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178 results on '"Kuo, Jui-Chao"'

28. Thermal stability and bonding interface in Cu/SiO2 hybrid bonding on nano-twinned copper.

Author

Ou, Jou-Chun, Tsai, Yi-Yun, Lin, Ting-Chun, Kao, Chin-Li, Hsiao, Shih-Chieh, Huang, Fei-Ya, and Kuo, Jui-Chao

Subjects
HYBRID securities, THERMAL stability, INTERFACE stability, FOCUSED ion beams, SCANNING electron microscopes
Abstract

Cu/SiO2 hybrid bonding has been developed for the application of heterogeneous bond interfaces in 3D integrated circuits in which thermal stability and bonding behavior are important. Thus, nano-twinned Cu (NT-Cu) is selected as the bonding material, and the thermal stability of NT-Cu and the bonding behavior of the interface between NT-Cu are investigated using a scanning electron microscope, electron backscatter diffraction, and focused ion beam. In addition to the microstructure analysis, nano-indentation and nano-scratch are employed to characterize the mechanical properties of the matrix and the interface between NT-Cu. As the bonding temperature increases from 200 to 300 °C for NT-Cu, the average grain sizes increase from 0.64 to 0.87 µm, and the rate of grain coarsening increases from 0.14 to 0.25 µm/h1/2. In addition, the fraction of voids at the bonding interface for NT-Cu interconnects decreases from 0.814% to 0.005%, and the penetration depth increases from 228 to 745 nm with an increase in the temperature from 200 to 300 °C. The hardness of the bonding interface obtained by nano-scratch and nano-indentation array testing is ∼1.8 GPa. [ABSTRACT FROM AUTHOR]

Published
2022
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43. Role of strained nano-regions in the formation of subgrains in CaCu3Ti4O12.

Author

Fang, Tsang-Tse, Wang, Yong-Huei, and Kuo, Jui-Chao

Subjects
CALCIUM, COPPER, TITANIUM, ELECTRON backscattering, SCANNING electron microscopy, ATOMIC force microscopy
Abstract

Single-phase CaCu3Ti4O12 (CCTO) was synthesized by solid-state reaction. Electron backscatter diffraction, scanning electron microscopy, and atomic force microscopy were adopted to characterize the grain orientation, microstructure, and surface morphology of the CCTO samples with or without thermal etching. Bump strained nano-regions induced by the local compositional disorder at a nano-scale have been discovered, being the origin of the formation of subgrains in CCTO. The proposed mechanism for the formation of subgrains involves the formation of etched pits and subboundaries pertaining to the strained nano-regions rather than dislocation displacement. The dielectric response inside the grains of CCTO relevant to the strained nano-regions is also discussed. [ABSTRACT FROM AUTHOR]

Published
2011
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44. Determination of residual strain by combining EBSD and DIC techniques

Author

Kuo, Jui-Chao and Wang, Han-Hong

Subjects
Imaging systems -- Analysis, Strains and stresses -- Properties, Stress relaxation (Materials) -- Properties, Stress relieving (Materials) -- Properties, Engineering and manufacturing industries
Abstract

Byline: Jui-Chao Kuo, Han-Hong Wang Electron Back-Scatter Diffraction (EBSD) can be applied to determine lattice defect and local strain distortion. The strain components were obtained with the help of the shifting of zone axis in Kikuchi patterns generated from EBSD. The displacement of zone axis in Kikuchi pattern was determined by using Digital Image Correlation (DIC) method, which provides a great resolution down to 0.01 pixels, which means the ideal sensitivity to be ∼3.6 x 10−5. However, the errors of calculating the residual strain can result from the image quality of Kikuchi patterns, such as the formation of dark areas in the Kikuchi patterns and the background noise.

Published
2010

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