1. Ferroelectric-Gated Nanoelectromechanical Nonvolatile Memory Cell
- Author
-
Changhwan Shin and Kihun Choe
- Subjects
010302 applied physics ,Nanoelectromechanical systems ,Hardware_MEMORYSTRUCTURES ,Materials science ,business.industry ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,law.invention ,Non-volatile memory ,Capacitor ,Memory cell ,Relay ,law ,Logic gate ,0103 physical sciences ,Hardware_INTEGRATEDCIRCUITS ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Voltage ,Negative impedance converter - Abstract
A ferroelectric-gated nanoelectromechanical (NEM) nonvolatile random-access memory cell [negative capacitance (NC)-NEM memory] is proposed and investigated. By adjusting the structural parameters of the NEM relay, the pull-in voltage of the NC-NEM memory cell can be reduced, and its pull-out voltage can even become negative. Hence, an NEM relay with a ferroelectric layer in the gate stack can be used as a nonvolatile random-access memory cell. Herein, the device design and operational principles for read/program/erase are introduced in detail. The program/erase voltage and the program delay time of the NC-NEM memory cell have been quantitatively estimated.
- Published
- 2019