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15 results on '"Ji, Zhangbin"'

9. Flexible and wearable acoustic wave technologies

Author

Zhou, Jian, primary, Guo, Yihao, additional, Wang, Yong, additional, Ji, Zhangbin, additional, Zhang, Qian, additional, Zhuo, Fenglin, additional, Luo, Jingting, additional, Tao, Ran, additional, Xie, Jin, additional, Reboud, Julien, additional, McHale, Glen, additional, Dong, Shurong, additional, Luo, Jikui, additional, Duan, Huigao, additional, and Fu, Yongqing, additional

Published
2023
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14. Three-Dimensional Simulation Platform for Optimal Designs of the MEMS Microphone

Author

Cai, Jianbing, Zhou, Jian, Ji, Zhangbin, Tan, Kaitao, Liu, Yi, and Fu, Yong Qing

Subjects
F300, Materials Science (miscellaneous), F200
Abstract

MEMS microphone has a wide range of application prospects in electronic devices such as mobile phones, headphones, and hearing aids due to its small size, low cost, and reliable performance. Research and development of MEMS microphones involves multiple thermo-electro-mechanical couplings among various physical and electrical fields. Unfortunately, there is not an accurate three-dimensional (3D) MEMS microphone simulation platform, which can be applied for the design of chip parameters and packaging characteristics. Herein, based on commercial COMSOL software, we have established a 3D simulation platform for MEMS microphones, which is used to systematically study the influences of geometric structure and physics parameters on the sensitivity and frequency responses of the microphone and consider the influences of packaging characteristics on the performance of the microphone. The simulation results are consistent with those obtained using a lumped element method, which proves the accuracy of the simulation platform. The platform can be used to design and explore new principles or mechanisms of MEMS microphone devices.

Published
2022

15. 5.7 GHz Ultrasensitive Shear Horizontal-Surface Acoustic Wave Humidity Sensor Based on LiNbO 3 /SiO 2 /SiC Heterostructures with a Sensitive Layer of Polyethyleneimine-SiO 2 Nanocomposites.

Author

Liu Y, Zhou J, Ji Z, Zhuo F, Wen S, Chen Y, Fu Y, and Duan H

Abstract

Humidity sensing and water molecule monitoring have become hot research topics attributed to their potential applications in monitoring breathing/physiological conditions of humans, air conditioning in greenhouses, and soil moisture in agriculture. However, there is a huge challenge for highly sensitive and precision humidity detection with wireless and fast responsive capabilities. In this work, a hybrid/synergistic strategy was proposed using a LiNbO 3 /SiO 2 /SiC heterostructure to generate shear-horizontal (SH) surface acoustic waves (SAWs) and using a nanocomposite of polyethylenimine-silicon dioxide nanoparticles (PEI-SiO 2 NPs) to form a sensitive layer, thus achieving an ultrahigh sensitivity of SAW humidity sensors. Ultrahigh frequencies (1∼15 GHz) of SAW devices were obtained on a high-velocity heterostructure of LiNbO 3 /SiO 2 /SiC. Among the multimodal wave modes, we selected SH waves for humidity sensing and achieved a high mass-sensitivity of 5383 MHz · mm 2 · μg -1 . With the PEI-SiO 2 NP composite as the sensitive layer, an ultrahigh sensitivity of 2.02 MHz/% RH was obtained, which is two orders of magnitude higher than those of the conventional SAW humidity sensors (∼202.5 MHz frequency) within a humidity range of 20-80% RH.

Published
2023
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