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Laser micromachining is getting more and more widespread in materials processing applications. For this reason, it is required for continuing improvements of this type of processing. One of the main drawbacks of laser microprocessing is that it can process only a smooth surface profile containing material when no additional system is used. To process a curved surface profile containing element the process requires a programming for each different shape of an element. However, there are other ways to implement that kind of operation. One of them is an optical surface tracking system that maintains a constant distance to the object. The purpose of this investigation is to create the optical surface tracking system with integrated conoscopic distance senson that would be suitable for laser microprocessing and to assess the properties of that system. The possibility of an optical surface tracking system application for laser microprocessing was demonstrated. It has been measured that maximum speed of processing must be less than 0,5 mm/s. Furthermore, it was observed that the object should not have sharp edges higher than 0,2 mm to ensure that system works properly. This system cannot compete against commercial this type of device due to poor speed (10 times lower). This difference can be eliminated by changing the way of conversion digital signal to analog.