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This paper presents a three-dimensional (3-D) wire bondless power module using silicon carbide (SiC) power devices. Commercially available SiC power devices are designed for wire bonding. Wire bonds have an inherent parasitic inductance that limits high-frequency switching. This results in an underutilization of the full potential of SiC power devices, which have very low switching losses at high frequencies. Wire-bonded power modules run into a performance ceiling when it comes to ultrafast switching. This paper strives to provide a solution to this issue, which involves reconfiguring a commercially available bare die SiC power device into a flip-chip-capable device. A wire bondless SiC Schottky diode package was demonstrated and its performance was contrasted with a conventional wire-bonded package. A 24% reduction in the ON-state resistance was observed in the wire bondless package. As a next step, wire bondless SiC MOSFET packages were developed and tested in a half-bridge configuration in a highly integrated 3-D arrangement. This approach departs from the conventional concept of a power module—demonstrating a direct-bonded-copper-less and baseplate-less half-bridge switching cell. Double-pulse tests conducted on the cell showed >3× reduction in the parasitic inductance of the 3-D cell as compared with a conventional wire-bonded module. [ABSTRACT FROM AUTHOR]

e (for fabrication of advanced structures). Cu-Sn TLP bonding is employed herein because of its high remelting temperature and desirable thermal and electrical conductivities. The bonding starts with a stack of Cu-Sn-Cu metal layers that eventually transforms to Cu-Sn alloys. As the alloys have melting temperatures (Cu3Sn: > 600 ?C, Cu6Sn5: > 400 ?C) significantly higher than the process temperature, the process can be repeated without damaging previously bonded layers. A Cu-Sn TLP bonding process was developed using thin Sn metal sheets inserted between copper layers on silicon die and direct bonded copper substrates, emulating the process used to construct automotive power modules. Bond quality is characterized using (1) proof-of-concept fabrication, (2) material identification using scanning electron microscopy and energy-dispersive x-ray spectroscopy analysis, and (3) optical analysis using optical microscopy and scanning acoustic microscope. The feasibility of multiple-sided Cu-Sn TLP bonding is demonstrated by the absence of bondline damage in multiple test samples fabricated with double- or four-sided bonding using the TLP bonding process. [ABSTRACT FROM AUTHOR]