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Abstract In this study, a 3 × 3 blue micro-LED array with a pixel size of 10 × 10 μm2 and a pitch of 15 μm was fabricated on an epilayer grown on a sapphire substrate using metalorganic chemical vapor deposition technology. The fabrication process involved photolithography, wet and dry etching, E-beam evaporation, and ion implantation technology. Arsenic multi-energy implantation was utilized to replace the mesa etching for electrical isolation, where the implantation depth increased with the average energy. Different ion depth profiles had varying effects on electrical properties, such as forward current and leakage currents, potentially causing damage to the n-GaN layer and increasing the series resistance of the LEDs. As the implantation depth increased, the light output power and peak external quantum efficiency of the LEDs also increased, improving from 5.33 to 9.82%. However, the efficiency droop also increased from 46.3 to 48.6%.

The fabrication of InGaN-based blue 4✕4 array micro-LEDs (μLEDs) with 40 μm ✕40 μm chip size and 2✕2 array μLEDs with 80 μm ✕80 μm chip size etching by the inductive coupled plasma reactive ion etching (ICPRIE) and defect-free neutral beam etching (NBE) processes was studied in this work. In μLEDs of this size, the influence of defects formation in the sidewalls on EQE was evaluated. There was almost no difference in EQE between μLEDs array etched by the NBE process no matter 40 μm ✕40 μm and 80 μm ✕80 μm, but the dependence was observed in the ICPRIE. Even with this size, it was found that the size effect of EQE is smaller than that in case of using ICPRIE for defect-free neutral beam etching. This impact is substantial since μLED predominantly operated at low current density, around 1–5 A/cm2. Consequently, the reduction of defect density, encompassing both internal and sidewall defects, becomes imperative even in 40–80 μm InGaN-based μLEDs. This not only improves the overall efficiency of μLEDs but also fortifies the brightness stability of μLED displays if process etching by NBE. It was also found that the etching shape had an influence on EQE. It could be attributed to fact that the etching profile angle of NBE was more vertical than that of ICPRIE. Because the different angles of the mesa resulted in different light intensity. The μLEDs emitting with a wavelength of 450 nm, the light extraction efficiency and intensity at a mesa angle 58° of NBE etching μLEDs was about 8% lower than those of an angle (38°) of ICPRIE etching μLEDs by simulation.

Abstract In this study, the effect of ITO contact ratio for blue light micro-light-emitting diode (µLED) with dimensions 40 μm × 40 μm was assessed. The contact ratio from 0.2 to 0.8 was designed for the ratio of electrode area to light-emitting area. As the contact ratio increased from 0.2 to 0.8, the turn-on voltage of µLED decreased. It could be due to the short lateral diffusion length in multiple quantum wells (MQW) and lower parallel resistance for the µLED with a large contact ratio. The leakage currents of single µLED were below 5.1 × 10–9 A, no matter the contact ratio. It means that the contact ratio does not affect the leakage current as measured on single chip. Moreover, µLED array with a 0.8 contact ratio presented the highest output power than other samples (5.25 mW as the current density of 1875 A/cm2). It could attribute to the MQWs usage, the metal contact reflective behavior and less current crowding, which generated more carriers and extracted more lighting from the µLED. The simulation data using SpeCLED software agreed well with these experiments, and µLED with a 0.8 contact ratio showed the best optoelectronic properties.

An omnidirectional reflector (ODR) consisted of (MgF2)/Ag was employed in AlGaInP-based vertical red light-emitting diodes (LEDs) in order to increase the light extraction hence the wall-plug efficiency. In this structure, the dielectric MgF2 layer with low refractive index acted as current blocking and reflection enhancing layer. The cylindrical AuZn alloy micro-contacts perforated through the MgF2 layer and played roles in current spreading and injection. The area ratio of AuZn micro-contacts was optimized to improve the performance of the LED. The results indicated that increasing the area ratio of micro-contacts led to the improvement of current injection uniformity and reduction of forward voltage especially at higher injection current, but at the expense of light extraction by reducing reflection. After optimized, the best performance of red-light LEDs can be obtained with 3% area ratio of micro-contacts.

Abstract We report response of photoluminescence (PL) from GaN nanowires without protection in solutions. The distinct response is not only toward pH but toward ionic concentration under same pH. The nanowires appear to be highly stable under aqueous solution with high ionic concentration and low pH value down to 1. We show that the PL has a reversible interaction with various types of acidic and salt solutions. The quantum states of nanowires are exposed to the external environment and have a direct physical interaction which depends on the anions of the acids. As the ionic concentration increases, the PL intensity goes up or down depending on the chemical species. The response results from a competition of change in surface band bending and charge transfer to redox level in solution. That of GaN films is reported for comparison as the effect of surface band bending can be neglected so that there are only slight variations in PL intensity for GaN films. Additionally, such physical interaction does not impact on the PL peaks in acids and salts, whereas there is a red shift on PL when the nanowires are in basic solution, say NH4OH, due to chemical etching occurred on the nanowires.

Developing ultraflexible sensors using metal oxides is challenging due to the high-temperature annealing step in the fabrication process. Here, we demonstrate the ultraflexible relative humidity (RH) sensor on food plastic wrap by using 808 nm near-infrared (NIR) laser annealing for 1 min at a low temperature (26.2–40.8 °C). The wettability of plastic wraps coated with sol-gel solution is modulated to obtain uniform films. The surface morphology, local temperature, and electrical properties of the SnO2 resistor under NIR laser irradiation with a power of 16, 33, and 84 W/cm2 are investigated. The optimal device can detect wide-range RH from 15% to 70% with small incremental changes (0.1–2.2%). X-ray photoelectron spectroscopy reveals the relation between the surface binding condition and sensing response. Finally, the proposed sensor is attached onto the face mask to analyze the real-time human breath pattern in slow, normal, and fast modes, showing potential in wearable electronics or respiration monitoring.

Bio-inspired materials have received significant interest in the development of flexible electronics due to their natural grid structures, especially natural leaf vein networks. In this work, a bio-inspired leaf vein-based flexible humidity sensor is demonstrated. The proposed sensor is composed of a leaf/Al/glycerin/Ag paste. The Al-deposited leaf vein networks are used as a bottom electrode with a resistance of around 100 Ω. The humidity sensor responds well to relative humidity (RH) levels ranging from 15% to 70% at room temperature. The fabricated humidity sensor exhibits an ultra-sensitive response to different humidity conditions due to the biodegradable insulating hygroscopic polymer (glycerin), specifically the ionic conductivity reaction. To further verify the presence of ionic conduction, the device performance is tested by doping NaCl salt into the hygroscopic polymer sensing layer. In addition, both the repeatability and flexibility of the sensor are tested under different bending angles (0°, 90°, 180°, and 360°). The bioinspired ultrasensitive humidity sensor with a biocompatible and biodegradable sensing layer holds great potential, especially for health care applications (e.g., respiratory monitoring) without causing any body harm.

Nitric oxide (NO) is a toxic gas, which is dangerous for human health and causes many respiratory infections, poisoning, and lung damage. In this work, we have successfully grown ZnO nanorod film on annealed ZnO seed layer in different ambient temperatures, and the morphology of the nanorods sensing layer that affects the gas sensing response to nitric oxide (NO) gas were investigated. To acknowledge the effect of annealing treatment, the devices were fabricated with annealed seed layers in air and argon ambient at 300 °C and 500 °C for 1 h. To simulate a vertical device structure, a silver nanowire electrode covered in ZnO nanorod film was placed onto the hydrothermal grown ZnO nanorod film. We found that annealing treatment changes the seed layer’s grain size and defect concentration and is responsible for this phenomenon. The I–V and gas sensing characteristics were dependent on the oxygen defects concentration and porosity of nanorods to react with the target gas. The resulting as-deposited ZnO seed layer shows better sensing response than that annealed in an air and argon environment due to the nanorod morphology and variation in oxygen defect concentration. At room temperature, the devices show good sensing response to NO concentration of 10 ppb and up to 100 ppb. Shortly, these results can be beneficial in the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.

Organic photo-detector (OPD) is lightweight and physically flexible. It can transform plastic or glass into smart surfaces. Visible light communication (VLC) is considered as one of the promising technologies for the future wireless communications. VLC combines the advantages of lighting and communication simultaneously. Besides, it can be deployed using existing lighting infrastructure; hence little extra cost is needed to provide this wireless communication. As the OPD has a large optical detection area, it would be interesting to employ the OPD as VLC receiver (Rx). If the OPD can be used in the VLC systems, it can benefit the Internet-of-Thing (IoT) networks by providing efficient human-to-machine and machine-to-machine communications. However, implementing VLC using OPD Rx is challenging. Due to the slow charging and discharging processes of the OPD, the optical-to-electrical response speed is limited. Besides, the OPD requires external bias to be operated. Here, we propose and demonstrate using pre-distortion scheme for pulse-amplitude-modulation (PAM) signal to a self-powered PCBM:P3HT OPD to enhance the VLC transmission performance. The operation of the self-powered PCBM:P3HT OPD is discussed. Both experiments using PAM-2 and PAM-4 (with and without pre-distortion) are evaluated. The performance, requirement and capability limitations of the pre-distortion schemes are also analyzed and discussed by using numerical simulations.

In this research work, the gas sensing properties of halogenated chloroaluminum phthalocyanine (ClAlPc) thin films were studied at room temperature. We fabricated an air-stable ClAlPc gas sensor based on a vertical organic diode (VOD) with a porous top electrode by the solution process method. The surface morphology of the solution-processed ClAlPc thin film was examined by field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). The proposed ClAlPc-based VOD sensor can detect ammonia (NH3) gas at the ppb level (100~1000 ppb) at room temperature. Additionally, the ClAlPc sensor was highly selective towards NH3 gas compared to other interfering gases (NO2, ACE, NO, H2S, and CO). In addition, the device lifetime was tested by storing the device at ambient conditions. The effect of relative humidity (RH) on the ClAlPc NH3 gas sensor was also explored. The aim of this study is to extend these findings on halogenated phthalocyanine-based materials to practical electronic nose applications in the future.

Chronic kidney disease (CKD) is a public health problem and its prevalence has increased worldwide; patients are commonly unaware of the condition. The present study aimed to investigate whether exhaled breath ammonia via vertical-channel organic semiconductor (V-OSC) sensor measurement could be used for rapid CKD screening. We enrolled 121 CKD stage 1–5 patients, including 19 stage 1 patients, 26 stage 2 patients, 38 stage 3 patients, 21 stage 4 patients, and 17 stage 5 patients, from July 2019 to January 2020. Demographic and laboratory data were recorded. The exhaled ammonia was collected and rapidly measured by the V-OSC sensor to correlate with kidney function. Results showed no significant difference in age, sex, body weight, hemoglobin, albumin level, and comorbidities in different CKD stage patients. Correlation analysis demonstrated a good correlation between breath ammonia and blood urea nitrogen levels, serum creatinine levels, and estimated glomerular filtration rate (eGFR). Breath ammonia concentration was significantly elevated with increased CKD stage compared with the previous stage (CKD stage 1/2/3/4/5: 636 ± 94; 1020 ± 120; 1943 ± 326; 4421 ± 1042; 12781 ± 1807 ppb, p < 0.05). The receiver operating characteristic curve analysis showed an area under the curve (AUC) of 0.835 (p < 0.0001) for distinguishing CKD stage 1 from other CKD stages at 974 ppb (sensitivity, 69%; specificity, 95%). The AUC was 0.831 (p < 0.0001) for distinguishing between patients with/without eGFR < 60 mL/min/1.73 m2 (cutoff 1187 ppb: sensitivity, 71%; specificity, 78%). At 886 ppb, the sensitivity increased to 80% but the specificity decreased to 69%. This value is suitable for kidney function screening. Breath ammonia detection with V-OSC is a real time, inexpensive, and easy to administer measurement device for screening CKD with reliable diagnostic accuracy.

A NO sensing tip is made by inserting two parallel optical fibers inside a poly 2-hydroxyethyl methacrylate (PolyHEMA) hydrogel waveguide mixed with the probe molecule 1, 2-Diaminoanthraquinone (DAQ). There is a length difference of 1 mm between the two fibers, and the light has to propagate through the difference from the short fiber to the long fiber. The total cross section area of the active hydrogel waveguide embedded with the fibers is only 3mm x 1.2 mm. For practical use the tip is housed in a needle for mechanical protection and the sensing tip is able to detect aqueous NO concentration around 1 μM with time resolution about 5 minutes. Such a sensing tip can be used to monitor the medical conditions inside the brain after a stroke or a brain injury.

In this study, we investigate the keys to obtain a sensitive ammonia sensor with high air stability by using a low-cost polythiophene diode with a vertical channel and a porous top electrode. Poly(3-hexylthiophene) (P3HT) and air-stable poly(5,5'-bis(3-dodecyl-2-thienyl)-2,2'-bithiophene) (PQT-12) are both evaluated as the active sensing layer. Two-dimensional current simulation reveals that the proposed device exhibits numerous connected vertical nanometer junctions (VNJ). Due to the de-doping reaction between ammonia molecules and the bulk current flowing through the vertical channel, both PQT-12 and P3HT VNJ-diodes exhibit detection limits of 50-ppb ammonia. The P3HT VNJ-diode, however, becomes unstable after being stored in air for two days. On the contrary, the PQT-12 VNJ-diode keeps an almost unchanged response to 50-ppb ammonia after being stored in air for 25 days. The improved storage lifetime of an organic-semiconductor-based gas sensor in air is successfully demonstrated.

The inverted organic solar cell was fabricated by using sol-gel indium-gallium-zinc-oxide (IGZO) as the electron-transport layer. The IGZO precursor solution was deposited by blade coating with simultaneous substrate heating at 120 °C from the bottom and hot wind from above. Uniform IGZO film of around 30 nm was formed after annealing at 400 °C. Using the blend of low band-gap polymer poly[(4,8-bis-(2-ethylhexyloxy)-benzo(1,2-b:4,5-b’)dithiophene)-2,6-diyl-alt- (4-(2-ethylhexanoyl)-thieno [3,4-b]thiophene-)-2-6-diyl)] (PBDTTT-C-T) and [6,6]-Phenyl C71 butyric acid methyl ester ([70]PCBM) as the active layer for the inverted organic solar cell, an efficiency of 6.2% was achieved with a blade speed of 180 mm/s for the IGZO. The efficiency of the inverted organic solar cells was found to depend on the coating speed of the IGZO films, which was attributed to the change in the concentration of surface OH groups. Compared to organic solar cells of conventional structure using PBDTTT-C-T: [70]PCBM as active layer, the inverted organic solar cells showed significant improvement in thermal stability. In addition, the chemical composition, as well as the work function of the IGZO film at the surface and inside can be tuned by the blade speed, which may find applications in other areas like thin-film transistors.

We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS) chip and organic optoelectronic components capable of measuring the heart and respiration rate on humans. The MEMS sensor relies on the inertial deflection of a small silicon oscillator. The readout of the deflection is optical and works via modulation of the light flux passing through the MEMS. Organic optoelectronics are used as light source and detector, since these offer a homogeneous light distribution and a more compact package in a future integration. Two types of MEMS, differing in their resonance frequency, were designed and characterised in combination with both organic and inorganic optoelectronics prior to measuring heart and respiration rate. Subsequently, by measurements on the neck, pulse and respiration rate were successfully measured.

A contact coating method is developed to cover the nano-channels with 100 nm or 200 nm diameter and 400 nm depth with a poly(4-vinylphenol) (PVP). In such coating the nano-channels faces downwards and its vertical position is controlled by a motor. The surface is first lowered to be in immediate contact with the polyvinylpyrrolidone (PVPY) water solution with concentration from 1 to 5 wt%, then pulled at the speed of 0.004 to 0.4 mm/s. By tuning the pulling speed and concentration we can realize conformal, filled, top-only, as well as floating film morphology. For a reproducible liquid detachment from the solid, the sample has a small tilt angle of 3 degree. Contact coating is used to cover the Al grid base of the vertical space-charge-limited transistor with PVPY. Poly(3-hexylthiophene-2,5-diyl) (P3HT) as the semiconductor. The transistor breakdown voltage is raised due to base coverage achieved by contact coating.

A solvent soaking and rinsing method, in which the solvent was allowed to soak all over the surface followed by a spinning for solvent draining, was found to produce perovskite layers with high uniformity on a centimeter scale and with much improved reliability. Besides the enhanced crystallinity and surface morphology due to the rinsing induced surface precipitation that constrains the grain growth underneath in the precursor films, large-area uniformity with film thickness determined exclusively by the rotational speed of rinsing spinning for solvent draining was observed. With chloroform as rinsing solvent, highly uniform and mirror-like perovskite layers of area as large as 8 cm × 8 cm were produced and highly uniform planar perovskite solar cells with power conversion efficiency of 10.6 ± 0.2% as well as much prolonged lifetime were obtained. The high uniformity and reliability observed with this solvent soaking and rinsing method were ascribed to the low viscosity of chloroform as well as its feasibility of mixing with the solvent used in the precursor solution. Moreover, since the surface precipitation forms before the solvent draining, this solvent soaking and rinsing method may be adapted to spinless process and be compatible with large-area and continuous production. With the large-area uniformity and reliability for the resultant perovskite layers, this chloroform soaking and rinsing approach may thus be promising for the mass production and commercialization of large-area perovskite solar cells.