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Ultra-low noise lasers are essential tools in a wide variety of applications, including data communication, light detection and ranging (LiDAR), quantum computing and sensing, and optical metrology. Recent advances in integrated photonics, specifically the development of ultra-low loss silicon nitride (Si$_3$N$_4$) platform, have allowed attaining performance that exceeds conventional legacy laser systems, including the phase noise of fiber lasers. This platform can moreover be combined with monolithic integration of piezoelectrical materials, enabling frequency agile low noise lasers. However, this approach has to date not surpassed the trade-off between ultra-low frequency noise and frequency agility. Here we overcome this challenge and demonstrate a fully integrated laser based on the Si$_3$N$_4$ platform with frequency noise lower than that of a fiber laser, while maintaining the capability for high-speed modulation of the laser frequency. The laser achieves an output power of 30 mW with an integrated linewidth of 4.3 kHz and an intrinsic linewidth of 3 Hz, demonstrating phase noise performance that is on par with or lower than commercial fiber lasers. Frequency agility is accomplished via a monolithically integrated piezoelectric aluminum nitride (AlN) micro-electro-mechanical system (MEMS) actuator, which enables a flat frequency actuation bandwidth extending up to 400 kHz. This combination of ultra-low noise and frequency agility is a useful feature enabling tight laser locking for frequency metrology, fiber sensing, and coherent sensing applications. Our results demonstrate the ability of 'next generation' integrated photonic circuits (beyond silicon) to exceed the performance of legacy laser systems in terms of coherence and frequency actuation.

Free electrons are a widespread and universal source of electromagnetic fields. The past decades witnessed ever-growing control over many aspects of electron-generated radiation, from the incoherent emission produced by X-ray tubes to the exceptional brilliance of free-electron lasers. Reduced to the elementary process of quantized energy exchange between individual electrons and the electromagnetic field, electron beams may facilitate future sources of tunable quantum light. However, the quantum features of such radiation are tied to the correlation of the particles, calling for the joint electronic and photonic state to be explored for further applications. Here, we demonstrate the coherent parametric generation of non-classical states of light by free electrons. We show that the quantized electron energy loss heralds the number of photons generated in a dielectric waveguide. In Hanbury-Brown-Twiss measurements, an electron-heralded single-photon state is revealed via antibunching intensity correlations, while two-quantum energy losses of individual electrons yield pronounced two-photon coincidences. The approach facilitates the tailored preparation of higher-number Fock and other optical quantum states based on controlled interactions with free-electron beams.

The motional sideband asymmetry of a mechanical oscillator interacting with a laser field can be observed when approaching the quantum ground state, where the zero-point energy of the mechanical oscillator becomes a sizable contribution to its motion. In the context of quantum optomechanics, it allows, in principle, calibration-free inference of the thermal equilibrium of a macroscopic mechanical resonator with its optical bath. At room temperature, this phenomenon has been observed in pioneering experiments using levitated nanoparticles. Measuring this effect with solid-state mechanical resonators has been compounded by thermal intermodulation noise, mirror frequency noise and low quantum cooperativity. Here, we sideband-cool a membrane-in-the-middle system close to the quantum ground state from room temperature, and observe motional sideband asymmetry in a dual-homodyne measurement. Sideband thermometry yields a minimum phonon occupancy of $\bar{n}_{eff}=9.5$. Our work provides insights into nonlinear optomechanical dynamics at room temperature and facilitates accessible optomechanical quantum technologies without the need for complex feedback control and cryogenic cooling.

Frequency-agile lasers that can simultaneously feature low noise characteristics as well as fast mode hop-free frequency tuning are keystone components for applications ranging from frequency modulated continuous wave (FMCW) LiDAR, to coherent optical communication and gas sensing. The hybrid integration of III-V gain media with low-loss photonic integrated circuits (PICs) has recently enabled integrated lasers with faster tuning and lower phase noise than the best legacy systems, including fiber lasers. In addition, lithium niobate on insulator (LNOI) PICs have enabled to exploit the Pockels effect to demonstrate self-injection locked hybrid lasers with tuning rates reaching peta-hertz per second. However, Pockels-tunable laser archetypes relying on high-Q optical microresonators have thus far only achieved limited output powers, are difficult to operate and stabilize due to the dynamics of self-injection locking, and require many analog control parameters. Here, we overcome this challenge by leveraging an extended distributed Bragg reflector (E-DBR) architecture to demonstrate a simple and turn-key operable frequency-agile Pockels laser that can be controlled with single analog operation and modulation inputs. Our laser supports a continuous mode hop-free tuning range of over 10 GHz with good linearity and flat actuation bandwidth up to 10 MHz, while achieving over 15 mW in-fiber output power at 1545 nm and kHz-level intrinsic linewidth, a combination unmet by legacy bulk lasers. This hybrid laser design combines an inexpensive reflective semiconductor optical amplifier (RSOA) with an electro-optic DBR PIC manufactured at wafer-scale on a LNOI platform. We showcase the performance and flexibility of this laser in proof-of-concept coherent optical ranging (FMCW LiDAR) demonstration, achieving a 4 cm distance resolution and in a hydrogen cyanide spectroscopy experiment., Comment: 10 pages, 5 figures

Collective phenomena arise from interactions within complex systems, leading to behaviors absent in individual components. Observing quantum collective phenomena with macroscopic mechanical oscillators has been impeded by the stringent requirement that oscillators be identical. Here, we demonstrate the quantum regime for collective motion of $N=6$ mechanical oscillators, a hexamer, in a superconducting circuit optomechanical platform. By increasing the optomechanical couplings, the system transitions from individual to collective motion, characterized by a $\sqrt{N}$ enhancement of cavity-collective mode coupling, akin to super-radiance of atomic ensembles. Using sideband cooling, we prepare the collective mode in the quantum ground state and measure its quantum sideband asymmetry, with zero-point motion distributed across distant oscillators. This regime of optomechanics opens avenues for studying multi-partite entanglement, with potential advances in quantum metrology.

Integrated frequency comb generators based on Kerr parametric oscillation have led to chip-scale, gigahertz-spaced combs with new applications spanning hyperscale telecommunications, low-noise microwave synthesis, LiDAR, and astrophysical spectrometer calibration. Recent progress in lithium niobate (LN) photonic integrated circuits (PICs) has resulted in chip-scale electro-optic (EO) frequency combs, offering precise comb-line positioning and simple operation without relying on the formation of dissipative Kerr solitons. However, current integrated EO combs face limited spectral coverage due to the large microwave power required to drive the non-resonant capacitive electrodes and the strong intrinsic birefringence of Lithium Niobate. Here, we overcome both challenges with an integrated triply resonant architecture, combining monolithic microwave integrated circuits (MMICs) with PICs based on the recently emerged thin-film lithium tantalate. With resonantly enhanced EO interaction and reduced birefringence in Lithium Tantalate, we achieve a four-fold comb span extension and a 16-fold power reduction compared to the conventional non-resonant microwave design. Driven by a hybrid-integrated laser diode, the comb spans over 450nm (60THz) with >2000 lines, and the generator fits within a compact 1cm^2 footprint. We additionally observe that the strong EO coupling leads to an increased comb existence range approaching the full free spectral range of the optical microresonator. The ultra-broadband comb generator, combined with detuning-agnostic operation, could advance chip-scale spectrometry and ultra-low-noise millimeter wave synthesis and unlock octave-spanning EO combs. The methodology of co-designing microwave and optical resonators can be extended to a wide range of integrated electro-optics applications., Comment: Main text: 9 pages; SI: 20 pages; v2: Funding information correction; v3: Acknowledgement update

Silicon nitride (Si$_3$N$_4$) photonic integrated circuits (PICs) have shown low linear loss, negligible nonlinear loss, and high power handling over traditional silicon photonics. To achieve high-density photonic integration and high effective nonlinearity through tight optical confinement, thick stoichiometric Si$_3$N$_4$ films are indispensable. However, when using low-pressure chemical vapor deposition (LPCVD) to achieve high optical material transparency, Si$_3$N$_4$ films exhibit large tensile stress on the order of GPa. Methods for crack prevention are therefore essential. The photonic Damascene process has addressed this issue, attaining record low loss Si$_3$N$_4$ PICs, but it lacks control of the waveguide height. Conversely, precise waveguide dimension and ultra-low loss have been achieved with subtractive processing, but this method is not compatible with mass production due to the use of electron beam lithography. To date, an outstanding challenge is to attain both lithographic precision and ultra-low loss in high confinement Si$_3$N$_4$ PICs that are compatible with large-scale foundry manufacturing. Here, we present a single-step deposited, DUV-based subtractive method for producing wafer-scale ultra-low loss Si$_3$N$_4$ PICs that harmonize these necessities. By employing deep etching of densely distributed, interconnected trenches into the substrate, we effectively mitigate the tensile stress in the Si$_3$N$_4$ layer, enabling direct deposition of thick films without cracking and substantially prolonged storage duration. Lastly, we identify ultraviolet (UV) radiation-induced damage that can be remedied through rapid thermal annealing. Collectively, we develop ultra-low loss Si$_3$N$_4$ microresonators and 0.5 m-long spiral waveguides with losses down to 1.4 dB/m at 1550 nm with high production yield., Comment: 2023 Conference on Lasers and Electro-Optics (CLEO). IEEE, 2023

Recent decades have seen significant advancements in integrated photonics, driven by improvements in nanofabrication technology. This field has developed from integrated semiconductor lasers and low-loss waveguides to optical modulators, enabling the creation of sophisticated optical systems on a chip scale capable of performing complex functions like optical sensing, signal processing, and metrology. The tight confinement of optical modes in photonic waveguides further enhances the optical nonlinearity, leading to a variety of nonlinear optical phenomena such as optical frequency combs, second-harmonic generation, and supercontinuum generation. Active tuning of photonic circuits is crucial not only for offsetting variations caused by fabrication in large-scale integration, but also serves as a fundamental component in programmable photonic circuits. Piezoelectric actuation in photonic devices offers a low-power, high-speed solution and is essential in the design of future photonic circuits due to its compatibility with materials like Si and Si3N4, which do not exhibit electro-optic effects. Here, we provide a detailed review of the latest developments in piezoelectric tuning and modulation, by examining various piezoelectric materials, actuator designs tailored to specific applications, and the capabilities and limitations of current technologies. Additionally, we explore the extensive applications enabled by piezoelectric actuators, including tunable lasers, frequency combs, quantum transducers, and optical isolators. These innovative ways of managing photon propagation and frequency on-chip are expected to be highly sought after in the future advancements of advanced photonic chips for both classical and quantum optical information processing and computing.

Optical amplification, crucial for modern communication and data center interconnects, primarily relies on erbium-doped fiber amplifiers (EDFAs) to enhance signals without distortion. While EDFAs were historically decisive for the introduction of dense wavelength-division multiplexing, they only cover a portion of the low-loss spectrum of optical fibers. Pioneering work on optical traveling-wave parametric amplifiers (TWPAs) utilizing intrinsic third-order optical nonlinearity has led to demonstrations of increased channel capacity and performance. TWPAs are unidirectional, offer high gain, and can reach the 3-dB quantum limit for phase-preserving amplifiers. Despite the use of highly nonlinear fibers or bulk waveguides, their power requirements and technical complexity have impeded adoption. In contrast, TWPAs based on photonic integrated circuits (PICs) offer the advantages of substantially increased mode confinement and optical nonlinearity but have been limited in bandwidth because of the trade-off with maintaining low propagation loss. We overcome this challenge by using low-loss gallium phosphide-on-silicon dioxide PICs and attain up to 35~dB of parametric gain with waveguides only a few centimeters long in a compact footprint of 0.25 square millimeters. Fiber-to-fiber net gain exceeding 10 dB across a bandwidth of approximately 140 nm is achieved, surpassing the gain window of a standard C-band EDFA. We furthermore demonstrate the capability to handle weak signals; input powers can range over six orders of magnitude while maintaining a low noise figure. We exploit these performance characteristics to amplify both optical frequency combs and coherent communication signals. This marks the first ultra-broadband, high-gain, continuous-wave amplification in a PIC, opening up new capabilities for next-generation optical communication, metrology, and sensing., Comment: 20 pages, 13 figures

Frequency metrology lies at the heart of precision measurement. Optical frequency combs provide a coherent link uniting the microwave and optical domains in the electromagnetic spectrum, with profound implications in timekeeping, sensing and spectroscopy, fundamental physics tests, exoplanet search, and light detection and ranging. Here, we extend this frequency link to free electrons by coherent modulation of the electron phase by a continuous-wave laser locked to a fully stabilized optical frequency comb. Microwave frequency standards are transferred to the optical domain via the frequency comb, and are further imprinted in the electron spectrum by optically modulating the electron phase with a photonic chip-based microresonator. As a proof-of-concept demonstration, we apply this frequency link in the calibration of an electron spectrometer, and use the electron spectrum to measure the optical frequency. Our work bridges frequency domains differed by a factor of $\sim10^{13}$ and carried by different physical objects, establishes a spectroscopic connection between electromagnetic waves and free-electron matter waves, and has direct ramifications in ultrahigh-precision electron spectroscopy.

The advances in novel low-loss "on insulator" integrated photonics platforms beyond silicon, such as thin-film LiNbO3, LiTaO3, GaP and BaTiO3 have demonstrated major potential across a wide range of applications, due to their unique electro-optical or nonlinear optical properties. This has heralded novel devices, ranging from low-voltage and high-speed modulators to parametric amplifiers. For such photonic integrated circuits, a low-loss SiO2 cladding layer is a key element, serving as a passivation layer for the waveguides and enabling efficient fiber-to-chip coupling. However, numerous novel ferroelectric or III-V "on insulator" platforms have low tolerances for process temperature. This prohibits using high-temperature anneals to remove hydrogen, a common impurity that is inherent to ordinary chemical vapor deposited SiO2 and causes significant optical loss in the near infrared. Here, we satisfy the dichotomy of a low-loss wafer scale manufactured SiO2 cladding and low processing temperature. Inspired by the manufacturing of optical fibers, we introduce a hydrogen-free, low-loss SiO2 cladding that is deposited at low temperatures (300 degrees Celsius) by using SiCl4 and O2 as precursors in inductively coupled plasma-enhanced chemical vapor deposition (ICPCVD). By replacing hydrogenous silicon precursors (e.g. SiH4) with SiCl4, the deposited film is inherently free from residual hydrogen. The process temperature is compatible with the "on insulator" platforms and CMOS electronic integrated circuits. We demonstrate a wide low-loss window that covers all telecommunication bands from 1260 nm to 1625 nm. We achieve a < 2.5 dB/m waveguide loss at 1550 nm, comparable with 1200 degree Celsius annealed films. Our SiCl4 process provides a key future cladding for all recently emerged "on-insulator" photonics platforms, that is low cost, scalable in manufacturing, and directly foundry compatible., Comment: 7 pages, 4 figures

Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room temperature, this has only been reached in pioneering experiments where an optical restoring force controls the oscillator stiffness, akin to the vibrational motion of atoms in an optical lattice. These include both levitated nanoparticles and optically-trapped cantilevers. Recent advances in engineered mechanical resonators, where the restoring force is provided by material rigidity rather than an external optical potential, have realized ultra-high quality factors (Q) by exploiting `soft clamping'. However entering the quantum regime with such resonators, has so far been prevented by optical cavity frequency fluctuations and thermal intermodulation noise. Here, we overcome this challenge and demonstrate optomechanical squeezing at room temperature in a phononic-engineered membrane-in-the-middle system. By using a high finesse cavity whose mirrors are patterned with phononic crystal structures, we reduce cavity frequency noise by more than 700-fold. In this ultra-low noise cavity, we introduce a silicon nitride membrane oscillator whose density is modulated by silicon nano-pillars, yielding both high thermal conductance and a localized mechanical mode with Q of 1.8e8. These advances enable operation within a factor of 2.5 of the Heisenberg limit, leading to squeezing of the probing field by 1.09 dB below the vacuum fluctuations. Moreover, the long thermal decoherence time of the membrane oscillator (more than 30 vibrational periods) allows us to obtain conditional displaced thermal states of motion with an occupation of 0.97 phonon, using a multimode Kalman filter. Our work extends quantum control of engineered macroscopic oscillators to room temperature.

Understanding thermodynamical measurement noise is of central importance for electrical and optical precision measurements from mass-fabricated semiconductor sensors, where the Brownian motion of charge carriers poses limits, to optical reference cavities for atomic clocks or gravitational wave detection, which are limited by thermorefractive and thermoelastic noise due to the transduction of temperature fluctuations to the refractive index and length fluctuations. Here, we discover that unexpectedly charge carrier density fluctuations give rise to a novel noise process in recently emerged electro-optic photonic integrated circuits. We show that Lithium Niobate and Lithium Tantalate photonic integrated microresonators exhibit an unexpected Flicker type (i.e. $1/f^{1.2}$) scaling in their noise properties, significantly deviating from the well-established thermorefractive noise theory. We show that this noise is consistent with thermodynamical charge noise, which leads to electrical field fluctuations that are transduced via the strong Pockels effects of electro-optic materials. Our results establish electrical Johnson-Nyquist noise as the fundamental limitation for Pockels integrated photonics, crucial for determining performance limits for both classical and quantum devices, ranging from ultra-fast tunable and low-noise lasers, Pockels soliton microcombs, to quantum transduction, squeezed light or entangled photon-pair generation. Equally, this observation offers optical methods to probe mesoscopic charge fluctuations with exceptional precision., Comment: Main Text: 8 pages, 4 figures; Supplementary Material: 15 pages, 13 figures --- version 2: Figure typo fixed (Homodyne setup); TCCR derivation in SI detailed; v4: funding information correction

In general, space-time wave packets with correlations between transverse spatial fields and temporal frequency spectra can lead to unique spatiotemporal dynamics, thus enabling control of the instantaneous light properties. However, spatiotemporal dynamics generated in previous approaches manifest themselves at a given propagation distance yet not arbitrarily tailored longitudinally. Here, we propose and demonstrate a new versatile class of judiciously synthesized wave packets whose spatiotemporal evolution can be arbitrarily engineered to take place at various predesigned distances along the longitudinal propagation path. Spatiotemporal synthesis is achieved by introducing a 2-dimensional spectrum comprising both temporal and longitudinal wavenumbers associated with specific transverse Bessel-Gaussian fields. The resulting spectra are then employed to produce wave packets evolving in both time and axial distance - in full accord with the theoretical analysis. In this respect, various light degrees of freedom can be independently manipulated, such as intensity, polarization, and transverse spatial distribution (e.g., orbital angular momentum). Through a temporal-longitudinal frequency comb spectrum, we simulate the synthesis of the aforementioned wave packet properties, indicating a decrease in relative error compared to the desired phenomena as more spectral components are incorporated. Additionally, we experimentally demonstrate tailorable spatiotemporal fields carrying time- and longitudinal-varying orbital angular momentum, such that the local topological charge evolves every ~1 ps in the time domain and 10 cm axially. We believe that our space-time wave packets can significantly expand the exploration of spatiotemporal dynamics in the longitudinal dimension, and potentially enable novel applications in ultrafast microscopy, light-matter interactions, and nonlinear optics.

Coherent interconversion between microwave and optical frequencies can serve as both classical and quantum interfaces for computing, communication, and sensing. Here, we present a compact microwave-optical transducer based on monolithic integration of piezoelectric actuators atop silicon nitride photonic circuits. Such an actuator directly couples microwave signals to a high-overtone bulk acoustic resonator defined by the suspended silica cladding of the optical waveguide core, which leads to enhanced electromechanical and optomechanical couplings. At room temperature, this triply resonant piezo-optomechanical transducer achieves an off-chip photon number conversion efficiency of -48 dB over a bandwidth of 25 MHz at an input pump power of 21 dBm. The approach is scalable in manufacturing and, unlike existing electro-optic transducers, does not rely on superconducting resonators. As the transduction process is bidirectional, we further demonstrate synthesis of microwave pulses from a purely optical input. Combined with the capability of leveraging multiple acoustic modes for transduction, the present platform offers prospects for building frequency-multiplexed qubit interconnects and for microwave photonics at large.

Optical parametric oscillators enable the conversion of pump light to new frequency bands using nonlinear optical processes. Recent advances in integrated nonlinear photonics have led to create compact, chip-scale sources via Kerr nonlinearity-induced parametric oscillations. While these sources have provided broadband wavelength tuning, the ability to tune the emission wavelength via dynamically altering the dispersion, has not been attained so far. Here we present a voltage-tunable, on-chip integrated optical parametric oscillator based on alternating dispersiondimer, allowing to tune the emission over nearly 20 THz near 1550 nm. Unlike previous approaches, our device eliminates the need for a widely tunable pump laser source and provides efficient pump filtering at the drop port of the auxiliary ring. Integration of this scheme on a chip opens up the possibility of compact and low-cost voltage-tunable parametric oscillators with diverse application possibilities.

The short de Broglie wavelength and strong interaction empower free electrons to probe scattering and excitations in materials and resolve the structure of biomolecules. Recent advances in using nanophotonic structures to mediate bilinear electron-photon interaction have brought novel optical manipulation schemes to electron beams, enabling high space-time-energy resolution electron microscopy, quantum-coherent optical modulation, attosecond metrology and pulse generation, transverse electron wavefront shaping, dielectric laser acceleration, and electron-photon pair generation. However, photonic nanostructures also exhibit nonlinearities, which have to date not been exploited for electron-photon interactions. Here, we report the interaction of electrons with spontaneously generated Kerr nonlinear optical states inside a continuous-wave driven photonic chip-based microresonator. Optical parametric processes give rise to spatiotemporal pattern formation, or dissipative structures, corresponding to coherent or incoherent optical frequency combs. By coupling such microcombs in situ to electron beams, we demonstrate that different dissipative structures induce distinct fingerprints in the electron spectra and Ramsey-type interference patterns. In particular, using spontaneously formed femtosecond temporal solitons, we achieve ultrafast temporal gating of the electron beam without the necessity of a pulsed laser source or a pulsed electron source. Our work elucidates the interaction of free electrons with a variety of nonlinear dissipative states, demonstrates the ability to access solitons inside an electron microscope, and extends the use of microcombs to unexplored territories, with ramifications in novel ultrafast electron microscopy, light-matter interactions driven by on-chip temporal solitons, and ultra-high spatiotemporal resolution sampling of nonlinear optical dynamics and devices.

Second-harmonic generation allows for coherently bridging distant regions of the optical spectrum, with applications ranging from laser technology to self-referencing of frequency combs. However, accessing the nonlinear response of a medium typically requires high-power bulk sources, specific nonlinear crystals, and complex optical setups, hindering the path toward large-scale integration. Here we address all of these issues by engineering a chip-scale second-harmonic (SH) source based on the frequency doubling of a semiconductor laser self-injection-locked to a silicon nitride microresonator. The injection-locking mechanism, combined with a high-Q microresonator, results in an ultra-narrow intrinsic linewidth at the fundamental harmonic frequency as small as 57 Hz. Owing to the extreme resonant field enhancement, quasi-phase-matched second-order nonlinearity is photoinduced through the coherent photogalvanic effect and the high coherence is mapped on the generated SH field. We show how such optical poling technique can be engineered to provide efficient SH generation across the whole C and L telecom bands, in a reconfigurable fashion, overcoming the need for poling electrodes. Our device operates with milliwatt-level pumping and outputs SH power exceeding 2 mW, for an efficiency as high as 280%/W under electrical driving. Our findings suggest that standalone, highly-coherent, and efficient SH sources can be integrated in current silicon nitride photonics, unlocking the potential of $\chi^{(2)}$ processes in the next generation of integrated photonic devices.

Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz., Comment: 8 pages, 4 figures

Low-noise microwave signals can be efficiently generated with microresonator-based dissipative Kerr solitons ('microcombs'). However, the achieved phase noise in integrated microcombs is presently several orders of magnitude above the limit imposed by fundamental thermorefractive noise. One of the major contributors to this additional noise is the pump laser frequency noise transduction to the soliton pulse repetition rate via the Raman self-frequency shift. Quiet points (QPs) allow minimizing the transduction of laser frequency noise to soliton group velocity. While this method has allowed partial reduction of phase noise towards the fundamental thermodynamical limit, it relies on accidental mode crossings and only leads to very narrow regions of laser detuning where cancellation occurs, significantly narrower than the cavity linewidth. Here we present a method to deterministically engineer the QP, both in terms of its spectral width, and position, showing an increased phase noise suppression. This is achieved using coupled high-Q resonators arranged in the Vernier configuration. Investigating a generalized Lugiato-Lefever equation that accounts for the hybridized mode spectral displacement, we discover a continuum of possible QPs within the soliton existence region, characterized by ultra-low noise performance. Furthermore, we discover that by using two controlled optical mode crossings, it is possible to achieve regions where the QPs interact with each other enabling a substantial increase of the noise suppression range. Our work demonstrates a promising way to reach the fundamental limit of low-noise microwave generation in integrated microcombs., Comment: 5 figures

Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Recent advances in the development of ultra-low loss silicon nitride (Si3N4)-based photonic integrated circuits have allowed integrated lasers to achieve a coherence exceeding those of fiber lasers and enabled unprecedentedly fast (Megahertz bandwidth) tuning using monolithically integrated piezoelectrical actuators. While this marks the first time that fiber laser coherence is achieved using photonic integrated circuits, in conjunction with frequency agility that exceeds those of legacy bulk lasers, the approach is presently compounded by the high cost of manufacturing DFB, as required for self-injection locking, as well as the precise control over the laser current and temperature to sustain a low noise locked operation. Reflective semiconductor optical amplifiers (RSOA) provide a cost-effective alternative solution but have not yet achieved similar performance in coherence or frequency agility, as required for frequency modulated continuous wave (FMCW) LiDAR, laser locking in frequency metrology or wavelength modulation spectroscopy for gas sensing. Here, we overcome this challenge and demonstrate an RSOA-based and frequency agile integrated laser tuned with high speed, good linearity, high optical output power, and turn-key operability while maintaining a small footprint. This is achieved using a tunable extended distributed Bragg reflector (E-DBR) in an ultra-low loss 200 nm thin Si3N4 platform with monolithically integrated piezoelectric actuators. We co-integrate the DBR with a compact ultra-low loss spiral resonator to further reduce the intrinsic optical linewidth of the laser to the Hertz level -- on par with the noise of a fiber laser -- via self-injection locking., Comment: 9 pages, 4 figures

Erbium-doped fiber lasers exhibit high coherence and low noise as required for applications in fiber optic sensing, gyroscopes, LiDAR, and optical frequency metrology. Endowing Erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-noise fiber lasers to chip-scale form factor, and enable large-volume applications. Yet, while major progress has been made in the last decade on integrated lasers based on silicon photonics with III-V gain media, the integration of Erbium lasers on chip has been compounded by large laser linewidth. Recent advances in photonic integrated circuit-based high-power Erbium-doped amplifiers, make a new class of rare-earth-ion-based lasers possible. Here, we demonstrate a fully integrated chip-scale Erbium laser that achieves high power, narrow linewidth, frequency agility, and the integration of a III-V pump laser. The laser circuit is based on an Erbium-implanted ultralow-loss silicon nitride Si$_3$N$4$ photonic integrated circuit. This device achieves single-mode lasing with a free-running intrinsic linewidth of 50 Hz, a relative intensity noise of $<$-150 dBc/Hz at $>$10 MHz offset, and output power up to 17 mW, approaching the performance of fiber lasers and state-of-the-art semiconductor extended cavity lasers. An intra-cavity microring-based Vernier filter enables wavelength tunability of $>$ 40 nm within the C- and L-bands while attaining side mode suppression ratio (SMSR) of $>$ 70 dB, surpassing legacy fiber lasers in tuning and SMRS performance. This new class of low-noise, tuneable Erbium waveguide laser could find applications in LiDAR, microwave photonics, optical frequency synthesis, and free-space communications. Our approach is extendable to other wavelengths, and more broadly, constitutes a novel way to photonic integrated circuit-based rare-earth-ion-doped lasers.

Superconducting qubits are one of the most advanced candidates to realize scalable and fault-tolerant quantum computing. Despite recent significant advancements in the qubit lifetimes, the origin of the loss mechanism for state-of-the-art qubits is still subject to investigation. Moreover, successful implementation of quantum error correction requires negligible correlated errors among qubits. Here, we realize ultra-coherent superconducting transmon qubits based on niobium capacitor electrodes, with lifetimes exceeding 0.4 ms. By employing a nearly quantum-limited readout chain based on a Josephson traveling wave parametric amplifier, we are able to simultaneously record bit-flip errors occurring in a multiple-qubit device, revealing that the bit-flip errors in two highly coherent qubits are strongly correlated. By introducing a novel time-resolved analysis synchronized with the operation of the pulse tube cooler in a dilution refrigerator, we find that a pulse tube mechanical shock causes nonequilibrium dynamics of the qubits, leading to correlated bit-flip errors as well as transitions outside of the computational state space. Our observations confirm that coherence improvements are still attainable in transmon qubits based on the superconducting material that has been commonly used in the field. In addition, our findings are consistent with qubit dynamics induced by two-level systems and quasiparticles, deepening our understanding of the qubit error mechanisms. Finally, these results inform possible new error-mitigation strategies by decoupling superconducting qubits from their mechanical environments., Comment: 19 pages, 15 figures, and 1 table

Photonic crystals, material structures in which the dielectric function varies periodically in one, two, or three dimensions, can provide exquisite control over the propagation and confinement of light. By tailoring their band structure, exceptional optical effects can be achieved, such as slow light propagation or, through the creation of photonic bandgaps, optical cavities with both a high quality factor and a small mode volume. Photonic crystal cavities have been used to realize compact nano-lasers and achieve strong coupling to quantum emitters, such as semiconductor quantum dots, color centers, or cold atoms. A useful attribute of photonic crystals is the ability to create chirped mirrors. Chirping has underpinned advances in ultra-fast lasers based on bulk mirrors, but has yet to be fully exploited in integrated photonics, where it could provide a means to engineer otherwise unattainable dispersion profiles for a range of nonlinear optical applications, including soliton frequency comb generation. The vast majority of integrated resonators for frequency combs make use of microring geometries, where only waveguide width and height are varied to engineer dispersion. Generation of frequency combs has been demonstrated with one-dimensional photonic crystal cavities made of silicon nitride, but the low index contrast prevents formation of broad soliton combs. We overcome these challenges by using a photonic-crystal Fabry-P\'erot resonator made of gallium phosphide, a material with a high refractive index and a Kerr nonlinearity 200 times larger than that of silicon nitride. We employ chirped photonic crystal mirrors to provide anomalous dispersion. With subharmonic pulsed pumping at an average power of 23.6 mW, we are able to access stable dissipative Kerr frequency combs. We demonstrate soliton formation with a 3-dB bandwidth of 3.0 THz, corresponding to a pulse duration of 60 fs., Comment: 22 pages, 16 figures

We propose and demonstrate a novel scheme for optical arbitrary waveform measurement (OAWM) that exploits chip-scale Kerr soliton combs as highly scalable multiwavelength local oscillators (LO) for ultra-broadband full-field waveform acquisition. In contrast to earlier concepts, our approach does not require any optical slicing filters and thus lends itself to efficient implementation on state-of-the-art high-index-contrast integration platforms such as silicon photonics. The scheme allows to measure truly arbitrary waveforms with high accuracy, based on a dedicated system model which is calibrated by means of a femtosecond laser with known pulse shape. We demonstrated the viability of the approach in a proof-of-concept experiment by capturing an optical waveform that contains multiple 16 QAM and 64 QAM wavelength-division multiplexed (WDM) data signals with symbol rates of up to 80 GBd, reaching overall line rates of up to 1.92 Tbit/s within an optical acquisition bandwidth of 610 GHz. To the best of our knowledge, this is the highest bandwidth that has so far been demonstrated in an OAWM experiment.

Recent advances in the development of ultra-low loss silicon nitride integrated photonic circuits have heralded a new generation of integrated lasers capable of reaching fiber laser coherence. However, these devices presently are based on self-injection locking of distributed feedback (DFB) laser diodes, increasing both the cost and requiring tuning of laser setpoints for their operation. In contrast, turn-key legacy laser systems use reflective semiconductor optical amplifiers (RSOA). While this scheme has been utilized for integrated photonics-based lasers, so far, no cost-effective RSOA-based integrated lasers exist that are low noise and simultaneously feature fast, mode-hop-free and linear frequency tuning as required for frequency modulated continuous wave (FMCW) LiDAR or for laser locking in frequency metrology. Here we overcome this challenge and demonstrate a RSOA-based, frequency agile integrated laser, that can be tuned with high speed, with high linearity at low power. This is achieved using monolithic integration of piezoelectrical actuators on ultra-low loss silicon nitride photonic integrated circuits in a Vernier filter-based laser scheme. The laser operates at 1550 nm, features 6 mW output power, 400 Hz intrinsic laser linewidth, and allows ultrafast wavelength switching within 7 ns rise time and 75 nW power consumption. In addition, we demonstrate the suitability for FMCW LiDAR by showing laser frequency tuning over 1.5 GHz at 100 kHz triangular chirp rate with nonlinearity of 0.25% after linearization, and use the source for measuring a target scene 10 m away with a 8.5 cm distance resolution.

Ever growing pixel acquisition rates in the fields of augmented reality, autonomous driving and robotics have increased interest in solid state beam scanning without moving parts. Modern photonic integrated laser ranging advances towards passive beam steering solutions. Recently demonstrated imagers based on focal plane arrays, nanophotonic metasurfaces, and optical phased arrays enable unprecedented pixel resolution and measurement speed. However, parallelization of >100 lasers and detectors - successfully implemented in commercial time-of-flight sensors - has not been widely adopted for passive scanning approaches. Here, we show both inertia-free and parallel light detection and ranging (LiDAR) with microresonator frequency combs. We used 40 independent channels of a continuously scanned microresonator frequency comb operated in the chaotic regime in combination with optical dispersive elements to perform random modulation LiDAR with 2D passive beam steering.

Combining optical gain in direct-bandgap III-V materials with tunable optical feedback offered by advanced photonic integrated circuits is key to chip-scale external-cavity lasers (ECL), offering wideband tunability along with low optical linewidths. External feedback circuits can be efficiently implemented using low-loss silicon nitride (Si$_{3}$N$_{4}$) waveguides, which do not suffer from two-photon absorption and can thus handle much higher power levels than conventional silicon photonics. However, co-integrating III-V-based gain elements with tunable external feedback circuits in chip-scale modules still represents a challenge, requiring either technologically demanding heterogeneous integration techniques or costly high-precision multi-chip assembly. In this work, we demonstrate Si$_{3}$N$_{4}$-based hybrid integrated ECL that exploit 3D-printed structures such as intra-cavity photonic wire bonds and facet-attached microlenses for low-loss optical coupling with relaxed alignment tolerances, thereby overcoming the need for active alignment while maintaining the full flexibility of multi-chip integration techniques. In a proof-of-concept experiment, we demonstrate an ECL offering a 90 nm tuning range (1480 nm - 1570 nm) with on-chip output powers above 12 dBm and side-mode suppression ratios of up to 59 dB. We achieve an intrinsic linewidth of 979 Hz, which is among the lowest values reported for comparable feedback architectures. The optical loss of the intra-cavity photonic wire bond between the III-V gain element and the Si$_{3}$N$_{4}$-based tunable feedback circuit amounts to approximately (1.6 $\pm$ 0.2) dB. We use the ECL as a tunable pump laser to generate a dissipative Kerr soliton frequency comb. To the best of our knowledge, our experiments represent the first demonstration of a single-soliton Kerr comb generated with a pump that is derived from a hybrid ECL.

This work demonstrates the capabilities of an entangled photon-pair source at telecom wavelengths, based on a photonic integrated Si$_3$N$_4$ microresonator with monolithically integrated piezoelectric frequency tuning. Previously, frequency tuning of photon-pairs generated by microresonators has only been demonstrated using thermal control, however these have limited actuation bandwidth, and are not compatible with cryogenic environments. Here, the frequency-tunable photon-pair generation capabilities of a Si$_3$N$_4$ microresonator with a monolithically integrated aluminium nitride layer are shown. Fast-frequency locking of the microresonator to an external laser is demonstrated, with a resulting locking bandwidth orders of magnitude larger than reported previously using thermal locking. These abilities will have direct application in future schemes which interface such sources with quantum memories based on e.g. trapped-ion or rare-earth ion schemes.

Biphoton frequency combs (BFCs) are promising quantum sources for large-scale and high-dimensional quantum information and networking systems. In this context, the spectral purity of individual frequency bins will be critical for realizing quantum networking protocols like teleportation and entanglement swapping. Measurement of the temporal auto-correlation function of the unheralded signal or idler photons comprising the BFC is a key tool for characterizing their spectral purity and in turn verifying the utility of the biphoton state for networking protocols. Yet the experimentally obtainable precision for measuring BFC correlation functions is often severely limited by detector jitter. The fine temporal features in the correlation function$-$not only of practical value in quantum information, but also of fundamental interest in the study of quantum optics$-$are lost as a result and have remained unexplored. We propose a scheme to circumvent this challenge through electro-optic phase modulation, experimentally demonstrating time-resolved Hanbury Brown-Twiss characterization of BFCs generated from an integrated 40.5 GHz Si$_3$N$_4$ microring, up to a 3$\times$3-dimensional two-qutrit Hilbert space. Through slight detuning of the electro-optic drive frequency from the comb's free spectral range, our approach leverages Vernier principles to magnify temporal features which would otherwise be averaged out by detector jitter. We demonstrate our approach under both continuous-wave and pulsed pumping regimes, finding excellent agreement with theory. Importantly, our method reveals not only the collective statistics of the contributing frequency bins but also their temporal shapes$-$features lost in standard fully integrated auto-correlation measurements.

Electronic analog to digital converters (ADCs) are running up against the well-known bit depth vs bandwidth tradeoff. Towards this end, RF photonic-enhanced ADCs have been the subject of interest for some time. Optical frequency comb technology has been used as a workhorse underlying many of these architectures. Unfortunately, such designs must generally grapple with SWaP concerns, as well as frequency ambiguity issues which threaten to obscure critical spectral information of detected RF signals. In this work, we address these concerns via an RF photonic downconverter with potential for easy integration and field deployment by leveraging a novel hybrid microcomb / electro-optic comb design., Comment: Original submission replaced after publishing in Optics Letters. The new version includes an updated copyright statement

An enduring challenge in constructing mechanical oscillator-based hybrid quantum systems is to ensure engineered coupling to an auxiliary degree of freedom while maintaining good mechanical isolation from the environment, that is, low quantum decoherence, consisting of thermal decoherence and dephasing. Here, we overcome this challenge by introducing a superconducting circuit optomechanical platform which exhibits a low quantum decoherence while having a large optomechanical coupling, which allows us to prepare the quantum ground and squeezed states of motion with high fidelity. We directly measure a thermal decoherence rate of 20.5 Hz (corresponding to T_1 = 7.7 ms) as well as a pure dephasing rate of 0.09 Hz, resulted in a 100-fold improvement of quantum-state lifetime compared to the prior optomechanical systems. This enables us to reach to 0.07 quanta motional ground state occupation (93% fidelity) and realize mechanical squeezing of -2.7 dB below zero-point-fluctuation. Furthermore, we observe the free evolution of mechanical squeezed state, preserving its non-classical nature over milli-second timescales. Such ultra-low quantum decoherence not only increases the fidelity of quantum control and measurement of macroscopic mechanical systems, but may also benefit interfacing with qubits, and places the system in a parameter regime suitable for tests of quantum gravity. (Keywords: Quantum optomechanics, Superconducting circuit electromechanics, Quantum squeezing, Quantum memory, Quantum coherence)

Photonic integrated circuits are indispensible for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of tightly confining ferroelectric photonic integrated circuits., Comment: 10 pages, 5 figures

Recently, integrated photonic circuits have brought new capabilities to electron microscopy and been used to demonstrate efficient electron phase modulation and electron-photon correlations. Here, we quantitatively analyze the feasibility of high fidelity and high purity quantum state heralding using a free electron and a photonic integrated circuit with parametric coupling, and propose schemes to shape useful electron and photonic states in different application scenarios. Adopting a dissipative quantum electrodynamics treatment, we formulate a framework for the coupling of free electrons to waveguide spatial-temporal modes. To avoid multimode-coupling induced state decoherence, we show that with proper waveguide design, the interaction can be reduced to a single-mode coupling to a quasi-TM00 mode. In the single-mode coupling limit, we go beyond the conventional state ladder treatment, and show that the electron-photon energy correlations within the ladder subspace can still lead to a fundamental purity and fidelity limit on complex optical and electron state preparations through heralding schemes. We propose applications that use this underlying correlation to their advantage, but also show that the imposed limitations for general applications can be overcome by using photonic integrated circuits with an experimentally feasible interaction length, showing its promise as a platform for free-electron quantum optics.

We theoretically and experimentally investigate the formation of dissipative coherent structures in Kerr nonlinear optical microresonators, whose integrated dispersion exceeds the free-spectral range. We demonstrate that the presence of any periodic modulation along the resonator's circumference, such as periodically varying dispersion, can excite higher-order comb structures. We explore the outcomes of coherent microcomb generation in both cases of anomalous and normal dispersion. We are able to access this regime in microresonators via the high peak power of synchronous pulse-driving. For solitons in anomalous dispersion, we observe the formation of higher-order phase-matched dispersive waves (`Kelly-like' sidebands), where the folded dispersion crosses the frequency comb grid. In normal dispersion, we see the coexistence of switching wave fronts with Faraday instability-induced period-doubling patterns, manifesting as powerful satellite microcombs highly separated either side of the core microcomb while sharing the same repetition rate. This regime of dispersion-modulated phase matching opens a dimension of Kerr cavity physics and microcomb generation, particularly for the spectral extension and tuneability of microcombs in normal dispersion., Comment: Supplementary information will be added to posting in coming days

Erbium-doped fiber amplifiers have revolutionized long-haul optical communications and laser technology. Erbium ions could equally provide a basis for efficient optical amplification in photonic integrated circuits. However, this approach has thus far remained impractical due to insufficient output power. Here, we demonstrate a photonic integrated circuit based erbium amplifier reaching 145 mW output power and more than 30 dB small-signal gain -- on par with commercial fiber amplifiers and beyond state-of-the-art III-V heterogeneously integrated semiconductor amplifiers. We achieve this by applying ion implantation to recently emerged ultralow-loss Si3N4 photonic integrated circuits with meter-scale-length waveguides. We utilize the device to increase by 100-fold the output power of soliton microcombs, required for low-noise photonic microwave generation or as a source for wavelength-division multiplexed optical communications. Endowing Si3N4 photonic integrated circuits with gain enables the miniaturization of a wide range of fiber-based devices such as high-pulse-energy femtosecond mode-locked lasers., Comment: 25 pages, 16 figures

Thin-film lithium niobate has shown promise for scalable applications ranging from single-photon sources to high-bandwidth data communication systems. Realization of the next generation high-performance classical and quantum devices, however, requires much lower optical losses than the current state of the art ($\sim$10 million). Unfortunately, material limitations of ion-sliced thin-film lithium niobate have not been explored, and therefore it is unclear how high-quality factor can be achieved in this platform. Here we evaluate the material limited quality factor of thin-film lithium niobate photonic platform can be as high as $Q\approx 1.8\times10^{8}$ at telecommunication wavelengths, corresponding to a propagation loss of 0.2 dB/m.

Silicon nitride (Si$_3$N$_4$) is an ever-maturing integrated platform for nonlinear optics. Yet, due to the absence of second-order ($\chi^{(2)}$) nonlinearity, Si$_3$N$_4$ is mostly considered for third-order ($\chi^{(3)}$) nonlinear interactions. Recently, this limitation was overcome by optical poling in both Si$_3$N$_4$ waveguides and microresonators via the photogalvanic effect, resulting in the inscription of quasi-phase-matched $\chi^{(2)}$ gratings. Here, we report cascaded nonlinear effects in a normal dispersion Si$_3$N$_4$ microresonator with combined $\chi^{(2)}$ and $\chi^{(3)}$ nonlinearities. We demonstrate that the photo-induced $\chi^{(2)}$ grating also provides phase-matching for the sum-frequency generation process, enabling the initiation and successive switching of primary combs at pump wavelength. Additionally, the doubly resonant pump and second-harmonic fields allow for cascaded third-harmonic generation, where a secondary optically written $\chi^{(2)}$ grating is identified. Finally, we reach a low-noise, broadband microcomb state evolved from the sum-frequency coupled primary comb. These results expand the scope of cascaded effects in $\chi^{(2)}$ and $\chi^{(3)}$ microresonators.