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Laser radiation is used both for the deposition of the laser active thin films and for the microstructuring to define wave guiding structures for the fabrication of waveguide lasers. Thin films of Er:ZBLAN (a fluoride glass consisting of ZrF 4 , BaF 2 , LaF 3 , AlF 3 , NaF, ErF 3 ) for green up-conversion lasers (545 nm) are produced by pulsed laser deposition using ArF excimer laser radiation (wavelength 193 nm). Manufacturing of the laser active waveguides by microstructuring is done using fs-laser ablation of the deposited films. The structural and optical properties of the films and the damping losses of the structured waveguides are determined in view of the design and the fabrication of compact and efficient diode pumped waveguide lasers. The resulting waveguides are polished, provided with resonator mirrors, pumped using diode lasers and characterized.

Laser radiation is used both for the deposition of the laser active thin films and for the micro structuring to define wave guiding structures for the fabrication of waveguide lasers. Thin films of crystalline and amorphous neodymium doped Gd 3 Ga 5 O 12 are grown on single crystal yttrium aluminium garnet by pulsed laser deposition using excimer laser radiation. Manufacturing of the laser active waveguides by micro structuring is done using femtosecond laser ablation of the deposited films. The structural and optical properties of the films and the morphology of the structured waveguides are determined in view of the design and the fabrication of compact and efficient diode pumped waveguide lasers. The resulting waveguides are polished, provided with resonator mirrors, pumped using diode lasers and the waveguide lasers are characterized. The spectroscopic properties of the amorphous waveguide are investigated and an infrared waveguide laser is demonstrated. To our knowledge, there have been no reports by other groups of the successful operation of a structured waveguide laser fabricated by this technique or of a waveguide laser made from amorphous neodymium doped Gd 3 Ga 5 O 12 .

Pulsed laser radiation of a KrF excimer laser was used for the deposition of thin Nd 3+ doped Gd3Ga5O12 (Nd:GGG) films on yttrium aluminium garnet (YAG) and sapphire single crystal substrates. By variation of PLD-parameters such as temperature and processing gas pressure, amorphous and single crystalline thin films were produced. The morphology and the composition of the grown films were investigated by optical microscopy, scanning electron microscopy and electron dispersive X-ray spectroscopy. Thickness and structural properties of the deposited films were determined by optical reflection spectroscopy and X-ray diffraction, respectively. The optical properties of grown films on different substrates were compared. An amorphous Nd:Gd3Ga5O12 thin film on yttrium aluminium garnet was used for demonstration of an infrared waveguide laser. A planar wave guiding structure was formed in deposited film between two parallel grooves micromachined using laser radiation delivered by a femtosecond CPA-Laser-System. The resulting waveguides were polished and provided with resonator mirrors. With a 5% output coupler at 1064 nm, a laser threshold of 1080 mW and 0.2% slope efficiency were obtained.

Laser radiation is used both for the deposition of the laser ac tive thin films and for the micro structuring to define wave guiding structures for the fabrication of waveguide lasers. Thin films of Er:ZBLAN (a glass consisting of ZrF 4 , BaF 2 , LaF 3 , AlF 3 , NaF, ErF 3 ) for green up-conversion lasers (545 nm), Nd:YAG (Y 3 Al 5 O 12 ) and Nd:GGG (Gd 3 Ga 5 O 12 ) for infrared lasers (1064 nm) are produced. Manufacturing of the laser active waveguides by micro-structuring is done using fs laser ablation of the deposited films. The structural and optical properties of the films and the damping losses of the structured waveguides are determined in view of the design and the fabrication of compact and efficient diode pumped waveguide lasers. The resulting waveguides are polishe d, provided with resonator mirrors, pumped using diode lasers and characterized. Laser operation of a ridge waveguide structure grown by pulsed laser deposition and structured by fs laser ablation is demonstrated. A 1 µm thick, 100 µm wide and 3 mm long structured waveguide consisting of amorphous neodymium-doped Gd

Waveguide lasers are manufactured using laser radiation for the deposition of thin films and the micro structuring of the wave guiding structures. For the first time laser activity in fs-laser structured amorphous waveguides was achieved.