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The 400 keV proton implantation with a fluence of 8. 0 × 1 0 1 6 ions/cm2 was applied on the Er 3 + / Yb 3 + co-doped phosphate glass to fabricate a planar waveguide structure. The mode profile at the end face of the waveguide was measured by the end-face coupling technique. The energy loss profile of the energetic protons was calculated by the SRIM 2013. The refractive index distribution was simulated by the reflectivity calculation method. Based on these results, the formation theory of the planar waveguides was discussed through simulating the energy loss distribution and analyzing the reconstructed refractive index profile, which could be used for applications in the future integrated optical systems. [ABSTRACT FROM AUTHOR]

An optical waveguide is an important dielectric device that guides the propagation of light waves. Ion implantation is a competitive waveguide preparation technique with advantages including reliance, simpleness and flexibility. In this work, a 400-keV helium ion implantation with a fluence of 6. 0 × 1 0 1 6  ions/cm2 was carried out to manufacture a planar waveguide on the surface of the fused silica glass. The formation mechanism of the waveguide was analyzed by the nuclear energy deposition based on the SRIM 2013 and the refractive index distribution with the help of the reflectivity calculation method (RCM). The geometry structure and the guiding performance of the waveguide were studied by the metallographic microscope and the end-face coupling system, respectively. The investigation on the fabrication and characteristics of fused silica glass optical waveguides is of great significance for the development of passive devices in the field of optical communications. [ABSTRACT FROM AUTHOR]

In this work, we report on the preparation and characterization of the planar and ridge optical waveguides in the E r 3+ -doped germanate glass by combining hydrogen ion implantation and precise diamond blade dicing. The nuclear energy loss and the implantation depth were calculated by the SRIM 2013 software. The refractive index profile was obtained by the reflectivity calculation method. The dark-mode spectrum and the near-field intensity distribution were measured by the prism coupling system and end-face coupling technique, respectively. This work has important reference significance for the development of E r 3+ -doped germanate glass active devices in the optical communication field.