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Thermal Protecting System (TPS) material, consisted of silica reinforced fibres and coated with transtion metal complex was exposed to atomic oxygen produced in Electron Cyclotron Resonance (ECR) plasma reactor. The choice of atomic oxygen is based on the necessity of investigating its inteaction with transition metal complex during the re-entry of the space vehicle. The experiments were carried out at different temperature in the range of 30-500°C. The surface morphology of the tile material was investigated with and without exposure to oxygen plasma as a function of temperature using scanning electron microscopy technique, whereas structural analysis of the same samples was carried out using x-ray diffraction technique. Prior to this, ECR plasma reactor was charectorised for electron energy and plasma density using Langmuir probe so as to know the plasma parameter during the interaction.