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2. Parylenes for flexible electronics and display applications

Author

Lee, Chung J.

Subjects
Thin film devices -- Production processes -- Usage, Parylenes -- Production processes -- Usage, Monomers -- Usage -- Production processes
Abstract

New reactor chemistries have been developed [1], so low-cost monomers can be used to make various parylenes that have a general composition of (I) (-[CX.sub.2]-Ar-[CX.sub.2]-)n, wherein, Ar is an aromatic […], A chemical vapor deposition (CVD) polymer technology has been developed to use low cost monomers and provide highly crystalline and thermally stable polymer films for the sub-65µm ICs and OLED display applications. This thin film is expected to be a critical enabler for making flexible touch screens, TFTs, solar cells and displays, and very thin fuel cells. The applications include sheet computers, e-books, e-paper, actuators, sensors, memories, RFID tags, solar panel and batteries.

Published
2008

4. Plain talk on low-k dielectrics. (Interconnect)

Author

Lee, Chung J., Kumar, Atul, and Ghanbari, Abe

Subjects
United States
Abstract

Why can't the industry make a solid film with k = 2.2, a Young's modulus (E) as high as 10GPa, and leakage current as low as 1x[10.sup.-10]A/[cm.sup.2] in combination? The […]

Published
2003

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