8 results on '"Kehrberg, Steven"'
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2. Simulation methods for generating reduced order models of MEMS sensors with geometric nonlinear drive motion
3. Incorporating geometrical nonlinearities in reduced order models for MEMS gyroscopes
4. A static approach for the frequency shift of parasitic excitations in MEMS gyroscopes with geometric nonlinear drive mode
5. Measuring Young's modulus of polysilicon via cantilever microbeam arrays
6. Nonlinear Model Order Reduction for high Q MEMS gyroscopes
7. Advanced methods for calculating quadrature errors of MEMS gyroscopes
8. Modal analysis of MEMS using ultrasonic base excitation
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