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Orthoplanar springs are single-component compliant mechanisms that can be fabricated from sheet material and undergo deflection orthogonal to the plane of the mechanism. They are useful in applications where spatial constraints are significant. An Euler spiral is a curve whose curvature is linearly proportional to the arc length allowing for the curve to assume a flat position under a load. In this work, orthoplanar spring and Euler-spiral concepts are synthesized to create a single-component spring mechanism that lies flat under a load. Where traditional planar springs under a load will take on an out-of-plane contour, the Euler-spiral orthoplanar spring lies completely flat under a load. The relationship between the load needed to flatten the orthoplanar Euler-spiral spring and its physical geometry is examined. A use case where the Euler-spiral orthoplanar spring is utilized as a deployment mechanism for a mid-flight emerging antenna on the surface of a flight body is presented. [ABSTRACT FROM AUTHOR]

We present a new technique for fabricating compliant mechanisms from stamped metal sheets. The concept works by providing thinned segments to allow rotation of flexural beams 90 deg about their long axis, effectively providing a flexure as wide as the sheet's thickness. The method is demonstrated with the design and fabrication of a metal bistable mechanism for use as a threshold accelerometer. A new model based on elliptic integral solutions is presented for bistable mechanisms incorporating long, thin flexures. The resulting metal bistable mechanisms are tested for acceleration threshold sensing using a drop test and a vibration test. The mechanisms demonstrate very little variation due to stress relaxation or temperature effects. The force-displacement behavior of a mechanism is also measured. The mechanisms' switching force is less than the designed value because of out-of-plane motion and dynamic effects. [DOI: 10.1115/1.4001876]

This paper presents the robust design optimization of an RF-MEMS direct contact cantilever switch for minimum actuation voltage and opening time, and maximum power handling capability. The design variables are the length and thickness of the entire cantilever, the widths of the sections of the cantilever, and the dimple size. The actuation voltage is obtained using a 3-D structural-electrostatic finite-element method (FEM) model, and the opening time is obtained using the same FEM model and the experimental model of adhesion at the contact surfaces developed in our previous work. The model accounts for an unpredictable variance in the contact resistance resulting from the micromachining process for the estimation of the power handling. This is achieved by taking the ratio of the root mean square power of the RF current ('signal') passing through the switch to the contact temperature ('noise') resulting from the possible range of the contact resistance. The resulting robust optimization problem is solved using a Strength Pareto Evolutionary Algorithm, to obtain design alternatives exhibiting different tradeoffs among the three objectives. The results show that there exists substantial room for improved designs of RF-MEMS direct-contact switches. It also provides a better understanding of the key factors contributing to the performances of RF-MEMS switches. Most importantly, it provides guidance for further improvements of RF-MEMS switches that exploit complex multiphysics phenomena. Index Terms--Contact physics, radio-frequency-microelectromechanical-systems (RF-MEMS) switches, robust design.

This paper presents an alternative to fabrication methods commonly used in compliant mechanisms research, resulting in a new class of compliant mechanisms called wireform mechanisms. This technique integrates torsional springs made of formed wire into compliant mechanisms. In this way the desired force, stiffness, and motion can be achieved from a single piece of formed wire. Two techniques of integrating torsion springs are fabricated and modeled: helical coil torsion springs and torsion bars. Because the mechanisms are more complex than ordinary springs, simplified models, which aid in design, are presented, which represent the wireform mechanisms as rigid-body mechanisms using the pseudo-rigid-body model. The method is demonstrated through the design of a mechanically tristable mechanism. The validity of the simplified models is discussed by comparison to finite element models and, in the case of the torsion-bar mechanism, to experimental measurements. [DOI: 10.1115/1.2991132]

Many applications in microelectromechanical systems require physical actuation for implementation or operation. On-chip sensors would allow control of these actuators. This paper presents experimental evidence showing that a certain class of thermal actuators can be used simultaneously as an actuator and a sensor to control the actuator's force or displacement output. By measuring the current and voltage supplied to the actuator, a one-to-one correspondence is found between a given voltage and current and a measured displacement or force. This integrated sensor/actuator combination ,viii lead to efficient on-chip control of motion for applications including microsurgery, biological cell handling, and optic positioning. [2007-0299] Index Terms--Microelectromechanical system (MEMS), piezo-resistance, thermal actuator.

This paper proposes a model for predicting the piezoresistive effect in microflexures experiencing bending stresses. Linear models have long existed for describing piezoresistivity for members in pure tension and compression. However, extensions of linear models to more complex loading conditions do not match with experimental results. A second-order model to predict piezoresistive effects in tension, compression, and more complex loading conditions is proposed. A reduced form of the general second-order model is presented for thin flexures in bending. A three-step approach is used to determine the piezoresistive coefficients for this reduced-form model. The approach is demonstrated for two sets of n-type polysilicon. The predictive ability of the model is investigated by comparing the results to the experimental results using the new piezoresistive model and coefficients. One of the ways to implement the model is with multiphysics finite element analysis (FEA). The piezoresistive FEA for flexures algorithm is a FEA implementation of the unidirectional form of the model for flexures. The results presented in this paper are for the simplified cases of long thin flexures experiencing bending and axial loads. This new model could contribute to optimized sensors and feedback control of microdevices, nanopositioning, and self-sensing microdevices. [2007-0052] Index Terms--Finite element methods, microelectromechanical devices, microsensors, modeling, piezoresistance, piezoresistive devices.

Air-suspension of transmission-line structures using microelectromechanical systems (MEMS) technology provides the effective means to suppress substrate losses for radio-frequency (RF) signals. However, heating of these lines augmented by skin effects can be a major concern for RF MEMS reliability. To understand this phenomenon, a thermal energy transport model is developed in a simple analytical form. The model accounts for skin effects that cause Joule heating to be localized near the surface of the RF transmission line. Here, the model is validated through experimental data by measuring the temperature rise in an air-suspended MEMS coplanar waveguide (CPW). For this measurement, a new experimental methodology is also developed allowing direct current (dc) electrical resistance thermometry to be adopted in an RF setup. The modeling and experimental work presented in this paper allow us to provide design rules for preventing thermal and structural failures unique to the RF operation of suspended MEMS transmission-line components. For example, increasing the thickness from 1 to 3 [micro]m for a typical transmission line design enhances power handling from 5 to 125 W at 20 GHz, 3.3 to 80 W at 50 GHz, and 2.3 to 56 W at 100 GHz (a 25-fold increase in RF power handling). Index Terms--Coplanar waveguides (CPWs), failure analysis, microelectromechanical devices, skin effect, transmission lines.

This paper explores contact heating in microelectromechanical systems (MEMS) switches with contact spot sizes less than 100 nm in diameter. Experiments are conducted to demonstrate that contact heating causes a drop in contact resistance. However, existing theory is shown to over-predict heating for MEMS switch contacts because it does not consider ballistic transport of electrons in the contact. Therefore, we extend the theory and develop a predictive model that shows excellent agreement with the experimental results. It is also observed that mechanical cycling causes an increase in contact resistance. We identify this effect as related to the build-up of an insulating film and demonstrate operational conditions to prevent an increase in contact resistance. The improved understanding of contact behavior gained through our modeling and experiments allows switch performance to be improved. [1424] Index Terms--Electrical contacts, microelectromechanical systems (MEMS), switches.

Bistable mechanical devices remain stable in two distinct positions without power input. They find application in valves, switches, closures, and clasps. Mechanically bistable behavior results from the storage and release of energy, typically in springs, with stable positions occurring at local minima of stored energy. Compliant mechanisms offer an elegant way to achieve this behavior by incorporating both motion and energy storage into the same flexible element. Interest in compliant bistable mechanisms has also recently increased because of the advantages of bistable behavior in many micro-electromechanical systems (MEMS). Design of compliant or rigid-body bistable mechanisms typically requires simultaneous consideration of both energy storage and motion requirements. This paper simplifies this process by developing theory that provides prior knowledge of mechanism configurations that guarantee bistable behavior. Configurations which include one or more translational, or slider, joints are studied in this work. Several different mechanism types are analyzed to determine compliant segment placement that will ensure bistable mechanism operation. Examples demonstrate the power of the theory in design. [DOI: 10.1115/1.1760776]

Bistable mechanisms, which have two stable equilibria within their range of motion, are important parts of a wide variety of systems, such as closures, valves, switches, and clasps. Compliant bistable mechanisms present design challenges because the mechanism's energy storage and motion characteristics are strongly coupled and must be considered simultaneously. This paper studies compliant bistable mechanisms which may be modeled as four-link mechanisms with a torsional spring at one joint. Theory is developed to predict compliant and rigid-body mechanism configurations which guarantee bistable behavior. With this knowledge, designers can largely uncouple the motion and energy storage requirements of a bistable mechanism design problem. Examples demonstrate the power of the theory in bistable mechanism design. [DOI: 10.1115/1.1625399]

Electrostatic comb drives are widely used in microelectromechanical devices. These comb drives often employ rectangular fingers which produce a stable, constant force output as they engage. This paper explores the use of shapes other than the common rectangular fingers. Such shaped comb fingers allow customized force-displacement response for a variety of applications. In order to simplify analysis and design of shaped fingers, a simple model is developed to predict the force generated by shaped comb fingers. This model is tested using numerical simulation on several different sample shaped comb designs. Finally, the model is further tested, and the use of shaped comb fingers is demonstrated, through the design, fabrication, and testing of tunable resonators which allow both up and down shifts of the resonant frequency. The simulation and testing results demonstrate the usefulness and accuracy of the simple model. Finally, other applications for shaped comb fingers are described, including tunable sensors, low-voltage actuators, multistable actuators, or actuators with linear voltage-displacement behavior. [879] Index Terms--Tunable resonators, variable gap electrodes.

Periprosthetic joint infection (PJI) is a devastating complication of orthopedic implant surgeries, such as total knee and hip arthroplasties. Treatment requires additional surgeries because antibiotics have limited efficacy due to biofilm formation and resistant bacterial strains such as methicillin‐resistant Staphylococcus aureus (MRSA). A non‐pharmaceutical approach is needed, and examples of this are found in nature; dragonfly and cicada wings are antibacterial because of their nanopillar surface structure rather than their chemistry. Carbon‐infiltrated carbon nanotube (CICNT) surfaces exhibit a similar nanopillar structure, and have been shown to facilitate osseointegration, and it is postulated that they might provide a structurally‐derived resistance to bacterial proliferation and biofilm formation. The objective of this study was to test the biofilm resistance of CICNT coatings. Two types of CICNT were produced: a vertically aligned CNT forest on a silicon substrate using a layer of iron as the catalyst (CICNT‐Si) and a random‐oriented CNT forest on stainless steel (SS) substrate using the substrate as the catalyst (CICNT‐SS). These were tested against SS and carbon controls. After 48 h in an MRSA biofilm reactor, samples demonstrated that both types of CICNT coatings significantly (p < 0.0001) reduced MRSA biofilm formation by 60%–80%. Morphologically, biofilm presence on both types of CICNT was also significantly reduced. Clinical Significance: Results suggest that a CICNT surface modification could be suitable and advantageous for medical devices susceptible to MRSA cell attachment and biofilm proliferation, particularly orthopedic implants. [ABSTRACT FROM AUTHOR]

We propose a technique to measure the opening time for micromachined switches and present substantial experimental data for switches with gold-gold contacts. The data demonstrate that contact opening time increases dramatically as apparent contact area increases or as pull-apart force or contact resistance decreases. A model of opening time is also presented with model parameters that fit the experimental data. Moreover, we show that transient mechanical vibrations can play an important role in reducing switch opening time. [ABSTRACT FROM AUTHOR]

The pseudo-rigid-body model concept allows compliant mechanisms to be analyzed using well-known rigid-body kinematics. This paper presents a pseudo-rigid-body model for initially curved pinned-pinned segments that undergo large, nonlinear deflections. The model approximates the segment as three rigid members joined by pin joints. Torsional springs placed at the joints model the segment's stiffness. This model has been validated by fabricating several such segments from a variety of different materials. Testing of the force-deflection behavior of these segments verified the accuracy of the model.