an electromechanical coupling of about 19 % for the ridge structure. These results are in agreement with the finite and boundary elements simulations.
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- 2016
22. High efficiency frequency doubling in fully diced LiNbO3 ridge waveguides on silicon
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Mathieu Chauvet, Fabien Henrot, Florent Bassignot, Fabrice Devaux, Ludovic Manuel, Vincent Pêcheur, Hervé Maillotte, Dahman, I., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Lovalite s.a.s. (Lovalite s.a.s.), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
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[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] - Abstract
International audience; Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are carved with only the use of a precision dicing machine without the need for grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 204%/W in a 15 mm long device. The influence of the geometrical non uniformities of waveguides due to fabrication processes is asserted. Characteristics of the components are studied; notably their robustness and tunability versus temperature.
- Published
- 2016
23. Fast-beam self-trapping in LiNbO(3) films by pyroelectric effect
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Fabien Henrot, Mathieu Chauvet, Gwenn Ulliac, Fabrice Devaux, Ballandras Sylvain, Hervé Maillotte, Ludovic Gauthier-Manuel, and Florent Bassignot
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Materials science ,business.industry ,Lithium niobate ,Nonlinear optics ,Trapping ,Atomic and Molecular Physics, and Optics ,Pyroelectricity ,chemistry.chemical_compound ,Optics ,chemistry ,Wafer ,Thin film ,business ,Order of magnitude ,Beam (structure) - Abstract
We report light-beam self-trapping triggered by the pyroelectric effect in an isolated ferroelectric thin film. Experiments are performed in an 8-μm-thick congruent undoped LiNbO(3) film bonded onto a silicon wafer. Response time two orders of magnitude faster than in bulk LiNbO(3) is reported. The original underlying physics specific of this arrangement is discussed.
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- 2015
24. Fast-beam self-trapping in LiNbO 3 films by pyroelectric effect
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Mathieu Chauvet, Florent Bassignot, Fabien Henrot, Fabrice Devaux, Ludovic Manuel, Hervé Maillotte, Gwenn Ulliac, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Frec’N’Sys (Frec’N’Sys)
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[SPI.OTHER]Engineering Sciences [physics]/Other ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] - Abstract
International audience; We report light-beam self-trapping triggered by the pyroelectric effect in an isolated ferroelectric thin film. Experiments are performed in an 8-μm-thick congruent undoped LiNbO3 film bonded onto a silicon wafer. Response time two orders of magnitude faster than in bulk LiNbO3 is reported. The original underlying physics specific of this arrangement is discussed.
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- 2015
25. Ridge-shaped periodically poled transducer for wide band R-F filter
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Fabien Henrot, Jean-Yves Rauch, Gwenn Ulliac, Sylvain Ballandras, and Florent Bassignot
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Materials science ,business.industry ,Interdigital transducer ,Acoustics ,Surface acoustic wave ,Lithium niobate ,Poling ,chemistry.chemical_compound ,Transducer ,chemistry ,Band-pass filter ,Optoelectronics ,Radio frequency ,Phase velocity ,business - Abstract
Transducer on Periodically Poled Lithium Niobate (PPLN) exhibiting an electromechanical coupling about 20% and an equivalent phase velocity about 10 km.s−1 were shown in [1]. These transducers are 3D structured to overcome Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) technological limits, such as short circuit between electrodes for SAW and precise thickness control for BAW. The present work shows the use of these 3D structured transducers for Radio Frequency (RF) filtering. An acoustic filter showing a band pass of about 5MHz has been realized on Lithium Niobate at 250MHz. This filter is made of PPLN exhibiting a poling period of 14.9μm.
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- 2014
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26. Highly coupled resonator based on ridge-shaped periodically poled materials for radio-Frequency applications
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Fabien Henrot, Sylvain Ballandras, Blandine Guichardaz, Jean-Yves Rauch, Florent Bassignot, and Clément Guyot
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chemistry.chemical_compound ,Resonator ,Materials science ,Planar ,Transducer ,chemistry ,Acoustics ,Surface acoustic wave ,Lithium niobate ,Surface acoustic wave sensor ,Radio frequency ,Phase velocity - Abstract
Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) devices are largely used in telecommunication for radio Frequency (RF) signal processing. Nevertheless, these devices are limited by various factors such as short-circuit between electrodes for SAW and precise thickness control for BAW. This paper shows the interest of a new kind of transducer using Periodically Poled Lithium Niobate (PPLN) developed to overcome SAW and BAW technological limits. A former PPLN-based wave-guide was presented some years ago exploiting planar technologies. The novelty of the present work lies in the 3D structuring of the transducer allowing for very high aspect ratio structures exhibiting a theoretical electromechanical coupling about 20% and a phase velocity up to 20 km.s-1.
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- 2013
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27. Wideband Lithium Niobate FBAR Filters
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Ji Fan, Matthieu Chatras, Laetitia Estagerie, Sylvain Ballandras, Lise Catherinot, Florent Bassignot, Eric Lebrasseur, Thomas Baron, Haixia Wang, Philippe Monfraix, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), MINACOM (XLIM-MINACOM), XLIM (XLIM), Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS), and Centre National d'Études Spatiales [Toulouse] (CNES)
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Radiation ,Materials science ,Fabrication ,Article Subject ,Lithium niobate ,Polishing ,020206 networking & telecommunications ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,chemistry.chemical_compound ,Resonator ,Lapping ,chemistry ,Band-pass filter ,0202 electrical engineering, electronic engineering, information engineering ,Electronic engineering ,Electrical measurements ,Electrical and Electronic Engineering ,Wideband ,0210 nano-technology - Abstract
Filters based on film bulk acoustic resonators (FBARs) are widely used for mobile phone applications, but they can also address wideband aerospace requirements. These devices need high electromechanical coupling coefficients to achieve large band pass filters. The piezoelectric material LiNbO3 complies with such specifications and is compatible with standard fabrication processes. In this work, simple metal—LiNbO3—metal structures have been developed to fabricate single FBAR elements directly connected to each other on a single chip. A fabrication process based on LiNbO3/silicon Au-Au bonding and LiNbO3 lapping/polishing has been developed and is proposed in this paper. Electrical measurements of these FBAR filters are proposed and commented exhibiting filters with 8% of fractional bandwidth and 3.3 dB of insertion losses. Electrical measurements show possibilities to obtain 14% of fractional bandwidth. These devices have been packaged, allowing for power handling, thermal, and ferroelectric tests, corresponding to spatial conditions.
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- 2013
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28. Acoustic resonator based on periodically poled lithium niobate ridge
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Florent Bassignot, Fabien Henrot, Sylvain Ballandras, Emilie Courjon, B. Guichardaz, Gwenn Ulliac, Thomas Baron, J-Y Rauch, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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Materials science ,Acoustics and Ultrasonics ,Acoustics ,Lithium niobate ,Phase (waves) ,02 engineering and technology ,01 natural sciences ,lithium compounds ,Micrometre ,Resonator ,chemistry.chemical_compound ,Planar ,metallisation ,0103 physical sciences ,bulk acoustic wave devices ,Electrical and Electronic Engineering ,Instrumentation ,010302 applied physics ,electromechanical effects ,surface acoustic wave transducers ,021001 nanoscience & nanotechnology ,Ferroelectricity ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,Transducer ,chemistry ,surface acoustic wave resonators ,Wafer dicing ,0210 nano-technology - Abstract
International audience; The constant improvement of industrial needs to face modern telecommunication challenges leads to the development of novel transducer principles as alternatives to SAW and BAW solutions. The main technological limits of SAW (short-circuit between electrodes) and BAW (precise thickness control) solutions can be overcome by a new kind of transducer based on periodically poled ferroelectric substrate. The approach proposed in this paper exploits a ridge structure combined with a periodically poled transducer (PPT), allowing for the excitation of highly coupled modes unlike previously published results on planar PPTs. High-aspect-ratio ridges showing micrometer dimensions are achieved by dicing PPT plates with a diamond-tipped saw. An adapted metallization is achieved to excite acoustic modes exhibiting electromechanical coupling in excess of 15% with phase velocities up to 10 000 m*s-1. Theoretical predictions show that these figures may reach values up to 20% and 18 000 m*s-1, respectively, using an appropriate design.
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- 2013
- Full Text
- View/download PDF
29. High efficiency frequency doubling in fully diced LiNbO3ridge waveguides on silicon
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Mathieu Chauvet, Fabien Henrot, Vincent Pecheur, Hervé Maillotte, Brahim Dahmani, Ludovic Gauthier-Manuel, Florent Bassignot, and Fabrice Devaux
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Fabrication ,Materials science ,Silicon ,business.industry ,chemistry.chemical_element ,Second-harmonic generation ,Polishing ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Grinding ,010309 optics ,Wavelength ,Optics ,chemistry ,Robustness (computer science) ,0103 physical sciences ,Wafer dicing ,0210 nano-technology ,business - Abstract
Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are carved with only the use of a precision dicing machine without the need for grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 204%/W in a 15 mm long device. The influence of the geometrical non uniformities of waveguides due to fabrication processes is asserted. Characteristics of the components are studied; notably their robustness and tunability versus temperature.
- Published
- 2016
- Full Text
- View/download PDF
30. Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers
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Florent Bassignot, Eric Lebrasseur, Jean-Jacques Boy, Laurent Couteleau, Thomas Baron, Sylvain Ballandras, Haixia Wang, and S. Alzuaga
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Resonator ,Optics ,Materials science ,Fabrication ,Stack (abstract data type) ,business.industry ,Wafer bonding ,Wafer ,Ultrasonic sensor ,business ,Distributed Bragg reflector ,Signal - Abstract
In this work, we propose a Bragg mirror for Quartz resonator at 10MHz. Two processes based on bonding and thinning wafers is proposed. A stack of ten bonding and thinning wafers is realized. Ultrasonic characterization shows the behavior of the Bragg mirror and the evolution versus the number of layer stack. Resonators on such Bragg mirror show less spurious signal but need improvement about quality factor of resonator.
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- 2012
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31. Acoustic wave filter based on periodically poled lithium niobate
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Emilie Courjon, Florent Bassignot, Sarah Benchabane, Gwenn Ulliac, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,Fabrication ,Materials science ,Acoustics and Ultrasonics ,Interdigital transducer ,Acoustics ,Surface acoustic wave ,Lithium niobate ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,010309 optics ,chemistry.chemical_compound ,Transducer ,Band-pass filter ,chemistry ,Filter (video) ,0103 physical sciences ,Electrical and Electronic Engineering ,0210 nano-technology ,Instrumentation - Abstract
International audience; Solutions for the development of compact RF passive transducers as an alternative to standard surface or bulk acoustic wave devices are receiving increasing interest. This article presents results on the development of an acoustic band-pass filter based on periodically poled ferroelectric domains in lithium niobate. The fabrication of periodically poled transducers (PPTs) operating in the range of 20 to 650 MHz has been achieved on 3-in (76.2-mm) 500-μm-thick wafers. This kind of transducer is able to excite elliptical as well as longitudinal modes, yielding phase velocities of about 3800 and 6500 ms(-1), respectively. A new type of acoustic band-pass filter is proposed, based on the use of PPTs instead of the SAWs excited by classical interdigital transducers. The design and the fabrication of such a filter are presented, as well as experimental measurements of its electrical response and transfer function. The feasibility of such a PPT-based filter is thereby demonstrated and the limitations of this method are discussed.
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- 2012
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32. Silicon/Periodically Poled Transducer/Silicon resonant devices for the stabilization of RF oscillators
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J. M. Lesage, Gwenn Ulliac, G. Martin, Florent Bassignot, Eric Lebrasseur, Emilie Courjon, and Bruno Francois
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Materials science ,Silicon ,business.industry ,Acoustics ,Lithium niobate ,chemistry.chemical_element ,chemistry.chemical_compound ,Resonator ,Transducer ,chemistry ,Lithium tantalate ,Phase noise ,Optoelectronics ,business - Published
- 2011
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33. Periodically Poled Acoustic Wave-Guide and Transducers for Radio-Frequency Applications
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William Daniau, Florent Bassignot, Thierry Laroche, Sylvain Ballandras, Jerome Hauden, Emilie Courjon, Julien Garcia, and Gwenn Ulliac
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Materials science ,Passivation ,business.industry ,Lithium niobate ,Substrate (electronics) ,Acoustic wave ,law.invention ,chemistry.chemical_compound ,Resonator ,chemistry ,law ,Lithium tantalate ,Optoelectronics ,Radio frequency ,business ,Waveguide - Abstract
The demand for highly coupled high quality acoustic wave devices for RF signal processing based on passive devices has generated a strong innovative activity, yielding the investigation of new excitation principles and waveguide structures. Among all the tested devices, one can mention thick passivation SiO2-based structures using high velocity modes on lithium niobate (LiNbO3) or lithium tantalate (LiTaO3) (Kando et al, 2006), (Gachon et al. 2010), yielding the definition of interface or isolated-wave-based devices but modes excited on compound substrates (Elmazria et al, 2009), for instance consisting of a piezoelectric layer (AlN, ZnO, single crystal LiNbO3 or LiTaO3, etc.) deposited atop a high acoustic wave velocity material such as diamond-C, silicon carbide, sapphire, silicon, and so on (Higaki et al, 1997), (Iriarte et al, 2003), (Salut & al, 2010). All these devices generally exploit interdigitized transducers (IDTs) operating at Bragg frequency (Morgan, 1985), i.e. exhibiting a mechanical period equal to a half-wavelength of the acoustic propagation. Although passivation allows for an improved power handling compared to IDTS on free surfaces, this feature is still limited by electro-migration and material diffusion phenomena (Greer et al, 1990). An interesting answer to this problem is the use of bulk acoustic waves in thin films exhibiting a high disruptive field material such as AlN (Lakin, 2003), (Lanz, 2005). In that case, the frequency control reveals more difficult than for IDT based devices, as the resonance frequency of the so-called Film Bulk Acoustic Resonators (FBARs) is proportional to the film thickness. As significant progresses were achieved in thin film technologies during the last decade, this did not prevent the use of FBARs for actual low-loss RF filter implementation (Bradley et al, 2000). Nevertheless, it turns out there is still missing capabilities for better controlling the operation frequency of these passive devices, particularly for future generations of telecommunication systems which push toward higher RF bands than those exploited until now. The idea to transfer the transducer periodicity within the substrate has been shared by numerous scientists but it took rather a long term before the first experimental evidence, allowing for a correlation between theory and experiment and hence yielding a satisfying explanation of the corresponding mode distribution and realistic property description.
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- 2011
- Full Text
- View/download PDF
34. New acoustic resonator based on periodically poled transducer in lithium niobate or tantalate
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Sylvain Ballandras, Emilie Courjon, Florent Bassignot, Gwenn Ulliac, J. M. Lesage, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
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010302 applied physics ,Materials science ,Acoustics ,Surface acoustic wave ,Lithium niobate ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,Piezoelectricity ,Resonator ,chemistry.chemical_compound ,Transducer ,chemistry ,0103 physical sciences ,Lithium tantalate ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Waveguide (acoustics) ,0210 nano-technology - Abstract
International audience; In this paper, we propose a new concept of acoustic resonator based on a waveguide structure. In the telecommunication market, composants used are indeed generally bases on Surface Acoustic Wave (SAW) or Bulk Acoustic Wave (BAW) devices. However, those systems present technological limits as short-circuits between the electrodes of the interdigital transducers (for SAW device) or the precise control of the piezoelectric material thick resonator (for BAW device). We suggest a new concept based on a periodically poled transducer (PPT) in a ferroelectric substrate (LiNbO(3) or LiTaO(3)), embedded between two guiding substrates in order to create an acoustic waveguide. Periodically poled transducers have been investigated recently as an alternative to classical inter-digital transducers for the excitation and detection of guided acoustic waves. A resonator operating at 131MHz has been successfully fabricated and used in order to stabilize an oscillator at this frequency. However, the developed resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si structure in order to reduce the thermal sensitivity.
- Published
- 2011
- Full Text
- View/download PDF
35. Acoustic wave filter based on periodically poled lithium niobate
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Gwenn Ulliac, Emilie Courjon, Sylvain Ballandras, Florent Bassignot, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Materials science ,business.industry ,Acoustics ,Lithium niobate ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,Piezoelectricity ,chemistry.chemical_compound ,Optics ,Transducer ,Band-pass filter ,chemistry ,Filter (video) ,0103 physical sciences ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Wafer ,Phase velocity ,0210 nano-technology ,business - Abstract
International audience; We present results on the development of an acoustic bandpass filter based on periodically poled ferroelectric domains in lithium niobate. The fabrication of Periodically Poled Transducers (PPT) operating in the range 20 - 650 MHz has been achieved on a 3 '' 500 mu m thick wafer. This kind of transducer enables to excite elliptical as well as longitudinal modes, yielding phase velocity of about 3800 and 6500 m. s(-1) respectively. We propose then a new type of acoustic bandpass filter based on the use of PPTs instead of classical IDTs. The design and the fabrication of such a filter are presented as well as the experimental measurements. Finally we demonstrate the feasibility of such a PPTs-based filter.
- Published
- 2011
- Full Text
- View/download PDF
36. A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications
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Emilie Courjon, Florent Bassignot, J. M. Lesage, Julien Garcia, Bruno Francois, Gwenn Ulliac, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Materials science ,Silicon ,business.industry ,Acoustics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,Resonator ,chemistry.chemical_compound ,Transducer ,chemistry ,0103 physical sciences ,Phase noise ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,0210 nano-technology ,business ,Sensitivity (electronics) ,Layer (electronics) - Abstract
International audience; We propose a new acoustic resonator concept based on a periodically poled transducer (PPT) in a piezoelectric substrate (LiNbO(3) or LiTaO(3)), embedded between two guiding substrates in order to create an acoustic waveguide. A resonator operating at 131MHz have been successfully fabricated and used in order to stabilize an oscillator. However the fabricated resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si in order to reduce the thermal sensitivity.
- Published
- 2011
- Full Text
- View/download PDF
37. Laterally coupled narrow-band high overtone bulk wave filters using thinned single crystal lithium niobate layers
- Author
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Eric Lebrasseur, Emilie Courjon, Thomas Baron, Florent Bassignot, Dorian Gachon, Sylvain Ballandras, and Gilles Martin
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Materials science ,business.industry ,Overtone ,Lithium niobate ,Single-mode optical fiber ,Resonance ,Resonator ,Wavelength ,chemistry.chemical_compound ,Optics ,chemistry ,Electrode ,business ,Single crystal - Abstract
This work is devoted to the development of laterally coupled filters built on compound single crystal substrates. High overtone bulk acoustic resonators are built on LiNbO 3 thinned films bonded on thick LiNbO 3 or Quartz substrates. Two resonators are coupled via a narrow gap between their electrodes, yielding the possibility for their modes to interact and to produce coupled mode resonance conditions. The coupling efficiency is shown to be dependent on the frequency (wavelength), yielding well defined coupled-mode filters at intermediate frequencies (300–800 MHz) and single mode transfer functions above 1 GHz. The implementation of an oscillator stabilized by such a filter at 1.7 GHz is demonstrated.
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- 2011
- Full Text
- View/download PDF
38. Fabrication and characterization of acoustic waveguides using Silicon/PPT/Silicon structures and analysis of diffraction effects for various modelings
- Author
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J. M. Lesage, Julien Garcia, Emilie Courjon, Sylvain Ballandras, T. Laroche, Gwenn Ulliac, Florent Bassignot, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Diffraction ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,Fabrication ,Materials science ,Silicon ,business.industry ,Acoustics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,[PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph] ,chemistry.chemical_compound ,Transducer ,chemistry ,0103 physical sciences ,Dispersion (optics) ,Optoelectronics ,Wafer ,0210 nano-technology ,business - Abstract
International audience; In this paper, we present new results on the development of a new acoustic waveguide concept using an. acoustic wave excited by a Periodically Poled Transducer (PPT) and guided by guiding layers. Periodically poled transducers have been investigated recently as an alternative to classical inter-digital transducers for the excitation and detection of guided acoustic waves. The fabrication of PPTs operating in the range 50 - 500 MHz has been achieved on 3 and 4 inches 500 mu m thick lithium niobate (LiNbO3) and tantalate (LiTaO3) Z-cut wafers. The compact structure proposed allows high frequency operation with a simplified package based on Si/LiNbO3/Si material combination. Dispersion properties have been studied for this structure in order to find operating points corresponding to a specific wthickness/period ratio. Two main devices have been fabricated, a Si/500 mu m thick PPT/Si structure in order to validate the concept and a Si/20 mu m thick PPT/Si structure to excite only one acoustic wave in the purpose of diffracting this wave. The experimental responses of the tested devices are compared to the predicted harmonic admittances, showing a good agreement between both results. The temperature sensitivity of the excited wave of both structures are also been measured and predicted. Finally, we expose different structures with impedance mismatches generating scattering effects.
- Published
- 2010
- Full Text
- View/download PDF
39. An acoustic waveguide using doubly-bonded silicon/thinned PPT/silicon structures for RF applications
- Author
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T. Laroche, R. Petit, S. Queste, Florent Bassignot, Emilie Courjon, Julien Garcia, J.P. Romand, Gwenn Ulliac, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and DGA CELAR
- Subjects
Fabrication ,Materials science ,Silicon ,business.industry ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ferroelectricity ,Piezoelectricity ,chemistry.chemical_compound ,chemistry ,0103 physical sciences ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,Waveguide (acoustics) ,Ultrasonic sensor ,Wafer ,0210 nano-technology ,business ,010301 acoustics - Abstract
International audience; In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains in a lithium niobate plate bonded between two silicon wafers. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3 inches 500 ¿m thick wafer. These devices then have been bonded on silicon wafers to fabricate a waveguide. Guided elliptic as well as partially guided longitudinal modes are excited. The experimental responses of the tested devices are compared to predicted harmonic admittances, showing a good agreement between both results and allowing for a reliable analysis of the nature of the excited modes. We also show interesting studies of material combinations used to guide ultrasonic waves. Dispersion properties have also been studied for a structure Si/PPT/Si. Operating points corresponding to a specific thickness/period ratio are found. Therefore a new conception with a Si/thinned PPT/Si structure is fabricated.
- Published
- 2009
- Full Text
- View/download PDF
40. An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures
- Author
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Sylvain Ballandras, Gwenn Ulliac, R. Petit, Florent Bassignot, T. Laroche, Julien Garcia, S. Queste, D. Gachon, J.P. Romand, Emilie Courjon, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Materials science ,Fabrication ,Silicon ,business.industry ,Wafer bonding ,Acoustics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,7. Clean energy ,01 natural sciences ,Piezoelectricity ,chemistry.chemical_compound ,chemistry ,0103 physical sciences ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,Waveguide (acoustics) ,Ultrasonic sensor ,Wafer ,0210 nano-technology ,business - Abstract
International audience; In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains in a lithium niobate plate bonded between two silicon wafers. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3 inches 500 mum thick wafer. These devices then have been bonded on silicon wafers to fabricate a waveguide. Guided elliptic as well as partially guided longitudinal modes are excited. The experimental responses of the tested devices are compared to predicted harmonic admittances, showing a good agreement between both results and allowing for a reliable analysis of the nature of the excited modes. We also show interesting studies of material combinations used to guide ultrasonic waves. Dispersion properties have also been studied for a structure Si/PPT/Si.
- Published
- 2009
- Full Text
- View/download PDF
41. Low-g sensitivity of HBAR oscillator
- Author
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Thomas, Baron, primary, Gilles, Martin, additional, Florent, Bassignot, additional, Nicolas, Chretien, additional, Alexandre, Reinhardt, additional, Pierre-Patrick, Lassagne, additional, Jean-Marc, Lesage, additional, David, Rabus, additional, Luc, Chommeloux, additional, and Sylvain, Ballandras, additional
- Published
- 2014
- Full Text
- View/download PDF
42. High-Q and low TCF HBAR based on LiTaO3 substrate
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Thomas, Baron, primary, Gilles, Martin, additional, Nicolas, Chretien, additional, Valerie, Petrini, additional, Guillaume, Combe, additional, Fabien, Henrot, additional, Florent, Bassignot, additional, Alexandre, Reinhardt, additional, Pierre-Patrick, Lassagne, additional, Jean-Marc, Lesage, additional, David, Rabus, additional, Luc, Chommeloux, additional, and Sylvain, Ballandras, additional
- Published
- 2014
- Full Text
- View/download PDF
43. Periodically Poled Acoustic Wave-Guide and Transducers for Radio-Frequency Applications
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Sylvain Ballandras, Emilie Courjon, Florent Bassignot, Gwenn Ulliac, Jérôme Hauden, Julien Garcia, Thierry Laroche, William Daniau, Sylvain Ballandras, Emilie Courjon, Florent Bassignot, Gwenn Ulliac, Jérôme Hauden, Julien Garcia, Thierry Laroche, and William Daniau
- Published
- 2011
- Full Text
- View/download PDF
44. Acoustic resonator based on periodically poled transducers: Fabrication and characterization
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R. Petit, Sylvain Ballandras, Emilie Courjon, J. M. Lesage, Florent Bassignot, and Gwenn Ulliac
- Subjects
Resonator ,Materials science ,Transducer ,Fabrication ,Acoustics ,Electrode ,Phase noise ,General Physics and Astronomy ,Ferroelectricity ,Characterization (materials science) ,Power (physics) - Abstract
Passive radiofrequency filters and resonators exploited for telecommunication applications are generally based on surface or bulk acoustic wave (SAW or BAW) devices. However, these devices present some technological limits as short-circuits between the electrodes of the interdigital transducers (for SAW devices) or an accurate control of the resonator dimension (plate or film thickness for BAW devices). An alternative concept based on periodically poled transducers (PPT) implemented on ferroelectric substrates (LiNbO3 or LiTaO3) embedded between two guiding substrates yielding advanced packaging opportunities has been developed. An oscillator stabilized by such a PPT-based resonator operating at 131 MHz has been successfully fabricated. A phase noise of −165 dBc/Hz at 60 kHz from the carrier has been measured with an input power of 2 mW and a relative short term frequency stability of 10−9 per second. Other resonators built on waveguides exploiting thinned PPTs (around thirty microns) have allowed the exc...
- Published
- 2012
- Full Text
- View/download PDF
45. Acoustic resonator based on periodically poled transducers: Concept and analysis
- Author
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Sylvain Ballandras, R. Petit, Gwenn Ulliac, Florent Bassignot, Emilie Courjon, J. M. Lesage, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), DGA Maîtrise de l'information (DGA.MI), and Direction générale de l'Armement (DGA)
- Subjects
010302 applied physics ,Signal processing ,Materials science ,Acoustics ,Poling ,Lithium niobate ,Physics::Optics ,General Physics and Astronomy ,02 engineering and technology ,Acoustic wave ,021001 nanoscience & nanotechnology ,01 natural sciences ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,Resonator ,chemistry.chemical_compound ,Wavelength ,Transducer ,chemistry ,0103 physical sciences ,[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,0210 nano-technology ,Excitation - Abstract
International audience; The demand for highly coupled high quality acoustic wave devices for radio-frequency (RF) signal processing based on passive devices has generated a strong innovative activity, yielding the investigation of new excitation principles and waveguide structures. Periodically poled transducers (PPTs) have been recently investigated [E. Courjon et al., J. Appl. Phys. 102, 114107 (2007)], as an alternative to classical interdigital transducers (IDTs) for the excitation and detection of guided acoustic waves. PPTs have two principal advantages compared to IDTs: the robustness of the excitation versus defects or surface contamination and the possibility to excite waves exhibiting a wavelength equal to the poling period. Here a new acoustic resonator concept is suggested, allowing high frequency operation with a simplified package. The idea consists of using a waveguide based on a PPT fabricated on a ferroelectric single-crystal substrate such as lithium niobate or tantalate inserted between two single-crystal substrates allowing the guidance of elastic waves without losses. The concept analysis points out optimum configurations of the structure allowing the excitation of elastic waves compatible with RF applications.
- Published
- 2012
- Full Text
- View/download PDF
46. Periodically poled LiNbO3 ridge waveguides on silicon for second harmonic generation
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Mathieu Chauvet, Fabien Henrot, Ludovic Manuel, Fabrice Devaux, Hervé Maillotte, Florent Bassignot, Brahim Dahmani, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Lovalite s.a.s. (Lovalite s.a.s.), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
- Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Physics::Optics - Abstract
International audience; Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are micromachined with a precision dicing machine and/or by grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 600%/W in a 20mm long device. Influence of geometrical non uniformities of waveguides due to fabrication process is asserted. Components characteristics are studied notably their robustness and tunability versus temperature.
47. Hybrid Wafers Based on a 'Silicon/PPLN Thin Film' Stack for Optical and Radio-Frequency Applications
- Author
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Florent Bassignot, Fabien Henrot, Mathieu Chauvet, Ludovic Manuel, Blandine Edouard Guichardaz, Hervé Maillotte, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Frec’N’Sys (Frec’N’Sys)
- Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.OTHER]Engineering Sciences [physics]/Other ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.MAT]Engineering Sciences [physics]/Materials - Abstract
International audience; In this paper, we propose new structures based on “Silicon/PPLN thin film” hybrid wafers for nonlinear-optical and Radio-Frequency applications. This stack is obtained by home-made room-temperature bonding and wafer thinning techniques. Two main wafer bonding techniques have been developed on 3 and 4-inch wafers. The Au/Au bonding for RF applications and the Au/Au/SiO 2 bonding for optical applications. The RF component, an acousto-electric resonator, is based on the electrical excitation of a PPLN thin film. The piezoelectric effect of the lithium niobate material is used to excite acoustic waves in the PPLN. The optical device is a second harmonic generation based on a waveguide defined by a ridge in the PPLN thin film. The concept, the fabrication process and the characterizations of these ones are presented in this paper.
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