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We present the fabrication of submicron polyimide film sandwiched by Al film. The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.

The Low Energy X-ray Telescope is a main payload on the Hard X-ray Modulation Telescope satellite. The swept charge device is selected for the Low Energy X-ray Telescope. As swept charge devices are sensitive to proton irradiation, irradiation test was carried out on the HI-13 accelerator at the China Institute of Atomic Energy. The beam energy was measured to be 10 MeV at the SCD. The proton fluence delivered to the SCD was $3\times10^{8}\mathrm{protons}/\mathrm{cm}^{2}$ over two hours. It is concluded that the proton irradiation affects both the dark current and the charge transfer inefficiency of the SCD through comparing the performance both before and after the irradiation. The energy resolution of the proton-irradiated SCD is 212 eV@5.9 keV at $-60\,^{\circ}\mathrm{C}$, while it before irradiated is 134 eV. Moreover, better performance can be reached by lowering the operating temperature of the SCD on orbit.

Readout noise is a critical parameter for characterizing the performance of charge-coupled devices (CCDs), which can be greatly reduced by the correlated double sampling (CDS) circuit. However, a conventional CDS circuit inevitably introduces new noise since it consists of several active analog components such as operational amplifiers. This paper proposes a digital CDS circuit technique, which transforms the pre-amplified CCD signal into a train of digital presentations by a high-speed data acquisition card directly without the noisy CDS circuit, then implements the digital CDS algorithm through a numerical method. A readout noise of 3.3 e(-) and an energy resolution of 121 eV@5.9 keV can be achieved via the digital CDS technique.

Charged Coupled Devices (CCDs) have been successfully used in several low energy X-ray astronomical satellites over the past two decades. Their high energy resolution and high spatial resolution make them a perfect tool for low energy astronomy, such as observing the formation of galaxy clusters and the environment around black holes. The Low Energy X-ray Telescope (LE) group is developing a Swept Charge Device (SCD) for the Hard Xray Modulation Telescope (HXMT) satellite. A SCD is a special low energy X-ray CCD, which can be read out a thousand times faster than traditional CCDs, simultaneously keeping excellent energy resolution. A test method for measuring the charge transfer efficiency (CTE) of a prototype SCD has been set up. Studies of the charge transfer inefficiency (CTI) with a proton-irradiated SCD have been performed at a range of operating temperatures. The SCD is irradiated by 3x10(8)cm(-2) 10 MeV protons.