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1. Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Author

Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert, and Omar Elmazria

Subjects
ScAlN thin films, sputtering, hetero-epitaxial films, SAW sensors, Chemical technology, TP1-1185
Abstract

Scandium aluminum nitride (ScxAl1-xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc0.09Al0.91N and Sc0.18Al0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5°. Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc0.09Al0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

Published
2020
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6. AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor

Author

Thierry Aubert, Jaafar Ghanbaja, Cecile Floer, Natalya F. Naumenko, Omar Elmazria, Sami Hage-Ali, Florian Bartoli, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National University of Science and Technology (MISIS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Experiments were carried out at MiNaLor clean-room platform which is partially supported by FEDER and Grand Est Region through the RaNGE project and at IJL TUBE-Davm equipment which is funded by the French PIA project 'Lorraine Université d’Excellence' (ANR-15-IDEX-04-LUE). This work was supported by the Direction Générale de l’Armement (DGA), the ANR project 'SAWGOOD' (ANR-18-CE42-0004-01), the CAPMAT project ('FEDER-FSE Lorraine et Massif Vosges 2014-2020' and ICEEL), the Ministry of Science and Higher Education of the Russian Federation (075-02-2020-1588), and the National University of Science and Technology MISIS (K2-2020-007)., ANR-15-IDEX-0004,LUE,Isite LUE(2015), and ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018)

Subjects
Materials science, Acoustics and Ultrasonics, Interdigital transducer, Lithium niobate, Substrate (electronics), Nitride, 01 natural sciences, Temperature measurement, Packageless, Overlayer, chemistry.chemical_compound, [SPI]Engineering Sciences [physics], 0103 physical sciences, Electrical measurements, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, ComputingMilieux_MISCELLANEOUS, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [PHYS]Physics [physics], business.industry, temperature, Acoustic wave, guided acoustic wave, chemistry, Optoelectronics, business
Abstract

Batteryless, wireless, and packageless acoustic wave sensors are particularly desirable for harsh high-temperature environments. In this letter, an acoustic wave sensor based on a lithium niobate (Y + 128° cut, abbreviated LN-Y128) substrate with a buried platinum interdigital transducer (IDT) in an aluminum nitride (AlN) overlayer is investigated. Previously, it was demonstrated theoretically that due to the specific properties of LN-Y128, Rayleigh-type guided waves can propagate at the AlN/IDT(Pt)/LN-Y128 interface. Here, this structure is, for the first time, studied experimentally, including the growth and properties of the AlN layer onto irregular platinum IDTs. Both Shear Horizontal and Rayleigh-type waves have been identified after the AlN deposition and the velocities are consistent with the fitted SDA-FEM-SDA (a combination of finite element modeling with spectral domain analysis) simulations. Electrical measurements with a surface perturbation and temperature measurements show that the AlN/IDT(Pt)/LN-Y128 bilayer structure is promising as a packageless high-temperature sensor.

Published
2021
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7. Direct integration of SAW resonators on industrial metal for structural health monitoring applications

Author

Cecile Floer, Sergei Zhgoon, Baptiste Paulmier, Prince Mengue, Sami Hage-Ali, Omar Elmazria, and Florian Bartoli

Subjects
Resonator, Materials science, Mechanics of Materials, Signal Processing, General Materials Science, Direct integration of a beam, Structural health monitoring, Electrical and Electronic Engineering, Condensed Matter Physics, Engineering physics, Atomic and Molecular Physics, and Optics, Civil and Structural Engineering
Abstract

Surface acoustic wave (SAW) sensors are very promising for structural health monitoring (SHM) applications as they have the advantages of being robust, passive (batteryless), remotely interrogated (wireless) and can even be packageless. This paper describes ultralow-profile SAW resonators that can be directly fabricated and integrated on metallic parts in industrial facilities. They are based on piezoelectric thin films (ZnO) which are directly sputtered on polished industrial titanium (Ti) and stainless steel. With this approach, no sensor glue-bonding to the target is needed, and measurement errors related to this step are avoided. Demonstrator devices have been studied numerically and experimentally. The structural properties of the ZnO thin films were characterized through x-ray diffraction and atomic force microscopy. A preferred orientation (002) was achieved with a roughness of 50 nm on the top surface. Resonators were microfabricated and their functional parameters (i.e. resonance frequency, quality factor and electromechanical coupling) were extracted through impedance measurements and fitted with a Butterworth-van Dyke model. By increasing applied temperatures (up to 450 °C) and the strain (up to 1800 μϵ), a linear decrease of the resonance frequency has been shown. A temperature coefficient of frequency of −46.4 ppm °C−1 and a good strain sensitivity (1.49 ppmμϵ−1) were obtained, thus making the structure promising as a high temperature and strain sensing element in industrial SHM applications.

Published
2021
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8. Non-leaky longitudinal acoustic modes in ScxAl1-xN/sapphire structure for high-temperature sensor applications

Author

Omar Elmazria, Natalya F. Naumenko, Thierry Aubert, Jeremy Streque, Florian Bartoli, Philippe Pigeat, Jaafar Ghanbaja, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Moscow steel and alloys Institute, Russia, Acoustooptics center, Moscow steel and alloys Institute-Moscow steel and alloys Institute, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Impact N4S, and ANR-15-IDEX-0004,LUE,Isite LUE(2015)

Subjects
010302 applied physics, Electromechanical coupling coefficient, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Physics and Astronomy (miscellaneous), Band gap, business.industry, Surface acoustic wave, 02 engineering and technology, Acoustic wave, Nitride, 021001 nanoscience & nanotechnology, 01 natural sciences, Piezoelectricity, Resonator, 0103 physical sciences, Sapphire, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business
Abstract

International audience; Multilayered structures based on wide bandgap nitride piezoelectric thin films are very attractive for high-temperature surface acoustic waves (SAW) sensor applications. In this respect, scandium aluminium nitride (ScAlN) films are of particular interest as they combine enhanced piezoelectric properties and slower acoustic waves velocities when the Sc content steadily increases up to 40%. This property offers the possibility to combine slow ScAlN films on fast substrates like sapphire, to generate higher-order SAW modes which often show a better electromechanical coupling coefficient k 2 compared to zero-order modes. In this letter, we show that low-attenuated longitudinal SAW can be generated in ScxAl1-xN/Sapphire structure, for x parameter varying in a large range. This theoretical result is then confirmed by the experimental investigation of SAW resonators based on highly-textured (002) Sc0.09Al0.91N films sputtered on c-cut sapphire substrates. It is finally shown that the use of electrodes based on metals with high density can lead to SAW structures offering a unique combination between a large bandgap over 5 eV, a k 2 value beyond 1% and a high SAW velocity near 10000 m/s.

Published
2019
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9. ScAlN thin films studied by Raman spectroscopy

Author

Ninel Kokanyan, Florian Bartoli, Thierry Aubert, Omar Elmazria, Philippe Pigeat, Edvard Kokanyan, Michel Aillerie, Kokanyan, Ninel, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Armenian State Pedagogical University

Subjects
[PHYS]Physics [physics], ComputingMilieux_MISCELLANEOUS, [PHYS] Physics [physics]
Abstract

International audience

Published
2019

10. Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600$^\circ$C

Author

Omar Elmazria, Jeremy Streque, Vincent Polewczyk, Edvard Kokanyan, Florian Bartoli, Sami Hage-Ali, Thierry Aubert, Ninel Kokanyan, Amine Taguett, Pascal Boulet, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institute for Physical Research of National Academy of Sciences of Armenia (IPR NAS RA), National Academy of Sciences of the Republic of Armenia [Yerevan] (NAS RA), IMPACT N4S, and ANR-15-IDEX-0004,LUE,Isite LUE(2015)

Subjects
Electromechanical coupling coefficient, Diffraction, Materials science, Surface acoustic waves, Microsensors, Lithium niobate, FOS: Physical sciences, Physics - Classical Physics, Applied Physics (physics.app-ph), 01 natural sciences, Resonator, symbols.namesake, chemistry.chemical_compound, 0103 physical sciences, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Condensed Matter - Materials Science, business.industry, 010401 analytical chemistry, Surface acoustic wave, Materials Science (cond-mat.mtrl-sci), Classical Physics (physics.class-ph), Physics - Applied Physics, 0104 chemical sciences, High-temperature sensors, Stoichiometric lithium niobate, chemistry, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Surface acoustic wave sensor, Raman spectroscopy, business, Stoichiometry
Abstract

Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at best. However, the applicability of such sensors remains incomplete since they do not allow identification above 400$^\circ$C. The latter would require the use of a piezoelectric substrate providing a large electromechanical coupling coefficient K 2 , while being stable at high temperature. In this letter, we investigate the potentiality of stoichiometric lithium niobate (sLN) crystals for such purpose. Raman spectroscopy and X-ray diffraction attest that sLN crystals withstand high temperatures up to 800$^\circ$C, at least for several days. In situ measurements of sLN-based SAW resonators conducted up to 600$^\circ$C show that the K 2 of these crystals remains high and stable throughout the whole experiment, which is very promising for the future achievement of identifiable wireless high-temperature SAW sensors.

Published
2019
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11. Study of Cr-Si Electrodes on Langasite Surface Acoustic Wave Resonators for High Temperature Sensing

Author

Streque, J., Soussou, M. A., Florian Bartoli, Sami Hage-Ali, Thierry Aubert, Thomas Mazingue, Marc Lomello, Omar Elmazria, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry]), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience

Published
2018

12. AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Author

M. Moutaouekkil, Florian Bartoli, Omar Elmazria, Cecile Floer, Olivier Bou Matar, Philippe Pigeat, Sami Hage-Ali, Sergei Zhgoon, Harshad Mishra, Thierry Aubert, Abdelkrim Talbi, Stefan Mc Murtry, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National Research University, Moscow Power Engineering Institute, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ACKNOWLEDGMENTThe authors would like to thank L. Badie, G. Lengaigne, and F. Montaigne from Minalor platform, Institut Jean Lamour, Nancy, France, for their help in the microfabrication., and This work was supported in part by the Direction Générale de l’Armement, in part by the Région Grand-Est, in part by the European funds FEDER, in part by the French PIA project 'Lorraine Université d’Excellence' under Grant ANR-15-IDEX-04-LUE, and in part by the Ministry of Science and Education of Russian Federation under Grant 8.6108.2017/6.7.

Subjects
Materials science, Acoustics and Ultrasonics, Temperature sensing, Acoustics, Lithium niobate, Structure (category theory), 02 engineering and technology, Particle displacement, Acoustic wave, 021001 nanoscience & nanotechnology, 01 natural sciences, Condensed Matter::Materials Science, chemistry.chemical_compound, symbols.namesake, chemistry, 0103 physical sciences, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, Electrical and Electronic Engineering, Rayleigh wave, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, 010301 acoustics, Instrumentation
Abstract

International audience; Surface acoustic wave (SAW) sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO3 structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing. Index Terms-Surface acoustic wave SAW, temperature sensor, waveguiding layer acoustic wave WLAW, packageless, low-profile.

Published
2018
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13. AlN/GaN/Sapphire heterostructure for high-temperature packageless acoustic wave devices

Author

Hamid M'Jahed, M. Moutaouekkil, Sergei Zhgoon, Abdelkrim Talbi, Thierry Aubert, Jeremy Streque, Philippe Pigeat, Florian Bartoli, Sami Hage-Ali, Omar Elmazria, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université Mohammed Premier [Oujda], National Research University, Moscow Power Engineering Institute, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), and Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)

Subjects
Materials science, SAW, 02 engineering and technology, High-temperature, 01 natural sciences, Packageless Sensor, law.invention, [SPI]Engineering Sciences [physics], law, 0103 physical sciences, Lamination, Scattering parameters, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, Deposition (law), business.industry, Metals and Alloys, Heterojunction, Acoustic wave, TCF, 021001 nanoscience & nanotechnology, Condensed Matter Physics, WLAW, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Sapphire, Optoelectronics, 0210 nano-technology, business, Temperature coefficient, Layer (electronics)
Abstract

International audience; — Surface acoustic waves (SAW) technology is very promising to achieve wireless sensors able to operate in high temperature environments up to possibly 1000°C. However, there is currently a bottleneck related to the packaging of such sensors. The current high-temperature packaging solutions can withstand 600°C at most. This limitation could be overtaken by the development of packageless devices, based on the waveguiding layer acoustic waves (WLAW) principle. In such devices, the acoustic wave is confined inside an inner layer and is then isolated from undesired surface perturbations like dust deposition. In this paper, we investigate the performance of an AlN/IDT/GaN/Sapphire WLAW device used as a temperature sensor able to operate up to 500°C. After validating a room-temperature GaN material constant set with basic SAW measurements performed on IDT/GaN/Sapphire structure, the AlN/IDT/GaN/Sapphire device is simulated to determine the optimal relative thicknesses of AlN and GaN films in order to obtain a good wave confinement. Based on these calculations, an experimental WLAW device is performed and electrically characterized. The full wave confinement is experimentally confirmed by the lamination of an acoustic absorber on top of the device: no change in the scattering parameters was observed. The WLAW device is then electrically characterized between the ambient temperature and 500°C. A temperature coefficient of frequency (TCF) value of-34.6 ppm/°C is obtained, demonstrating the potential of the WLAW AlN/IDT/GaN/Sapphire structure as a packageless temperature sensor. Finally, the theoretical TCF of the AlN/IDT/GaN/Sapphire structure was numerically calculated by changing the material constants of AlN, GaN and Sapphire according to the temperature coefficients available in the literature. The theoretical and experimental data were found in good accordance.

Published
2018
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14. AlN/ZnO/LiNbO

Author

Cecile, Floer, Sami, Hage-Ali, Sergei, Zhgoon, Mohammed, Moutaouekkil, Florian, Bartoli, Harshad, Mishra, Stefan, Mc Murtry, Philippe, Pigeat, Thierry, Aubert, Olivier, Bou Matar, Abdelkrim, Talbi, and Omar, Elmazria

Abstract

Surface acoustic wave sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO

Published
2018

15. First investigations on stoichiometric lithium niobate as piezoelectric substrate for high-temperature surface acoustic waves applications

Author

Amine Taguett, Thierry Aubert, Ninel Kokanyan, Hamid M'Jahed, Pascal Boulet, Jeremy Streque, Hassan Alhousseini, Omar Elmazria, Florian Bartoli, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), Université de Lorraine (UL)-CentraleSupélec, Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry]), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), IEEE, CentraleSupélec-Université de Lorraine (UL), and Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Electromechanical coupling coefficient, Materials science, business.industry, Annealing (metallurgy), stoichiometric lithium niobate, SAW, Lithium niobate, Surface acoustic wave, high-temperature, 02 engineering and technology, Acoustic wave, SAW sensors, 021001 nanoscience & nanotechnology, 01 natural sciences, Temperature measurement, Piezoelectricity, chemistry.chemical_compound, Resonator, chemistry, 0103 physical sciences, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, 0210 nano-technology, business, 010301 acoustics
Abstract

International audience; Surface acoustic waves (SAW) technology is very promising to achieve high-temperature wireless sensors. However, there is currently a need for piezoelectric substrates with a high electromechanical coupling coefficient (K2 > 1%), able to operate under harsh environments, especially in the intermediate temperature range (300-600°C). None of the conventional SAW substrate can face this challenge. In particular congruent lithium niobate, whose K2 can exceed 5%, shows serious limitations from 300°C, mainly related to Li vacancies. Recent studies have demonstrated the potential of stoichiometric lithium niobate (s-LN) for high-temperature bulk acoustic waves applications. In this paper, we investigate this piezoelectric material for high-temperature SAW applications. In particular, we examine carefully the potential structural and chemical changes that s-LN surface can undergo during a high-temperature exposure. Finally, SAW resonators based on s-LN substrates are in situ characterized up to 600°C.

Published
2017
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16. AlN/ZnO/LiNbO3 packageless structure as a low-profile sensor for on-body applications

Author

Olivier Bou Matar, Stefan Mc Murtry, Thierry Aubert, M. Moutaouekkil, Abdelkrim Talbi, Cecile Floer, Omar Elmazria, Sami Hage-Ali, Florian Bartoli, Sergei Zhgoon, Harshad Mishra, Philippe Pigeat, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), National Research University, Moscow Power Engineering Institute, Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), and Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)

Subjects
010302 applied physics, Materials science, business.industry, Surface acoustic wave, 02 engineering and technology, Acoustic wave, Conformable matrix, 021001 nanoscience & nanotechnology, 01 natural sciences, Resonator, 0103 physical sciences, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Wireless, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Layer (electronics), ComputingMilieux_MISCELLANEOUS
Abstract

Surface acoustic wave (SAW) devices are widely used as filters or resonators for mobile communications or radars applications. However, the velocity of the wave can be very sensitive to physical parameters of the environment (temperature, strain…), which allows the device to be used as a sensor. SAW devices are passive (batteryless) and wireless, but are often bulky due to the package. To dramatically reduces their profile, it is possible to use a Wave-guiding Layer Acoustic Wave (WLAW) structure, which consists of a low velocity layer between two higher velocity layers. These structures have the potential to be ultra-thin and conformable and thus could be used for flexible on-body biomedical applications. This work investigates the AlN/ZnO/LiNbO 3 structure as a candidate for a WLAW temperature sensor.

Published
2017

18. Notice of Removal: Comparison between Ir, Ir0.85Rh0.15 and Ir0.7 Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Author

Marc Lomello, Michel Hehn, Omar Elmazria, Florian Bartoli, Stéphane Mangin, Yong Xu, Thierry Aubert, and Amine Taguett

Subjects
Materials science, Optics, Electrical resistivity and conductivity, Annealing (metallurgy), Scanning electron microscope, business.industry, Electrode, Air atmosphere, Surface acoustic wave, Analytical chemistry, Acoustic wave, Thin film, business
Abstract

We previously demonstrated the potential of Ir x Rh 1−x thin films (x x Rh 1−x O 2 films, which exhibit a resistivity suitable for the targeted application, especially as the Ir rate is high (ρ  180 μΩ·cm for x = 0.5). Consequently, the first aim of this work is to study the most promising Ir-rich compositions (0.7 3 in the vicinity of 800°C [2], we also investigate the interest of alloying Ir with Rh regarding this degradation effect. Finally, we examine the reliability of SAW devices based on Ir x Rh 1−x electrodes and Langasite (LGS) substrate during a 20-days annealing period between 800 and 950°C.

Published
2017
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19. Notice of Removal: AlN/GaN/spphire as promising structure for wireless, batteryless and packageless acoustic wave sensors for high temperature applications

Author

M. Moutaouekkil, Florian Bartoli, Sami Hage-Ali, Omar Elmazria, Serguei Zhgoon, Abdelkrim Talbi, and Thierry Aubert

Subjects
Work (thermodynamics), Materials science, business.industry, Context (language use), Gallium nitride, 02 engineering and technology, Acoustic wave, Atmospheric temperature range, 021001 nanoscience & nanotechnology, Engineering physics, chemistry.chemical_compound, chemistry, Sapphire, Miniaturization, Wireless, 0210 nano-technology, business
Abstract

Waveguiding layer acoustic waves (WLAW) technology is considered as a packageless solution for extreme miniaturization of acoustic wave devices. WLAW solution is also original and suitable for high-temperature applications. Indeed, the achievement of a stable high-temperature packaging still constitutes a technological lock, in particular regarding sealing performance. In this context, we consider AlN/GaN/Sapphire as a promising WLAW structure for high-temperature applications. Indeed, the high-temperature stability of these three materials was previously demonstrated. However, in order to develop fully operational WLAW sensors based on this layered structure, it is necessary to have a better knowledge of the behaviour of each constitutive material with respect to the temperature. Consequently, the aim of this work is to experimentally validate GaN and AlN elastic constants sets in a large temperature range, which is a prerequisite to make the design of WLAW sensors according to the targeted performance.

Published
2017
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20. Comparison between Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmosphere

Author

Amine Taguett, Jaafar Ghanbaja, Pascal Boulet, Florian Bartoli, Thierry Aubert, Yong Xu, Omar Elmazria, Stéphane Mangin, Marc Lomello, Michel Hehn, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry]), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Symme, Univ. Savoie Mont Blanc, ISITE - Isite LUE - - LUE2015 - ANR-15-IDEX-0004 - IDEX - VALID, Université de Lorraine (UL)-CentraleSupélec, and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, SAW, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 02 engineering and technology, High-temperature, [SPI.MAT] Engineering Sciences [physics]/Materials, 01 natural sciences, 7. Clean energy, Multilayers film, [SPI.MAT]Engineering Sciences [physics]/Materials, Electrical resistivity and conductivity, 0103 physical sciences, Air atmosphere, Electronic engineering, Electrical and Electronic Engineering, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, ComputingMilieux_MISCELLANEOUS, business.industry, Metals and Alloys, Acoustic wave, Ir-Rh electrodes, 021001 nanoscience & nanotechnology, Condensed Matter Physics, [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Electrode, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Sublimation (phase transition), 0210 nano-technology, business
Abstract

International audience; —In this paper, we investigate the suitability of Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves (SAW) applications taking place above 800°C in air atmosphere. As expected, all films oxidize from 800°C in IrO 2 or Ir x Rh 1-x O 2 phase. The electrical properties of the latter remain compatible with the design of SAW devices, with a specific electrical resistance of 151 and 100 µΩ·cm for x = 0.7 and x = 0.85 respectively. Moreover, we observe that the Ir x Rh 1-x O 2 phase is much more stable regarding sublimation effect than the IrO 2 phase, highlighting the interest of alloying Ir with Rh for high-temperature applications. SAW devices based on langasite substrate and Ir 0.85 Rh 0.15 electrodes show a very good stability for at least several days at 800°C in air. In the case of Ir 0.7 Rh 0.3 electrodes, this stability is extended to temperatures up to 900°C.

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