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Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size at the cost of low capture area, making the "needle in a haystack" issue acute. This leads to poor instrument sensitivity and long analysis time. Moreover, electrical transductions are limited in frequency, which limits the achievable mechanical bandwidth again limiting throughput. Multiplexing a large number of high-frequency resonators appears as a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks resonators fabricated through a Very Large Scale Integration process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way towards the realization of sensors for multi-parametric analysis, extremely low limit of detection and response time.

It has been demonstrated in the recent years that nanomechanical mass spectrometry was well suited for the analysis of specific high mass species such as viruses. Still, the exclusive use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time (related to capture area) and mass resolution (inversely proportional to device mass). Such devices also require complex readout schemes to simultaneously monitor multiple resonance modes, in particular when stiffness or shape come into play, which degrades mass resolution. These issues restrict nanomechanical MS to the analysis of species with specific properties. We report here the first demonstration of single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanical techniques allows the use of resonators with new topologies. The device introduced here is designed to be impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode. Short analysis time is in reach thanks to the sensitivity and bandwidth of optomechanical read-out and its compliance with telecom multiplexing techniques.

Atomic force spectroscopy and microscopy (AFM) are invaluable tools to characterize nanostructures and biological systems. Most experiments, including state-of-the-art images of molecular bonds, are achieved by driving probes at their mechanical resonance. This resonance reaches the MHz for the fastest AFM micro-cantilevers, with typical motion amplitude of a few nanometres. Next-generation investigations of molecular scale dynamics, including faster force imaging and higher-resolution spectroscopy of dissipative interactions, require more bandwidth and vibration amplitudes below interatomic distance, for non-perturbative short-range tip-matter interactions. Probe frequency is a key parameter to improve bandwidth while reducing Brownian motion, allowing large signal-to-noise for exquisite resolution. Optomechanical resonators reach motion detection at 10^(-18) m.(Hz)^(-1/2), while coupling light to bulk vibration modes whose frequencies largely surpass those of cantilevers. Here we introduce an optically operated resonating optomechanical atomic force probe of frequency 2 decades above the fastest functional AFM cantilevers while Brownian motion is 4 orders below. Based on a Silicon-On-Insulator technology, the probe demonstrates high-speed sensing of contact and non-contact interactions with sub-picometre driven motion, breaking open current locks for faster and finer atomic force spectroscopy.

Most technologies, including conventional mass spectrometry, struggle to measure the mass of particles in the MDa to GDa range. Although this mass range appears optimal for nanomechanical resonators, early nanomechanical-MS systems suffered from prohibitive sample loss, extended analysis time or inadequate resolution. Here, we report on a novel system architecture combining nebulization of the analytes from solution, their efficient transfer and focusing without relying on electromagnetic fields, and the mass measurements of individual particles using nanomechanical resonator arrays. This system determined the mass distribution of ~30 MDa polystyrene nanoparticles with a detection efficiency 6 orders of magnitude higher than previous nanomechanical-MS systems with ion guides, and successfully performed the highest molecular mass measurement to date with less than 1 picomole of bacteriophage T5 105 MDa viral capsids.

One of the main challenges to overcome to perform nanomechanical Mass Spectrometry (NEMS-MS) analysis in a practical time frame stems from the size mismatch between the analyte beam and the extremely small nanomechanical detector area. We report here the demonstration of NEMS-MS with arrays of 20 individually addressed nanomechanical resonators where the number of inputs-outputs for the whole array is the same as that of a single resonator. While all resonators within an array are interconnected via two metal levels, each resonator is designed with a distinct resonance frequency which becomes its individual address. In order to perform single-particle Mass Spectrometry, the resonance frequencies of the two first modes of each NEMS within an array are monitored simultaneously. Using such an array, mass spectra of metallic aggregates in the MDa range are acquired with more than one order of magnitude improvement in analysis time due to the increase in capture cross section compared to individual resonators. A 20 NEMS array is probed in 150ms with the same mass limit of detection as a single resonator. Spectra acquired with a conventional Time- of-Flight (TOF) mass spectrometer in the same system show excellent agreement. As individual information for each resonator within the array is retained, the array becomes a particle imager, each resonator acting as a pixel. With this technique, we demonstrate how Mass Spectrometry Imaging (MSI) at the single particle level becomes possible by mapping a 4cm-particle beam in the MDa range and above.

Frequency stability is key to performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally-induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequency response, these fluctuations have recently attracted considerable theoretical interest. However, their existence is very difficult to demonstrate experimentally. Here, through a literature review, we show that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise. We studied a monocrystalline silicon nanoresonator at room temperature, and found a similar discrepancy. We propose a new method to show this was due to the presence of frequency fluctuations, of unexpected level. The fluctuations were not due to the instrumentation system, or to any other of the known sources investigated. These results challenge our current understanding of frequency fluctuations and call for a change in practices.