1. Optimum Functionalization of Si Nanowire FET for Electrical Detection of DNA Hybridization
- Author
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R. Midahuen, B. Previtali, C. Fontelaye, G. Nonglaton, V. Stambouli, and S. Barraud
- Subjects
Biosensing ,ISFET ,DNA ,silicon nanowire ,Electrical engineering. Electronics. Nuclear engineering ,TK1-9971 - Abstract
In this work, we demonstrate a wafer-scale fabrication of biologically sensitive Si nanowire FET for pH sensing and electrical detection of deoxyribonucleic acid (DNA) hybridization. Based on conventional “top-down” CMOS compatible technology, our bioFETs explore a wide range of design (nanowires (NW), nanoribbons (NR), and honeycomb (HC) structures) with opening access scaled down to only 120 nm. After device fabrication, IDS-VBG transfer and IDS-VDS output characteristics show a conventional n-type FET behavior with an ION/IOFF value higher than 105, as well as an increase of threshold voltage as the NW width is reduced. Then, using a capacitive coupling in our dually-gated Si bioFETs, the pH sensitivity is enhanced with a pH response up to 600 mV/pH. Finally, we successfully detected an increase of threshold voltage of n-type silicon nanowires (SiNWs) due to hybridized target DNA molecules.
- Published
- 2022
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