1. SOI-based micro-mechanical terahertz detector operating at room-temperature
- Author
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Froberger, K., Walter, B., Lavancier, M., Peretti, R., Ducournau, G., Lampin, J-F., Faucher, M., and Barbieri, S.
- Subjects
Physics - Optics ,Physics - Applied Physics ,Physics - Instrumentation and Detectors - Abstract
We present a micro-mechanical terahertz (THz) detector fabricated on a silicon on insulator (SOI) substrate and operating at room-temperature. The device is based on a U-shaped cantilever of micrometric size, on top of which two aluminum half-wave dipole antennas are deposited. This produces an absorption extending over the $\sim 2-3.5$THz frequency range. Due to the different thermal expansion coefficients of silicon and aluminum, the absorbed radiation induces a deformation of the cantilever, which is read out optically using a $1.5\mu$m laser diode. By illuminating the detector with an amplitude modulated, 2.5 THz quantum cascade laser, we obtain, at room-temperature and atmospheric pressure, a responsivity of $\sim 1.5 \times 10^{8}$pm/W for the fundamental mechanical bending mode of the cantilever. This yields an noise-equivalent-power of 20 nW/Hz$^{1/2}$ at 2.5THz. Finally, the low mechanical quality factor of the mode grants a broad frequency response of approximately 150kHz bandwidth, with a response time of $\sim 2.5\mu$s.
- Published
- 2022
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