1. Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale
- Author
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Jayatilleka, Hasitha, Frish, Harel, Kumar, Ranjeet, Heck, John, Ma, Chaoxuan, Sakib, Meer, Huang, Duanni, and Rong, Haisheng
- Subjects
Physics - Applied Physics ,Physics - Optics - Abstract
Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, and sensing applications. However, the high sensitivity to fabrication variations has limited their volume manufacturability and commercial adoption. Here, we report a low-cost post-fabrication trimming method to tune the resonance wavelength of a silicon ring resonator and correct for fabrication variations at wafer-scale. We use a Ge implant to create an index trimmable section in the ring resonator and an on-chip heater to apply a precise and localized thermal annealing to tune and set its resonance to a desired wavelength. We demonstrate resonance wavelength trimming of ring resonators fabricated across a 300 mm silicon-on-insulator (SOI) wafer to within +/-32 pm of a target wavelength of 1310 nm, providing a viable path to high-volume manufacturing and opening up new practical applications for these devices., Comment: 6 Pages, 5 figures. Accepted for publication in Journal of Lightwave Technology, 03 May 2021
- Published
- 2022
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