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Abstract: In situ oxygen doping modifies both the morphology and texture of the TiN films. It has been found that beyond 15 at% oxygen doping the columnar morphology is preserved however the <111> texture is changed to the <002>. The detailed structure analysis of the Ti0.45O0.20N0.35 oxynitride films prepared by reactive unbalanced magnetron sputtering (UBMS) in an argon/nitrogen/oxygen mixture atmosphere discovered a substructure in the bulk of the TiN(O) single crystal columns. In the cross sectional transmission electron microscopy (X-TEM) images the substructure is showing up in form of fibre-like morphology parallel to the axis of the columnar crystals and in a honeycomb-like supernetwork in the cross section of the single crystal columns in the plane view TEM specimens. The fibre-like substructure proceeds to the film surface and manifests itself in the morphology of the dome-shaped surface areas of the single crystal columns as revealed by atomic force microscopy analysis. [Copyright &y& Elsevier]

Abstract: The structure, optical and electrical properties of transparent conducting oxide films depend greatly on the methods of preparation, heat treatment, type and level of dopant. Thin films of (CdO)1−x (In2O3) x have been grown by electron beam evaporation technique for different concentrations of In2O3 (x =0, 0.05, 0.1, 0.15 and 0.2). Increase of doping led to increased carrier concentration as derived from optical data and hence to increased electrical conductivity, which degraded the transparency of the films. An improvement of the electrical and optical properties of Cadmium indium oxide (CdIn2O4) has been achieved by post-deposition annealing. A resistivity value of 7×10−5 Ω cm and transmittance of 92% in the near infrared region and 82% in the visible region have been obtained after annealing at 300 °C for 90 min in air. [Copyright &y& Elsevier]