Search

Semiconductor manufacturing processing can be jeopardized due to process fluctuations, and the degradation of equipment parts can significantly influence process variation. Timely diagnosing equipment faults causing process variations is desired in current high-end product manufacturing. This paper proposes a diagnostic method for the SiH4 gas flow rate drift using N2 vibrational transition in oxide deposition. In this research, optical emission spectroscopy (OES) and quadrupole mass spectrometer (QMS) are employed as condition monitoring sensors serving as a reference model to compare the diagnostic performance for gas flow rate drift. The study observes that the OES model exhibits much higher performance for minor diagnoses of less than 5% drift. The diagnostic model performance can be enhanced by incorporating plasma condition and gas indicators compared to when these indicators are used individually. This suggests that when conducting diagnostics for equipment and processes, it is crucial to consider indirect indicators like plasma indicators along with direct indicators such as gas radical density. The comprehensive use of both types of indicators enhances the diagnostic performance, providing a more accurate assessment of the conditions and potential problem in semiconductor manufacturing. [ABSTRACT FROM AUTHOR]

Neurological complications after the coronavirus disease 2019 (COVID-19) vaccine administration have been reported. However, the incidence rates of these complications have not been compared in vaccinated and unvaccinated individuals. This study used a nationwide cohort from South Korea to investigate the incidence and prognostic factors of facial-related neurological disorders, such as facial palsy, trigeminal neuralgia, and hemifacial spasms, after COVID-19 vaccination. A population-based cohort design was used to examine data from a randomly selected 50% of the adult population in Seoul, South Korea. Information on demographics, vaccination status, vaccination type, and medical history was collected. The incidence rates and adjusted hazard ratios (aHRs) for facial-related neurological disorders were calculated. This study included 2,482,481 adults, 85.94% of whom were vaccinated. Vaccinated individuals showed a higher incidence of facial palsy, hemifacial spasm, and trigeminal neuralgia than unvaccinated individuals, with significant aHRs of 1.821, 3.203, and 6.621, respectively. Dyslipidemia, female sex, and young age were identified as risk factors for hemifacial spasms and trigeminal neuralgia. This study demonstrates an increased incidence of facial-related neurological disorders after COVID-19 vaccination, particularly among individuals with dyslipidemia and younger women. These findings underscore the need for further investigations into the mechanisms and management of vaccine-related neurological issues. [ABSTRACT FROM AUTHOR]

A potential source of particle contamination due to poorly maintained PECVD chamber condition forces to perform in situ dry cleaning also actively employed before the wet-cleaning chamber maintenance period. In this paper, we demonstrate the use of plasma process diagnostic sensors, optical emission spectroscope, and quadrupole mass spectrometer for in situ plasma monitoring of the dry-cleaning step. It is worthwhile to know the thin film residue on the chamber's inner wall, but it is difficult to collect the deposited thin film sample from the wall since the preparation of the sample from the equipment is impossible. To alleviate the concern, we prepared silicon wafer samples mounted on the chamber sidewall over the prolonged exposure of the SiO2 deposition process, and the collected sensory data were investigated under the dry-cleaning condition. The residue film obtained through the experiment was characterized by Fourier transform infrared, x-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. We found a useful insight into the chamber dry-cleaning end point detection application through residual gas analysis, and the results contribute to process engineers setting up the in situ dry-cleaning recipe to make sure that subsequent deposition can be consistently maintained. [ABSTRACT FROM AUTHOR]

We tested the hypothesis that the anti-inflammatory actions of atrial natriuretic peptide (ANP) result from the modulation of leukocyte adhesion to inflamed endothelium and not solely ANP ligation of endothelial receptors to stabilize endothelial barrier function. We measured vascular permeability to albumin and accumulation of fluorescent neutrophils in a full-thickness skin wound on the flank of LysM-EGFP mice 24 h after formation. Vascular permeability in individually perfused rat mesenteric microvessels was also measured after leukocytes were washed out of the vessel lumen. Thrombin increased albumin permeability and increased the accumulation of neutrophils. The thrombin-induced inflammatory responses were attenuated by pretreating the wound with ANP (30 min). During pretreatment ANP did not lower permeability, but transiently increased baseline albumin permeability concomitant with the reduction in neutrophil accumulation. ANP did not attenuate acute increases in permeability to histamine and bradykinin in individually perfused rat microvessels. The hypothesis that anti-inflammatory actions of ANP depend solely on endothelial responses that stabilize the endothelial barrier is not supported by our results in either individually perfused microvessels in the absence of circulating leukocytes or the more chronic skin wound model. Our results conform to the alternate hypothesis that ANP modulates the interaction of leukocytes with the inflamed microvascular wall of the 24 h wound. Taken together with our previous observations that ANP reduces deformability of neutrophils and their strength of attachment, rolling, and transvascular migration, these observations provide the basis for additional investigations of ANP as an anti-inflammatory agent to modulate leukocyte-endothelial cell interactions.

Stress-induced hormones can alter the inflammatory response to tissue injury; however, the precise mechanism by which epinephrine influences inflammatory response and wound healing is not well defined. Here we demonstrate that epinephrine alters the neutrophil (polymorphonuclear leukocyte (PMN))-dependent inflammatory response to a cutaneous wound. Using noninvasive real-time imaging of genetically tagged PMNs in a murine skin wound, chronic, epinephrine-mediated stress was modeled by sustained delivery of epinephrine. Prolonged systemic exposure of epinephrine resulted in persistent PMN trafficking to the wound site via an IL-6-mediated mechanism, and this in turn impaired wound repair. Further, we demonstrate that β2-adrenergic receptor-dependent activation of proinflammatory macrophages is critical for epinephrine-mediated IL-6 production. This study expands our current understanding of stress hormone-mediated impairment of wound healing and provides an important mechanistic link to explain how epinephrine stress exacerbates inflammation via increased number and lifetime of PMNs.

Background and Aim: Decreased kidney function is a putative risk factor for various cancers. However, few studies have investigated the association between a decreased estimated glomerular filtration rate (eGFR) and incident pancreatic cancer. We aimed to investigate the risk of incident pancreatic cancer according to eGFR categories. Methods: In this retrospective cohort study, we included 359 721 adults who underwent health checkups in 2009 or 2010 by using the Korean National Health Insurance Database. The study population was categorized into four groups by eGFR (mL/min/1.73 m2) using the Chronic Kidney Disease Epidemiology Collaboration equation: group 1 (eGFR < 45), group 2 (eGFR ≥ 45 to < 60), group 3 (eGFR ≥ 60 to < 90), and group 4 (eGFR ≥ 90). Multivariate Cox proportional hazards models were used to determine the adjusted hazard ratios (HRs) and 95% confidence intervals (CIs) for the incidence of pancreatic cancer until 2019 by comparing the eGFR groups. Results: During the 3 493 589.05 person‐years of follow‐up, 1702 pancreatic cancer cases were identified. Compared with group 4 (eGFR ≥ 90), HRs and 95% CIs for the incidence of pancreatic cancer were 1.39 (1.24–1.56) for group 3 (eGFR ≥ 60 to < 90), 1.79 (1.47–2.16) for group 2 (eGFR ≥ 45 to < 60), and 2.05 (1.62–2.60) for group 1 (eGFR < 45) in the multivariate adjusted model. Conclusions: Decreased eGFR was significantly associated with an increased risk of pancreatic cancer in Korean population. Further studies are needed to investigate the relationship between a decreased eGFR and the risk of pancreatic cancer in other ethnic groups. [ABSTRACT FROM AUTHOR]