1. Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator
- Author
-
Navarathna, Amy, Carey, Benjamin J., Bennett, James S., Khademi, Soroush, and Bowen, Warwick P.
- Subjects
Physics - Optics ,Quantum Physics - Abstract
Whispering gallery mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present an experimentally observed optical quality factors of the order of 10^5 and a single-photon optomechanical coupling of approximately 15 kHz.
- Published
- 2024