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Abstract Flexible, compact, lightweight and sustainable power sources are indispensable for modern wearable and personal electronics and small-unmanned aerial vehicles (UAVs). Hierarchical honeycomb has the unique merits of compact mesostructures, excellent energy absorption properties and considerable weight to strength ratios. Herein, a honeycomb-inspired triboelectric nanogenerator (h-TENG) is proposed for biomechanical and UAV morphing wing energy harvesting based on contact triboelectrification wavy surface of cellular honeycomb structure. The wavy surface comprises a multilayered thin film structure (combining polyethylene terephthalate, silver nanowires and fluorinated ethylene propylene) fabricated through high-temperature thermoplastic molding and wafer-level bonding process. With superior synchronization of large amounts of energy generation units with honeycomb cells, the manufactured h-TENG prototype produces the maximum instantaneous open-circuit voltage, short-circuit current and output power of 1207 V, 68.5 μA and 12.4 mW, respectively, corresponding to a remarkable peak power density of 0.275 mW cm−3 (or 2.48 mW g−1) under hand pressing excitations. Attributed to the excellent elastic property of self-rebounding honeycomb structure, the flexible and transparent h-TENG can be easily pressed, bent and integrated into shoes for real-time insole plantar pressure mapping. The lightweight and compact h-TENG is further installed into a morphing wing of small UAVs for efficiently converting the flapping energy of ailerons into electricity for the first time. This research demonstrates this new conceptualizing single h-TENG device's versatility and viability for broad-range real-world application scenarios.

High-performance tracking trace amounts of NO2 with gas sensors could be helpful in protecting human health since high levels of NO2 may increase the risk of developing acute exacerbation of chronic obstructive pulmonary disease. Among various gas sensors, Graphene-based sensors have attracted broad attention due to their sensitivity, particularly with the addition of noble metals (e.g., Ag). Nevertheless, the internal mechanism of improving the gas sensing behavior through doping Ag is still unclear. Herein, the impact of Ag doping on the sensing properties of Graphene-based sensors is systematically analyzed via first principles. Based on the density-functional theory (DFT), the adsorption behavior of specific gases (NO2, NH3, H2O, CO2, CH4, and C2H6) on Ag-doped Graphene (Ag–Gr) is calculated and compared. It is found that NO2 shows the strongest interaction and largest Mulliken charge transfer to Ag–Gr among these studied gases, which may directly result in the highest sensitivity toward NO2 for the Ag–Gr-based gas sensor.

Localization of a needle tip is important for biopsy examinations in clinics. However, the needle tip is sometimes difficult to discern under the guidance of sonography due to its poor visibility. A mini actuator that radiates a low-intensity ultrasound wave was manufactured using micro-electro-mechanical system (MEMS) technology. Interference between the radiated and diagnostic ultrasound pulses was observed as bright lines in the B-mode ultrasound image, from which the mini actuator could be recognized with ease. Because the distance between the mini actuator and the needle tip is fixed, the needle tip can be determined despite its inconsistent appearance in the sonography. Both gel phantom and ex vivo tissue evaluation showed that the needle tip can be determined reliably utilizing the acoustic interference pattern.

Sensor performance of a dielectric filled silicon bulk acoustic resonator type label-free biosensor is verified with biotin-streptavidin binding interactions as a model system. The mass sensor is a micromachined silicon square plate with a dielectric filled capacitive excitation mechanism. The resonance frequency of the biotin modified resonator decreased 315 ppm when exposed to streptavidin solution for 15 min with a concentration of 10−7 M, corresponding to an added mass of 3.43 ng on the resonator surface. An additional control is added by exposing a bovine serum albumin (BSA)-covered device to streptavidin in the absence of the attached biotin. No resonance frequency shift was observed in the control experiment, which confirms the specificity of the detection. The sensor-to-sensor variability is also measured to be 4.3%. Consequently, the developed sensor can be used to observe in biotin-streptavidin interaction without the use of labelling or molecular tags. In addition, biosensor can be used in a variety of different immunoassay tests.

Flexible, self-powered and miniaturized sensors are extensively used in the areas of sports, soft robotics, health care and communication devices. Measurement of vibration is important for determining the mechanical properties of a structure, specifically the string tension in strings. In this work, a flexible, lightweight and self-powered sensor is developed and attached to a string to measure vibrations characteristics in strings. Electrospun poly(vinylidene) fluoride (PVDF) nanofibers are deposited on a flexible liquid crystal polymer (LCP) substrate for the development of the sensor. The electrospinning process is optimized for different needle sizes (0.34−0.84 mm) and flow rates (0.6−3 mL/h). The characterization of the sensor is done in a cantilever configuration and the test results indicate the sensor’s capability to measure the frequency and strain in the required range. The comparison of the results from the developed PVDF sensor and a commercial Laser Displacement Sensor (LDS) showed good resemblance (±0.2%) and a linear voltage profile (0.2 mV/με). The sensor, upon attachment to a racket string, is able to measure single impacts and sinusoidal vibrations. The repeatability of the results on the measurement of vibrations produced by an impact hammer and a mini shaker demonstrate an exciting new application for piezoelectric sensors.

This paper presents a new sensor based on a radial field bulk piezoelectric diaphragm to provide energy-efficient and high-performance situational sensing for autonomous underwater vehicles (AUVs). This sensor is self-powered, does not need an external power supply, and works efficiently in d33 mode by using inter-circulating electrodes to release the radial in-plane poling. Finite element analysis was conducted to estimate the sensor behavior. Sensor prototypes were fabricated by microfabrication technology. The dynamic behaviors of the piezoelectric diaphragm were examined by the impedance spectrum. By imitating the underwater disturbance and generating the oscillatory flow velocities with a vibrating sphere, the performance of the sensor in detecting the oscillatory flow was tested. Experimental results show that the sensitivity of the sensor is up to 1.16 mV/(mm/s), and the detectable oscillatory flow velocity is as low as 4 mm/s. Further, this sensor can work well under a disturbance with low frequency. The present work provides a good application prospect for the underwater sensing of AUVs.

This work reports the process optimization of various electrospinning parameters to fabricate polyvinylidene fluoride based piezoelectric flexible nanofiber webs for passive sensing and energy harvesting applications. Process parameters like electrospinning voltage and drum speed have been taken into consideration while optimizing the electrospun nanofiber webs for maximizing their piezoelectric property. Finally, the optimized recipe is used to fabricate a flexible PVDF nanofiber energy harvester to demonstrate the energy harvesting capability of such nanofiber webs.

Neuromast sensors found in fishes detect flows around their body and are known to generate hydrodynamic awareness. This work reports the development of superficial neuromast (SN) and canal neuromast (CN) inspired MEMS flow sensors. The MEMS artificial neuromast sensors mimic the key features of the SN and the CN such as the shape and the mechanical properties of the cupula. In case of both SN and CN MEMS sensors, hydrogels with varying initiator concentrations were used to replicate the Young’s modulus of the biological cupula. The MEMS SN and CN sensors were experimentally characterized in steady-state and oscillatory flows respectively.

This paper presents the development of a chemical sensor which was microfabricated on top of liquid crystal polymer (LCP) substrate. As a result of the unique material properties of LCP, the sensor showed favorable flexibility as well as operational reliability. These features demonstrate potential for integration of the sensor into automated sensing vehicles to achieve real-time detection. The sensor consists of a gold working electrode, a silver/silver chloride reference electrode, and a gold counter electrode. The working electrode of the sensor was further modified with bismuth nanoparticles and Nafion. The modified sensor exhibited a significantly enhanced sensing capability toward cadmium metal ion (Cd(II)) in comparison to the unmodified one. The effects of deposition potential and deposition time on the sensing performance of the sensor were extensively investigated through electrochemical experiments. With optimized parameters, the sensor was capable of quantifying Cd(II) in the concentration range of 0.3 to 25 µg/L. The minimum Cd(II) concentration detected by the sensor was 0.06 µg/L under quiescent deposition. The obtained results suggest that the proposed sensor has a great potential to be deployed for in-situ Cd(II) determination.

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μ m at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments.

This paper reports development of a novel, flexible hydrogel based capacitive pressure sensor. It features a simple design of hydrogel thin film sandwiched between two gold electrodes. The sensor shows linear increase in output with increase in pressure. The microporous network of hydrogel enables high water retention while its flexible and stretchable structure ensures usage over large areas. These factors, combined with its stability in water, make it an ideal candidate for underwater applications. Further, the physical and chemical properties of hydrogels can be tailored to tune the capacitance to specific sensing needs. Flexible arrays of capacitive sensors with hydrogel hold great potential for underwater smart skin applications.

Blind cavefishes are known to detect objects through hydrodynamic vision enabled by arrays of biological flow sensors called neuromasts. This work demonstrates the development of a MEMS artificial neuromast sensor that features a 3D polymer hair cell that extends into the ambient flow. The hair cell is monolithically fabricated at the center of a 2 μm thick silicon membrane that is photo-patterned with a full-bridge bias circuit. Ambient flow variations exert a drag force on the hair cell, which causes a displacement of the sensing membrane. This in turn leads to the resistance imbalance in the bridge circuit generating a voltage output. Inspired by the biological neuromast, a biomimetic synthetic hydrogel cupula is incorporated on the hair cell. The morphology, swelling behavior, porosity and mechanical properties of the hyaluronic acid hydrogel are characterized through rheology and nanoindentation techniques. The sensitivity enhancement in the sensor output due to the material and mechanical contributions of the micro-porous hydrogel cupula is investigated through experiments.