1. Sensors and actuators on non-planar substrates
- Author
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Li, Wen J, Mai, John D, and Ho, Chih-Ming
- Subjects
non-planar substrate ,contoured substrate ,non-planar lithography ,flexible mask ,cylindrical substrate ,intelligent structures ,Electrical and Electronic Engineering ,Materials Engineering ,Mechanical Engineering ,Nanoscience & Nanotechnology - Abstract
The integration of MEMS sensors and actuators onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation devices onto a cylindrical surface. This novel technology encompasses the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of
- Published
- 1999