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The recent development in advanced packaging and MEMS applications has created a need for high aspect ratio lithography processes, ultrasonic spray coating is a very appropriate method to meet this requirement, the parameters of atomization are greatly affected the spray quality. By using a laser-phase Doppler analyzer (PDA), an experimental study was conducted of the atomization characteristics of the ultrasonic spray nozzle, water was used as the liquid to be atomized instead of photoresist and air was used as the auxiliary gas instead of nitrogen, the parameters of atomization characteristics under different operating conditions were measured, such as mean diameter D10 and diameter distribution of atomized droplet particles etc. The experimental measurement results indicate that the flow rate of atomized liquid and auxiliary gas have a significant impact on the spray characteristics, the nozzle can achieve a comparatively good atomization state under the condition of a relatively small flow rate of atomized liquid or a relatively high flow rate of auxiliary gas, the mean diameter D10 of droplets can be 18.39μm. The research findings can provide an underlying basis for the application of the ultrasonic spray nozzle.

The partially devulcanization of waste tire rubber vulcanizate was carried out with the newly developed mechanochemical pan mill, which can exert fairly strong compressing and shearing force on the milling materials and avoid the agglomeration phenomenon. The experimental results indicate that the particle size is greatly reduced and the surface is fluffier, crosslink density is reduced to one half without large degradation and heavy damage of rubber backbones. The study of mechanical properties of revulcanizate of SBR and waste tire rubber blends at 1:1 ratio indicates that elongation at break increased from 302% to 447.6%. But the properties of tensile strength, modulus and hardness are reduced. The mechanochemical pan milling process is a simple, low cost and environmental-benign process for waste tire rubber devulcanization at ambient temperature without any use of chemicals and can be used at commercial-scale.

By analyzing the length measurement principle of interferometer, the key of environmental error compensation of interferometer is modeling the refractive index distribution along the measurement optical path. The spatio-temporal coupling models of temperature, pressure and humidity were established through the collected data by sensors, using the block pulse operator method. Then the model of refractive index over time along the optical path was obtained by Edlén’s formulation, and the environmental error compensation was achieved. The simulation results of lithography mask stage’s movement environmental flow and measurement showed that this method can compensate interferometer environmental error well, and the following residual error was reduced to less than 1nmso that the resolution level was achieved.

In order to address the problem of quality control faced in multi-type and small-batch manufacturing mode, the method based on Bayesian Network (BN) is proposed. The building, learning and evolving method as well as the quality prediction and diagnosis method of BN model are described in this paper. The combination of BN model and Shewhart control chart is also mentioned. The model building and evolving method was conducted in PCB micro-drilling process as example, verifying that the prediction accuracy increases with the evolved model. The drilling quality prediction was compared with that obtained through regression analysis and artificial neural network. The advantage of BN model in advanced manufacturing is proved.

A variable screening method based on energy flow analysis is provided for significant variables selection in crashworthiness optimizing. Two quantities, significance and specific energy absorption, are used to screen design variables. These quantities are calculated from energy relation matrix and energy absorption of parts. Energy relation matrix is built from finite element crash simulation result to describe energy flow path in parts during impact. The method is applied in the case of a car engine room under frontal impact. Optimization for lightweight using response surface method is performed on the reduced variable set at a relatively low computational cost.

Vehicle crashworthiness is one of the most important indicators to assess the automotive performance, which is directly related with passenger’s life and safety. Therefore, more attention has been paid to improve the automotive passive safety. This paper presents the analysis method based on energy flow analysis to solve the automotive crashworthiness problem. The energy transfer model is built based on the constraints analysis for product performance and the rational energy flow element partition. According to the energy transfer model, the energy absorption of each component can be attained from the finite element crash simulation result and also the energy distribution relationship can be analyzed. Based on the analysis results, the full front impact crashworthiness of a car is improved by modifying the energy flow path and distribution. It also demonstrates that the method is effective to solve the automotive crashworthiness problem.

This paper presents the design method of electromechanical products for saving energy based on energy flow analysis. The energy transfer model and energy correlation model are built through analyzing the relation of energy flow and products performance in order to address the conflict between energy saving and performance optimization. Based on the energy transfer model, the performance pertinences and performance margins of electromechanical products are analyzed with CAE technology and value engineering theory. Finally, the split air-conditioner’s outdoor unit is studied and the design method for saving energy based on energy flow analysis is adopted to solve the conflict between air flow increasing and noise reduction.

In order to improve the radial superresolution of the two-photon microfabrication, the superresolution diffraction theory was introduced in detail. The theoretical analysis of the photosensitive resist based on the exciting power and concentration of free radical was given.. And the superresolution diffractive optical element was applied in the two-photon microfabrication system. Simulation results indicated that the radial superresolution of the two-photon microfabrication can be improved with the superresolution diffractive optical element.