15 results on '"Mansoureh Z. Mousavi"'
Search Results
2. Label-Free Detection of Rare Cell in Human Blood Using Gold Nano Slit Surface Plasmon Resonance
- Author
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Mansoureh Z. Mousavi, Huai-Yi Chen, Hsien-San Hou, Chou-Yuan-Yuan Chang, Steve Roffler, Pei-Kuen Wei, and Ji-Yen Cheng
- Subjects
Surface Plasmon Resonance ,gold nanoslits ,rare cells ,double capture ,magnetic nanoparticles ,microfluidic chip ,Biotechnology ,TP248.13-248.65 - Abstract
Label-free detection of rare cells in biological samples is an important and highly demanded task for clinical applications and various fields of research, such as detection of circulating tumor cells for cancer therapy and stem cells studies. Surface Plasmon Resonance (SPR) as a label-free method is a promising technology for detection of rare cells for diagnosis or research applications. Short detection depth of SPR (400 nm) provides a sensitive method with minimum interference of non-targets in the biological samples. In this work, we developed a novel microfluidic chip integrated with gold nanoslit SPR platform for highly efficient immunomagnetic capturing and detection of rare cells in human blood. Our method offers simple yet efficient detection of target cells with high purity. The approach for detection consists of two steps. Target cells are firs captured on functionalized magnetic nanoparticles (MNPs) with specific antibody I. The suspension containing the captured cells (MNPs-cells) is then introduced into a microfluidic chip integrated with a gold nanoslit film. MNPs-cells bind with the second specific antibody immobilized on the surface of the gold nanoslit and are therefore captured on the sensor active area. The cell binding on the gold nanoslit was monitored by the wavelength shift of the SPR spectrum generated by the gold nanoslits.
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- 2015
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3. Multiplexed Discrimination of Single Amino Acid Residues in Polypeptides in a Single SERS Hot Spot
- Author
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Aliaksandr Hubarevich, Francesco De Angelis, Mansoureh Z. Mousavi, Giorgia Giovannini, Jian-An Huang, Walter Rocchia, Yingqi Zhao, Miguel A. Soler, and Denis Garoli
- Subjects
Nanohole ,Metal Nanoparticles ,amino acids ,molecular dynamics ,proteins ,Raman spectroscopy ,single-molecule sequencing ,Hot spot (veterinary medicine) ,Molecular Dynamics Simulation ,Spectrum Analysis, Raman ,010402 general chemistry ,01 natural sciences ,Catalysis ,Molecular dynamics ,chemistry.chemical_compound ,Limit of Detection ,Aromatic amino acids ,Molecule ,Single amino acid ,Amino Acids ,chemistry.chemical_classification ,010405 organic chemistry ,Aromaticity ,General Medicine ,General Chemistry ,0104 chemical sciences ,Amino acid ,chemistry ,Biophysics ,Gold ,Peptides - Abstract
The SERS-based detection of protein sequences with single-residue sensitivity suffers from signal dominance of aromatic amino acid residues and backbones, impeding detection of non-aromatic amino acid residues. Herein, we trap a gold nanoparticle in a plasmonic nanohole to generate a single SERS hot spot for single-molecule detection of 2 similar polypeptides (vasopressin and oxytocin) and 10 distinct amino acids that constitute the 2 polypeptides. Significantly, both aromatic and non-aromatic amino acids are detected and discriminated at the single-molecule level either at individual amino acid molecules or within the polypeptide chains. Correlated with molecular dynamics simulations, our results suggest that the signal dominance due to large spatial occupancy of aromatic rings of the polypeptide sidechains on gold surfaces can be overcome by the high localization of the single hot spot. The superior spectral and spatial discriminative power of our approach can be applied to single-protein analysis, fingerprinting, and sequencing.
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- 2020
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4. Live Intracellular Biorthogonal Imaging by Surface Enhanced Raman Spectroscopy using Alkyne-Silver Nanoparticles Clusters
- Author
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Giulia Bruno, Giovanni Melle, Francesco De Angelis, Nicolò Maccaferri, Denis Garoli, Matteo Ardini, Lea Pasquale, Valeria Caprettini, Carlos S. Sánchez, Mansoureh Z. Mousavi, and Jian-An Huang
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0301 basic medicine ,Cytoplasm ,Silver ,Surface Properties ,Biotechnologie [F06] [Sciences du vivant] ,Dopamine ,Metal Nanoparticles ,Nanoparticle ,Alkyne ,lcsh:Medicine ,02 engineering and technology ,Article ,Silver nanoparticle ,Mice ,03 medical and health sciences ,symbols.namesake ,Colloid ,Animals ,Biotechnology [F06] [Life sciences] ,lcsh:Science ,Raman ,chemistry.chemical_classification ,Multidisciplinary ,Assay systems ,Spectrum Analysis ,Biomolecule ,lcsh:R ,Alkynes ,Molecular Imaging ,NIH 3T3 Cells ,Spectrum Analysis, Raman ,Surface-enhanced Raman spectroscopy ,Condensed Matter Physics ,021001 nanoscience & nanotechnology ,3. Good health ,030104 developmental biology ,chemistry ,symbols ,Biophysics ,Nanoparticles ,lcsh:Q ,0210 nano-technology ,Raman spectroscopy ,Den kondenserade materiens fysik ,Intracellular - Abstract
Live intracellular imaging is a valuable tool in modern diagnostics and pharmacology. Surface Enhanced Raman Spectroscopy (SERS) stands out as a non-destructive and multiplexed technique, but intracellular SERS imaging still suffers from interfering background from endogenous components. Here we show the assembly of small colloidal SERS probes with Raman signal in the cell-silent window of 1800–2900 cm−1 for biorthogonal intracellular SERS imaging of dopamine that was undistinguishable from the endogenous cell background. By linking colloidal silver nanoparticles with alkyne-dopamine adducts, clusters are formed by 2–6 nanoparticles spaced by tight interparticle gaps that exhibited high electric field enhancement and strong SERS signals of alkyne and dopamines. Due to the cell-silent signals of the alkyne, intracellular in-vitro Raman imaging shows that the dopamines on the internalized clusters remain distinguishable across the cytoplasm with good spatial resolution. Our method can be a general-purpose method for real-time imaging of biomolecules, such as proteins, peptides, DNA and drugs.
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- 2018
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5. Multiplex detection of urinary miRNA biomarkers by transmission surface plasmon resonance
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Hsi Hsien Chen, Ji-Yen Cheng, Wing Kiu Yeung, Heng Lin, Pei-Kuen Wei, Kuang Li Lee, Huai Yi Chen, Mansoureh Z. Mousavi, Juan Jie Sun, and Tung-Han Hsieh
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Materials science ,High interest ,Area change ,Microfluidics ,Metal Nanoparticles ,Nanotechnology ,Biosensing Techniques ,02 engineering and technology ,01 natural sciences ,Biochemistry ,Analytical Chemistry ,Lab-On-A-Chip Devices ,Electrochemistry ,Humans ,Environmental Chemistry ,Multiplex ,Surface plasmon resonance ,Spectroscopy ,010401 analytical chemistry ,technology, industry, and agriculture ,Surface Plasmon Resonance ,021001 nanoscience & nanotechnology ,0104 chemical sciences ,Signal enhancement ,MicroRNAs ,Transmission (telecommunications) ,Gold ,0210 nano-technology ,Biosensor ,Biomarkers - Abstract
The clinical assessment of short-stranded nucleic acid biomarkers such as miRNAs could potentially provide useful information for monitoring disease progression, prompting definitive treatment decisions. In the past decade, advancements in biosensing technology have led to a shift towards rapid, real-time and label-free detection systems; as such, surface plasmon resonance (SPR) biosensor-based technology has become of high interest. Here, we developed an automated multiplex transmissive surface plasmon resonance (t-SPR) platform with the use of a capped gold nanoslit integrated microfluidic surface plasmon resonance (SPR) biosensor. The automated platform was custom designed to allow the analysis of spectral measurements using wavelength shift (dλ), intensity (dI) and novel area change (dA) for surface binding reactions. A simple and compact nanostructure based biosensor was fabricated with multiplex real-time detection capabilities. The sensitivity and specificity of the microfluidic device was demonstrated through the use of functionalised AuNPs for target molecule isolation and signal enhancement in combination with probes on the CG nanoslit surface. Our work allows for the multiplex detection of miRNA at femtomolar concentrations in complex media such as urine.
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- 2018
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6. SERS discrimination of single DNA bases in single oligonucleotides by electro-plasmonic trapping
- Author
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Aliaksandr Hubarevich, Francesco De Angelis, Mansoureh Z. Mousavi, Fatima Omeis, Giorgia Giovannini, Denis Garoli, Yingqi Zhao, Jian-An Huang, and Moritz Schütte
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Optics and Photonics ,Materials science ,Guanine ,Optical Tweezers ,Science ,General Physics and Astronomy ,Nanoparticle ,Metal Nanoparticles ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,Spectrum Analysis, Raman ,01 natural sciences ,General Biochemistry, Genetics and Molecular Biology ,Article ,Nucleobase ,symbols.namesake ,chemistry.chemical_compound ,Cytosine ,Nanopores ,A-DNA ,lcsh:Science ,Nanophotonics and plasmonics ,Multidisciplinary ,Oligonucleotide ,Adenine ,technology, industry, and agriculture ,General Chemistry ,DNA ,021001 nanoscience & nanotechnology ,Single Molecule Imaging ,0104 chemical sciences ,Nanopore ,chemistry ,Optical manipulation and tweezers ,Colloidal gold ,Raman spectroscopy ,symbols ,lcsh:Q ,Gold ,0210 nano-technology ,Thymine - Abstract
Surface-enhanced Raman spectroscopy (SERS) sensing of DNA bases by plasmonic nanopores could pave a way to novel methods for DNA analyses and new generation single-molecule sequencing platforms. The SERS discrimination of single DNA bases depends critically on the time that a DNA strand resides within the plasmonic hot spot. In fact, DNA molecules flow through the nanopores so rapidly that the SERS signals collected are not sufficient for single-molecule analysis. Here, we report an approach to control the residence time of molecules in the hot spot by an electro-plasmonic trapping effect. By directly adsorbing molecules onto a gold nanoparticle and then trapping the single nanoparticle in a plasmonic nanohole up to several minutes, we demonstrate single-molecule SERS detection of all four DNA bases as well as discrimination of single nucleobases in a single oligonucleotide. Our method can be extended easily to label-free sensing of single-molecule amino acids and proteins., Sensing DNA bases by surface-enhanced Raman spectroscopy (SERS) in plasmonic nanopores has suffered from rapid flow through of molecules. Here, the authors attach DNA molecules to gold nanoparticles which, due to electro-plasmonic trapping, allow for controlled residence times and discrimination of single nucleotides.
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- 2019
7. High-Quality Surface Micromachining on Polymer Using Visible-LIBWE
- Author
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Mansoureh Z. Mousavi, Ji-Yen Cheng, Meng-Hua Yen, Wei-Chen Kao, Klaus Zimmer, Taiwan Rot, and Hui-Fang Chang
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Materials science ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Industrial and Manufacturing Engineering ,Manufacturing engineering ,0104 chemical sciences ,Microbial genomics ,Surface micromachining ,Electrical and Electronic Engineering ,0210 nano-technology ,Instrumentation ,Research center - Abstract
Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan ROT Email: jycheng@gate.sinica.edu.tw 2 Institute of Biophotonics, National Yang-Ming University, Taipei 11221, Taiwan 3 Biophotonics & Molecular Imaging Research Center (BMIRC), National Yang-Ming University, Taipei 11221, Taiwan 4 Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan 5 Ph.D. Program in Microbial Genomics, National Chung Hsing University, 402, Taichung, Taiwan 6 Leibniz-Institut fur Oberflachenmodifizierung e.V. Permoserstrase 15, 04318 Leipzig, Germany
- Published
- 2016
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8. Label-Free Detection of Rare Cell in Human Blood Using Gold Nano Slit Surface Plasmon Resonance
- Author
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Hsien-San Hou, Huai-Yi Chen, Steve R. Roffler, Chou-Yuan-Yuan Chang, Pei-Kuen Wei, Ji-Yen Cheng, and Mansoureh Z. Mousavi
- Subjects
Rare cell ,magnetic nanoparticles ,Materials science ,lcsh:Biotechnology ,Clinical Biochemistry ,Metal Nanoparticles ,Nanotechnology ,Biosensing Techniques ,microfluidic chip ,Article ,double capture ,lcsh:TP248.13-248.65 ,Lab-On-A-Chip Devices ,Nano ,Humans ,Surface plasmon resonance ,Label free ,Blood Cells ,Human blood ,gold nanoslits ,General Medicine ,Surface Plasmon Resonance ,rare cells ,Slit ,Microfluidic chip ,Magnetic nanoparticles ,Gold ,Blood Chemical Analysis - Abstract
Label-free detection of rare cells in biological samples is an important and highly demanded task for clinical applications and various fields of research, such as detection of circulating tumor cells for cancer therapy and stem cells studies. Surface Plasmon Resonance (SPR) as a label-free method is a promising technology for detection of rare cells for diagnosis or research applications. Short detection depth of SPR (400 nm) provides a sensitive method with minimum interference of non-targets in the biological samples. In this work, we developed a novel microfluidic chip integrated with gold nanoslit SPR platform for highly efficient immunomagnetic capturing and detection of rare cells in human blood. Our method offers simple yet efficient detection of target cells with high purity. The approach for detection consists of two steps. Target cells are firs captured on functionalized magnetic nanoparticles (MNPs) with specific antibody I. The suspension containing the captured cells (MNPs-cells) is then introduced into a microfluidic chip integrated with a gold nanoslit film. MNPs-cells bind with the second specific antibody immobilized on the surface of the gold nanoslit and are therefore captured on the sensor active area. The cell binding on the gold nanoslit was monitored by the wavelength shift of the SPR spectrum generated by the gold nanoslits.
- Published
- 2015
- Full Text
- View/download PDF
9. Urinary micro-RNA biomarker detection using capped gold nanoslit SPR in a microfluidic chip
- Author
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Ji-Yen Cheng, Hsiao Fen Li, Huai Yi Chen, Pei-Kuen Wei, Mansoureh Z. Mousavi, Heng Lin, Kuang Li Lee, Hsi Hsien Chen, Yuh Feng Lin, and Chung Shun Wong
- Subjects
Models, Molecular ,Base Pair Mismatch ,Metal Nanoparticles ,Nanotechnology ,Biochemistry ,Analytical Chemistry ,Lab-On-A-Chip Devices ,microRNA ,Electrochemistry ,Humans ,Environmental Chemistry ,Surface plasmon resonance ,Spectroscopy ,Volume concentration ,Noninvasive biomarkers ,Chemistry ,Nucleic Acid Hybridization ,Acute Kidney Injury ,Surface Plasmon Resonance ,Signal enhancement ,MicroRNAs ,Chronic disease ,Microfluidic chip ,Chronic Disease ,Nucleic Acid Conformation ,Biomarker (medicine) ,Gold ,Biomarkers ,Biomedical engineering - Abstract
Successful diagnosis and treatment of many diseases depends on the availability of sensitive, reliable and low cost tools for the detection of the biomarkers associated with the diseases. Simple methods that use non-invasive biological samples are especially suitable for the deployment in the clinical environment. In this paper we demonstrate the application of a method that employs a capped gold nanoslit surface plasmon resonance (SPR) sensor and a microfluidic chip for the detection of a urinary nucleic acid biomarker in clinical samples. This method detects low concentrations of the biomarker in a relatively large volume (∼1 mL) of the sample. The method utilizes magnetic nanoparticles (MNPs) for the isolation of target molecules and signal enhancement in conjunction with surface plasmon resonance (SPR) on capped gold nanoslits. The ability of the method to detect urinary miRNA-16-5p in AKI patients was tested and the result was compared with the data obtained with the polymerase chain reaction (PCR). miRNA-16-5p has been found to be a specific and noninvasive biomarker for acute kidney injury (AKI). Our method allows the detection of the biomarker in the urine of AKI patients without amplification and labeling of the target molecules.
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- 2015
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10. Sensing of nucleic acids and cancer cells using nanostructure-SPR integrated with microfluidic chip
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Mansoureh Z. Mousavi and Ji-Yen Cheng
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Sensor system ,Materials science ,Nanostructure ,Microfluidic chip ,Microfluidics ,Nucleic acid ,Nanotechnology ,Surface plasmon resonance ,Biosensor ,Plasmon - Abstract
In this chapter we will discuss some of the most promising label-free technologies with significant impact on the field of biosensing and diagnostics, namely, conventional surface plasmon resonance (SPR), localized surface plasmon resonance (LSPR) and nanostructure SPR arrays. Development of SPR biosensing technology is focused on improving sensitivity, miniaturizing the sensor system, tuning the operation range and high throughput detection [5]. We will discuss plasmonic-based biosensors and their integration with microfluidic chip. The application of SPR sensing platforms integrated with microfluidic chips for detection of nucleic acid and cells will be described in detail. Lastly, we will describe the current state of the art of plasmonic biosensors and give a perspective on the future of this technology for POC diagnostics.
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- 2016
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11. Blue Light Plasma Emission During LIBWE Using 532 nm Q-switched Nanosecond Laser
- Author
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Hsieh-Fu Tsai, Chun-Ying Wu, Ji-Yen Cheng, and Mansoureh Z. Mousavi
- Subjects
Biophotonics ,Materials science ,Electrical and Electronic Engineering ,Nanosecond laser ,Instrumentation ,Engineering physics ,Industrial and Manufacturing Engineering ,Blue light - Abstract
1Research Center for Applied Sciences, Academia Sinica Taiwan, 128 Sec.2 Academia Rd. Taipei City 11529, Taiwan jycheng@gate.sinica.edu.tw 2Department of Mechanical and Mechantronic Engineering, National Taiwan Ocean University 3Institute of Biophotonics, National Yang-Ming University 4Department of Chemistry, National Taiwan University 5Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica Taiwan
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- 2012
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12. Author Correction: Live Intracellular Biorthogonal Imaging by Surface Enhanced Raman Spectroscopy using Alkyne-Silver Nanoparticles Clusters
- Author
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Lea Pasquale, Francesco De Angelis, Denis Garoli, Valeria Caprettini, Matteo Ardini, Jian-An Huang, Giovanni Melle, Mansoureh Z. Mousavi, Giulia Bruno, Nicolò Maccaferri, and Carlos S. Sánchez
- Subjects
Cytoplasm ,Silver ,Materials science ,Surface Properties ,Dopamine ,Metal Nanoparticles ,Alkyne ,lcsh:Medicine ,Spectrum Analysis, Raman ,Photochemistry ,Silver nanoparticle ,Mice ,03 medical and health sciences ,0302 clinical medicine ,Animals ,Author Correction ,lcsh:Science ,030304 developmental biology ,chemistry.chemical_classification ,0303 health sciences ,Multidisciplinary ,lcsh:R ,Surface-enhanced Raman spectroscopy ,Molecular Imaging ,chemistry ,Alkynes ,Biorthogonal system ,NIH 3T3 Cells ,ComputingMethodologies_DOCUMENTANDTEXTPROCESSING ,lcsh:Q ,030217 neurology & neurosurgery ,Intracellular - Abstract
Live intracellular imaging is a valuable tool in modern diagnostics and pharmacology. Surface Enhanced Raman Spectroscopy (SERS) stands out as a non-destructive and multiplexed technique, but intracellular SERS imaging still suffers from interfering background from endogenous components. Here we show the assembly of small colloidal SERS probes with Raman signal in the cell-silent window of 1800-2900 cm
- Published
- 2018
- Full Text
- View/download PDF
13. Magnetic nanoparticle-enhanced SPR on gold nanoslits for ultra-sensitive, label-free detection of nucleic acid biomarkers
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Ji-Yen Cheng, Huai-Yi Chen, Pei-Kuen Wei, Mansoureh Z. Mousavi, Kuang-Li Lee, Shih-Wei Peng, and Shu-Han Wu
- Subjects
Lung Neoplasms ,Nanoparticle ,Nanotechnology ,Adenocarcinoma ,Heterogeneous ribonucleoprotein particle ,Biochemistry ,Sensitivity and Specificity ,Heterogeneous-Nuclear Ribonucleoproteins ,Analytical Chemistry ,Cell Line, Tumor ,Electrochemistry ,Environmental Chemistry ,Molecule ,Humans ,RNA, Messenger ,Surface plasmon resonance ,Magnetite Nanoparticles ,Lung ,Spectroscopy ,Messenger RNA ,Chemistry ,RNA ,Surface Plasmon Resonance ,Nucleic acid ,Biophysics ,Magnetic nanoparticles ,Gold - Abstract
We have demonstrated a detection method for the ultra-sensitive detection of an mRNA biomarker. The method utilizes functionalized magnetic nanoparticles (MNPs) for signal enhancement in conjunction with surface plasmon resonance (SPR) on gold nanoslits. The approach for detection includes double hybridization at two different specific locations in two steps. First, the biomarker target molecule is captured with MNPs, and second, MNPs carrying the target molecule are introduced to the SPR chip to hybridize with probes immobilized on the gold nanoslits. In this work, MNPs were applied for a dual purpose: to isolate the target molecule from the sample matrix to prevent non-specific binding and to enhance the SPR response. Gold nanoslits that provide SPR sensing were fabricated by nanoimprinting lithography on polycarbonate (PC) film. The film was integrated with a microliter volume microfluidic chip to form the SPR detection chip. This detection method was used to detect mRNA heterogeneous nuclear ribonucleoproteins (hnRNP B1) in two cancer cell lines, CL1-0 and CL1-5. hnRNP B1 is an mRNA biomarker that is overexpressed in lung cancer tissue in the early stage of cancer and can be found in the serum and plasma of lung cancer patients. A synthetic target molecule and extracted total RNA from the cell lines were used as samples. Without amplification and labeling of the target molecule, the SPR results demonstrate a specific and sensitive method for the detection of hnRNP B1 mRNA in extracted RNA from the two selected cell lines. The method is capable of measuring down to 30 fM of the target molecule in a 7 μl sample (corresponding to 1.26 × 10(5) molecules) without amplification and labeling of the target molecule.
- Published
- 2013
14. A (13)C solid-state NMR analysis of vitamin D compounds
- Author
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Der-Lii M. Tzou, Mansoureh Z. Mousavi, and Steve S.-F. Yu
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Models, Molecular ,Nuclear and High Energy Physics ,Radiation ,Magnetic Resonance Spectroscopy ,Chemistry ,Stereochemistry ,Carbon-13 NMR satellite ,Molecular Conformation ,General Chemistry ,Fluorine-19 NMR ,Nuclear magnetic resonance spectroscopy ,Carbon-13 NMR ,Crystallography ,Heteronuclear molecule ,Solid-state nuclear magnetic resonance ,Anisotropy ,Computer Simulation ,Singlet state ,Vitamin D ,Instrumentation ,Conformational isomerism - Abstract
(13)C cross-polarization/magic-angle spinning (CP/MAS) solid-state NMR spectroscopy has been employed to analyze four vitamin D compounds, namely vitamin D3 (D3), vitamin D2 (D2), and the precursors ergosterol (Erg) and 7-dehydrocholesterol (7DHC). The (13)C NMR spectrum of D3 displays a doublet pattern for each of the carbon atoms, while that of Erg contains both singlet and doublet patterns. In the cases of 7DHC and D2, the (13)C spectra display various multiplet patterns, viz. singlets, doublets, triplets, and quartets. To overcome the signal overlap between the (13)C resonances of protonated and unprotonated carbons, we have subjected these vitamin D compounds to 1D (1)H-filtered (13)C CP/MAS and {(1)H}/(13)C heteronuclear correlation (Hetcor) NMR experiments. As a result, assisted by solution NMR data, all of the (13)C resonances have been successfully assigned to the respective carbon atoms of these vitamin D compounds. The (13)C multiplets are interpreted due to the presence of s-cis and s-trans configurations in the alpha- and beta-molecular conformers, consistent with computer molecular modeling determined by molecular dynamics and energy minimization calculations. To further characterize the ring conformations in D3, we have successfully extracted chemical shift tensor elements for the (13)C doublets. It is demonstrated that (13)C solid-state NMR spectroscopy provides a robust and high sensitive means of characterizing molecular conformations in vitamin D compounds.
- Published
- 2009
15. Blue light emission from a glass/liquid interface for real-time monitoring of a laser-induced etching process
- Author
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Ji-Yen Cheng, Chun-Ying Wu, Hsieh-Fu Tsai, and Mansoureh Z. Mousavi
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Chemistry ,Borosilicate glass ,Mechanical Engineering ,Analytical chemistry ,Plasma ,Nanosecond ,Laser ,Emission intensity ,Electronic, Optical and Magnetic Materials ,law.invention ,Mechanics of Materials ,law ,Etching (microfabrication) ,Scientific method ,Electrical and Electronic Engineering ,Reactive-ion etching - Abstract
An organic dye, Oil-Red-O, dissolved in p-xylene was used for laser-induced backside wet etching using a visible laser (visible-LIBWE) for the first time. Blue light (360–500 nm) emission from the glass/liquid interface was observed during the etching of borosilicate glass using a nanosecond Q-switched green laser. The emission was confirmed to accompany the etching process. The UV–visible spectrum consists of characteristic peaks of metals, which are the components of the glass. The maximal emission intensity occurs when the laser focusing is at the glass/liquid interface. The etching threshold measured by observing the blue light emission is comparable to that determined by the traditional method. We concluded that the emission is the plasma emission of the etched glass. By measuring the plasma emission, the occurrence of the etching and the crack formation in the glass can be monitored in real time.
- Published
- 2011
- Full Text
- View/download PDF
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