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This brief presents a wide-range temperature sensor with process compensation and nonlinear calibration for HV chip thermal monitoring. Due to a high supply voltage and a large current, HV chips are prone to overheating; thus, they require on-chip temperature sensors to monitor thermal variation. The voltage difference between the drain and source voltages of a metal–oxide–semiconductor, i.e., VDS , of HV devices is enlarged by high supply voltages, causing a severe channel length modulation effect to jeopardize the linearity of the saturation current. The proposed calibrated temperature sensors in this brief provide a nonlinear calibration function to resolve this problem. Moreover, our design reveals a process compensation capability by the proposed process variation canceler. The maximal deviation in the range of (-40\ ^\circ\C, +150)\ ^\circ\C is measured to be -2.05\ ^\circ\C– +2.06\ ^\circ\C. [ABSTRACT FROM PUBLISHER]