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6. Contributors

7. Benefits of Modularity Strategies - Implications of Decisions and Timing

11. Comparison measurements for hybrid evaluation approaches in optical nanometrology

17. Deep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures

20. Alignment free characterization of 2D gratings

21. Imaging Scatterometry

22. Fast Characterization of Moving Samples with Nano-Textured Surfaces

35. Digital twins for 3D confocal microscopy

36. Dealing with Complex and Ill-Structured Problems: Results of a Plan-Do-Check-Act Experiment in a Business Engineering Semester

38. A virtual microscope for simulation of Nanostructures

40. Deuterium isotope effects on 15N backbone chemical shifts in proteins

44. Co-design of a Game to Support Increased Manufacturing Insight and Interest Among Teenagers and Young Adults

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