1. Interferometer adopting a ball lens both as a beam collimator and a reflector
- Author
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Tatsuya Kume, Hiromasa Yasuda, Tsutomu Mibe, Masaki Michihata, and Satoru Takahashi
- Subjects
Ball lens ,Collimator ,Retroreflector ,Interferometer ,Optical frequency comb ,Electric apparatus and materials. Electric circuits. Electric networks ,TK452-454.4 - Abstract
We aim to develop an alignment monitor, which consists of a length measurement grid of absolute distance interferometers, where we adopt a ball lens both as a beam collimator and a reflector. Collimated beams by the ball lenses were evaluated to have clear 2-dimensional circular gaussian distributions with their diameters, divergence angles and maximum waist distances agreeing well with their estimated values. An interferometer, which adopts a ball lens both as a collimator and a reflector, were evaluated to have uniform sensitivities against distances from several 10 mm to around 1000 mm, and tolerances against the target offsets of more than ±0.5 mm for the direction perpendicular to the measurement direction. These results show that the ball lens can be adopted for our alignment monitor both as a collimator and a reflector.
- Published
- 2021
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