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On-chip photonic processors for neural networks have potential benefits in both speed and energy efficiency but have not yet reached the scale at which they can outperform electronic processors. The dominant paradigm for designing on-chip photonics is to make networks of relatively bulky discrete components connected by one-dimensional waveguides. A far more compact alternative is to avoid explicitly defining any components and instead sculpt the continuous substrate of the photonic processor to directly perform the computation using waves freely propagating in two dimensions. We propose and demonstrate a device whose refractive index as a function of space, $n(x,z)$, can be rapidly reprogrammed, allowing arbitrary control over the wave propagation in the device. Our device, a 2D-programmable waveguide, combines photoconductive gain with the electro-optic effect to achieve massively parallel modulation of the refractive index of a slab waveguide, with an index modulation depth of $10^{-3}$ and approximately $10^4$ programmable degrees of freedom. We used a prototype device with a functional area of $12\,\text{mm}^2$ to perform neural-network inference with up to 49-dimensional input vectors in a single pass, achieving 96% accuracy on vowel classification and 86% accuracy on $7 \times 7$-pixel MNIST handwritten-digit classification. This is a scale beyond that of previous photonic chips relying on discrete components, illustrating the benefit of the continuous-waves paradigm. In principle, with large enough chip area, the reprogrammability of the device's refractive index distribution enables the reconfigurable realization of any passive, linear photonic circuit or device. This promises the development of more compact and versatile photonic systems for a wide range of applications, including optical processing, smart sensing, spectroscopy, and optical communications.

Photonic integrated circuits with second-order ($\chi^{(2)}$) nonlinearities are rapidly scaling to remarkably low powers. At this time, state-of-the-art devices achieve saturated nonlinear interactions with thousands of photons when driven by continuous-wave lasers, and further reductions in these energy requirements enabled by the use of ultrafast pulses may soon push nonlinear optics into the realm of single-photon nonlinearities. This tutorial reviews these recent developments in ultrafast nonlinear photonics, discusses design strategies for realizing few-photon nonlinear interactions, and presents a unified treatment of ultrafast quantum nonlinear optics using a framework that smoothly interpolates from classical behaviors to the few-photon scale. These emerging platforms for quantum optics fundamentally differ from typical realizations in cavity quantum electrodynamics due to the large number of coupled optical modes. Classically, multimode behaviors have been well studied in nonlinear optics, with famous examples including soliton formation and supercontinuum generation. In contrast, multimode quantum systems exhibit a far greater variety of behaviors, and yet closed-form solutions are even sparser than their classical counterparts. In developing a framework for ultrafast quantum optics, we will identify what behaviors carry over from classical to quantum devices, what intuition must be abandoned, and what new opportunities exist at the intersection of ultrafast and quantum nonlinear optics. While this article focuses on establishing connections between the classical and quantum behaviors of devices with $\chi^{(2)}$ nonlinearities, the frameworks developed here are general and are readily extended to the description of dynamical processes based on third-order ($\chi^{(3)}$) nonlinearities., Comment: The first two authors contributed equally to this work; 183 pages, 55 figures

Over the last few decades, nonlinear optics has become significantly more nonlinear, traversing nearly a billionfold improvement in energy efficiency, with ultrafast nonlinear nanophotonics in particular emerging as a frontier for combining both spatial and temporal engineering. At present, cutting-edge experiments in nonlinear nanophotonics place us just above the mesoscopic regime, where a few hundred photons suffice to trigger nonlinear saturation. In contrast to classical or deep-quantum optics, the mesoscale is characterized by dynamical interactions between mean-field, Gaussian, and non-Gaussian quantum features, all within a close hierarchy of scales. When combined with the inherent multimode complexity of optical fields, such hybrid quantum-classical dynamics present theoretical, experimental, and engineering challenges to the contemporary framework of quantum optics. In this review, we highlight the unique physics that emerges in multimode nonlinear optics at the mesoscale and outline key principles for exploiting both classical and quantum features to engineer novel functionalities. We briefly survey the experimental landscape and draw attention to outstanding technical challenges in materials, dispersion engineering, and device design for accessing mesoscopic operation. Finally, we speculate on how these capabilities might usher in some new paradigms in quantum photonics, from quantum-augmented information processing to nonclassical-light-driven dynamics and phenomena to all-optical non-Gaussian measurement and sensing. The physics unlocked at the mesoscale present significant challenges and opportunities in theory and experiment alike, and this review is intended to serve as a guidepost as we begin to navigate this new frontier in ultrafast quantum nonlinear optics., Comment: The first two authors contributed equally to this work; 26 pages, 7 figures

Quantum optical technologies promise advances in sensing, computing, and communication. A key resource is squeezed light, where quantum noise is redistributed between optical quadratures. We introduce a monolithic, chip-scale platform that exploits the $\chi^{(2)}$ nonlinearity of a thin-film lithium niobate (TFLN) resonator device to efficiently generate squeezed states of light. Our system integrates all essential components -- except for the laser and two detectors -- on a single chip with an area of one square centimeter, significantly reducing the size, operational complexity, and power consumption associated with conventional setups. Our work addresses challenges that have limited previous integrated nonlinear photonic implementations that rely on either $\chi^{(3)}$ nonlinear resonators or on integrated waveguide $\chi^{(2)}$ parametric amplifiers. Using the balanced homodyne measurement subsystem that we implemented on the same chip, we measure a squeezing of 0.55 dB and an anti-squeezing of 1.55 dB. We use 20 mW of input power to generate the parametric oscillator pump field by employing second harmonic generation on the same chip. Our work represents a substantial step toward compact and efficient quantum optical systems posed to leverage the rapid advances in integrated nonlinear and quantum photonics., Comment: 21 pages; 4 figures in main body, 8 supplementary figures

In situ tunable photonic filters and memories are important for emerging quantum and classical optics technologies. However, most photonic devices have fixed resonances and bandwidths determined at the time of fabrication. Here we present an in situ tunable optical resonator on thin-film lithium niobate. By leveraging the linear electro-optic effect, we demonstrate widely tunable control over resonator frequency and bandwidth on two different devices. We observe up to $\sim50\times$ tuning in the bandwidth over $\sim50$ V with linear frequency control of $\sim230$ MHz/V. We also develop a closed-form model predicting the tuning behavior of the device. This paves the way for rapid phase and amplitude control over light transmitted through our device., Comment: 22 pages, 11 figure, 2 tables

Mid-infrared spectroscopy, an important and widespread technique for sensing molecules, has encountered barriers stemming from sources either limited in tuning range or excessively bulky for practical field use. We present a compact, efficient, and broadly tunable optical parametric oscillator (OPO) device surmounting these challenges. Leveraging a dispersion-engineered singly-resonant OPO implemented in thin-film lithium niobate-on-sapphire, we achieve broad and controlled tuning over an octave, from 1.5 to 3.3 microns by combining laser and temperature tuning. The device generates > 25 mW of mid-infrared light at 3.2 microns, offering a power conversion efficiency of 15% (45% quantum efficiency). We demonstrate the tuning and performance of the device by successfully measuring the spectra of methane and ammonia, verifying our approach's relevance for gas sensing. Our device signifies an important advance in nonlinear photonics miniaturization and brings practical field applications of high-speed and broadband mid-infrared spectroscopy closer to reality., Comment: 19 pages, 11 figures

Lithium niobate is a promising material for developing quantum acoustic technologies due to its strong piezoelectric effect and availability in the form of crystalline thin films of high quality. However, at radio frequencies and cryogenic temperatures, these resonators are limited by the presence of decoherence and dephasing due to two-level systems. To mitigate these losses and increase device performance, a more detailed picture of the microscopic nature of these loss channels is needed. In this study, we fabricate several lithium niobate acoustic wave resonators and apply different processing steps that modify their surfaces. These treatments include argon ion sputtering, annealing, and acid cleans. We characterize the effects of these treatments using three surface-sensitive measurements: cryogenic microwave spectroscopy measuring density and coupling of TLS to mechanics, x-ray photoelectron spectroscopy and atomic force microscopy. We learn from these studies that, surprisingly, increases of TLS density may accompany apparent improvements in the surface quality as probed by the latter two approaches. Our work outlines the importance that surfaces and fabrication techniques play in altering acoustic resonator coherence, and suggests gaps in our understanding as well as approaches to address them., Comment: 10 pages, 7 figures

The quantum noise of light fundamentally limits optical phase sensors. A semiclassical picture attributes this noise to the random arrival time of photons from a coherent light source such as a laser. An engineered source of squeezed states suppresses this noise and allows sensitivity beyond the standard quantum limit (SQL) for phase detection. Advanced gravitational wave detectors like LIGO have already incorporated such sources, and nascent efforts in realizing quantum biological measurements have provided glimpses into new capabilities emerging in quantum measurement. We need ways to engineer and use quantum light within deployable quantum sensors that operate outside the confines of a lab environment. Here we present a photonic integrated circuit fabricated in thin-film lithium niobate that provides a path to meet these requirements. We use the second-order nonlinearity to produce a squeezed state at the same frequency as the pump light and realize circuit control and sensing with electro-optics. Using a 26.2 milliwatts of optical power, we measure (2.7 $\pm$ 0.2 )$\%$ squeezing and apply it to increase the signal-to-noise ratio of phase measurement. We anticipate that on-chip photonic systems like this, which operate with low power and integrate all of the needed functionality on a single die, will open new opportunities for quantum optical sensing., Comment: 14 pages, 3+3 figures

A quantum network that distributes and processes entanglement would enable powerful new computers and sensors. Optical photons with a frequency of a few hundred terahertz are perhaps the only way to distribute quantum information over long distances. Superconducting qubits on the other hand, which are one of the most promising approaches for realizing large-scale quantum machines, operate naturally on microwave photons that have roughly $40,000$ times less energy. To network these quantum machines across appreciable distances, we must bridge this frequency gap and learn how to generate entanglement across widely disparate parts of the electromagnetic spectrum. Here we implement and demonstrate a transducer device that can generate entanglement between optical and microwave photons, and use it to show that by detecting an optical photon we add a single photon to the microwave field. We achieve this by using a gigahertz nanomechanical resonance as an intermediary, and efficiently coupling it to optical and microwave channels through strong optomechanical and piezoelectric interactions. We show continuous operation of the transducer with $5\%$ frequency conversion efficiency, and pulsed microwave photon generation at a heralding rate of $15$ hertz. Optical absorption in the device generates thermal noise of less than two microwave photons. Joint measurements on optical photons from a pair of transducers would realize entanglement generation between distant microwave-frequency quantum nodes. Improvements of the system efficiency and device performance, necessary to realize a high rate of entanglement generation in such networks are within reach., Comment: 18 pages, 12 figures, 1 table

Thin-film lithium niobate (TFLN) is an emerging platform for compact, low-power nonlinear-optical devices, and has been used extensively for near-infrared frequency conversion. Recent work has extended these devices to mid-infrared wavelengths, where broadly tunable sources may be used for chemical sensing. To this end, we demonstrate efficient and broadband difference frequency generation between a fixed 1-micron pump and a tunable telecom source in uniformly-poled TFLN-on-sapphire by harnessing the dispersion-engineering available in tightly-confining waveguides. We show a simultaneous 1-2 order-of-magnitude improvement in conversion efficiency and ~5-fold enhancement of operating bandwidth for mid-infrared generation when compared to conventional lithium niobate waveguides. We also examine the effects of mid-infrared loss from surface-adsorbed water on the performance of these devices., Comment: 5 pages, 4 figures

Integrated photonics operating at visible-near-infrared (VNIR) wavelengths offer scalable platforms for advancing optical systems for addressing atomic clocks, sensors, and quantum computers. The complexity of free-space control optics causes limited addressability of atoms and ions, and this remains an impediment on scalability and cost. Networks of Mach-Zehnder interferometers can overcome challenges in addressing atoms by providing high-bandwidth electro-optic control of multiple output beams. Here, we demonstrate a VNIR Mach-Zehnder interferometer on lithium niobate on sapphire with a CMOS voltage-level compatible full-swing voltage of 4.2 V and an electro-optic bandwidth of 2.7 GHz occupying only 0.35 mm$^2$. Our waveguides exhibit 1.6 dB/cm propagation loss and our microring resonators have intrinsic quality factors of 4.4 $\times$ 10$^5$. This specialized platform for VNIR integrated photonics can open new avenues for addressing large arrays of qubits with high precision and negligible cross-talk., Comment: 10 pages, 4 figures

We demonstrate second harmonic generation of blue light on an integrated thin-film lithium niobate waveguide and observe a conversion efficiency of $\eta_0= 33000\%/\text{W-cm}^2$, significantly exceeding previous demonstrations., Comment: 3 pages, 2 figures, 6 references

Periodically poled thin-film lithium niobate (TFLN) waveguides have emerged as a leading platform for highly efficient frequency conversion in the near-infrared. However, the commonly used silica bottom-cladding results in high absorption loss at wavelengths beyond 2.5 $\mu$m. In this work, we demonstrate efficient frequency conversion in a TFLN-on-sapphire platform, which features high transparency up to 4.5 $\mu$m. In particular, we report generating mid-infrared light up to 3.66 $\mu$m via difference-frequency generation of a fixed 1-$\mu$m source and a tunable telecom source, with normalized efficiencies up to 200%/W-cm$^2$. These results show TFLN-on-sapphire to be a promising platform for integrated nonlinear nanophotonics in the mid-infrared., Comment: The first four authors contributed equally to this work. 5 pages, 3 figures

Second-order nonlinear optical processes are used to convert light from one wavelength to another and to generate quantum entanglement. Creating chip-scale devices to more efficiently realize and control these interactions greatly increases the reach of photonics. Optical crystals and guided wave devices made from lithium niobate and potassium titanyl phosphate are typically used to realize second-order processes but face significant drawbacks in scalability, power, and tailorability when compared to emerging integrated photonic systems. Silicon or silicon nitride integrated photonic circuits enhance and control the third-order optical nonlinearity by confining light in dispersion-engineered waveguides and resonators. An analogous platform for second-order nonlinear optics remains an outstanding challenge in photonics. It would enable stronger interactions at lower power and reduce the number of competing nonlinear processes that emerge. Here we demonstrate efficient frequency doubling and parametric oscillation in a thin-film lithium niobate photonic circuit. Our device combines recent progress on periodically poled thin-film lithium niobate waveguidesand low-loss microresonators. Here we realize efficient >10% second-harmonic generation and parametric oscillation with microwatts of optical power using a periodically-poled thin-film lithium niobate microresonator. The operating regimes of this system are controlled using the relative detuning of the intracavity resonances. During nondegenerate oscillation, the emission wavelength is tuned over terahertz by varying the pump frequency by 100's of megahertz. We observe highly-enhanced effective third-order nonlinearities caused by cascaded second-order processes resulting in parametric oscillation. These resonant second-order nonlinear circuits will form a crucial part of the emerging nonlinear and quantum photonics platforms., Comment: 14 pages, 8 figures. Equal contribution by the first two authors

A room-temperature mechanical oscillator undergoes thermal Brownian motion with an amplitude much larger than the amplitude associated with a single phonon of excitation. This motion can be read out and manipulated using laser light using a cavity-optomechanical approach. By performing a strong quantum measurement, i.e., counting single photons in the sidebands imparted on a laser, we herald the addition and subtraction of single phonons on the 300K thermal motional state of a 4GHz mechanical oscillator. To understand the resulting mechanical state, we implement a tomography scheme and observe highly non-Gaussian phase-space distributions. Using a maximum likelihood method, we infer the density matrix of the oscillator and confirm the counter-intuitive doubling of the mean phonon number resulting from phonon addition and subtraction., Comment: 13 pages, 9 figures

Integrated photonics is at the heart of many classical technologies, from optical communications to biosensors, LIDAR, and data center fiber interconnects. There is strong evidence that these integrated technologies will play a key role in quantum systems as they grow from few-qubit prototypes to tens of thousands of qubits. The underlying laser and optical quantum technologies, with the required functionality and performance, can only be realized through the integration of these components onto quantum photonic integrated circuits (QPICs) with accompanying electronics. In the last decade, remarkable advances in quantum photonic integration and a dramatic reduction in optical losses have enabled benchtop experiments to be scaled down to prototype chips with improvements in efficiency, robustness, and key performance metrics. The reduction in size, weight, power, and improvement in stability that will be enabled by QPICs will play a key role in increasing the degree of complexity and scale in quantum demonstrations. In the next decade, with sustained research, development, and investment in the quantum photonic ecosystem (i.e. PIC-based platforms, devices and circuits, fabrication and integration processes, packaging, and testing and benchmarking), we will witness the transition from single- and few-function prototypes to the large-scale integration of multi-functional and reconfigurable QPICs that will define how information is processed, stored, transmitted, and utilized for quantum computing, communications, metrology, and sensing. This roadmap highlights the current progress in the field of integrated quantum photonics, future challenges, and advances in science and technology needed to meet these challenges., Comment: Submitted to the Journal of Physics: Photonics

We investigate the performance of microwave-frequency phononic crystal resonators fabricated on thin-film lithium niobate for integration with superconducting quantum circuits. For different design geometries at millikelvin temperatures, we achieve mechanical internal quality factors $Q_i$ above $10^5 - 10^6$ at high microwave drive power, corresponding to $5\times10^6$ phonons inside the resonator. By sweeping the defect size of resonators with identical mirror cell designs, we are able to indirectly observe signatures of the complete phononic bandgap via the resonators' internal quality factors. Examination of quality factors' temperature dependence shows how superconducting and two-level system (TLS) loss channels impact device performance. Finally, we observe an anomalous low-temperature frequency shift consistent with resonant TLS decay and find that material choice can help to mitigate these losses., Comment: 15 pages, 12 figures

Acoustic devices play an important role in classical information processing. The slower speed and lower losses of mechanical waves enable compact and efficient elements for delaying, filtering, and storing of electric signals at radio and microwave frequencies. Discovering ways of better controlling the propagation of phonons on a chip is an important step towards enabling larger scale phononic circuits and systems. We present a platform, inspired by decades of advances in integrated photonics, that utilizes the strong piezoelectric effect in a thin film of lithium niobate on sapphire to excite guided acoustic waves immune from leakage into the bulk due to the phononic analogue of index-guiding. We demonstrate an efficient transducer matched to 50 ohm and guiding within a 1-micron wide mechanical waveguide as key building blocks of this platform. Putting these components together, we realize acoustic delay lines, racetrack resonators, and meander line waveguides for sensing applications. To evaluate the promise of this platform for emerging quantum technologies, we characterize losses at low temperature and measure quality factors on the order of 50,000 at 4 kelvin. Finally, we demonstrate phononic four-wave mixing in these circuits and measure the nonlinear coefficients to provide estimates of the power needed for relevant parametric processes., Comment: 15 pages,12 figures, the first two authors contributed equally

We demonstrate acousto-optic phase modulators in X-cut lithium niobate films on sapphire, detailing the dependence of the piezoelectric and optomechanical coupling coefficients on the crystal orientation. This new platform supports highly confined, strongly piezoelectric mechanical waves without suspensions, making it a promising candidate for broadband and efficient integrated acousto-optic devices, circuits, and systems., Comment: 8 pages, 5 figures

Quantum networks are likely to have a profound impact on the way we compute and communicate in the future. In order to wire together superconducting quantum processors over kilometer-scale distances, we need transducers that can generate entanglement between the microwave and optical domains with high fidelity. We present an integrated electro-optic transducer that combines low-loss lithium niobate photonics with superconducting microwave resonators on a sapphire substrate. Our triply-resonant device operates in a dilution refrigerator and converts microwave photons to optical photons with an on-chip efficiency of $6.6\times 10^{-6}$ and a conversion bandwidth of 20 MHz. We discuss design trade-offs in this device, including strategies to manage acoustic loss, and outline ways to increase the conversion efficiency in the future., Comment: 15 pages, 10 figures. First two authors contributed equally to this work

Low-loss fiber optic links have the potential to connect superconducting quantum processors together over long distances to form large scale quantum networks. A key component of these future networks is a quantum transducer that coherently and bidirectionally converts photons from microwave frequencies to optical frequencies. We present a platform for electro-optic photon conversion based on silicon-organic hybrid photonics. Our device combines high quality factor microwave and optical resonators with an electro-optic polymer cladding to perform microwave-to-optical photon conversion from 6.7 GHz to 193 THz (1558 nm). The device achieves an electro-optic coupling rate of 330 Hz in a millikelvin dilution refrigerator environment. We use an optical heterodyne measurement technique to demonstrate the single-sideband nature of the conversion with a selectivity of approximately 10 dB. We analyze the effects of stray light in our device and suggest ways in which this can be mitigated. Finally, we present initial results on high-impedance spiral resonators designed to increase the electro-optic coupling., Comment: 31 pages, 13 figures

Tuning and reconfiguring nanophotonic components is needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they suffer from trade-offs between tuning voltage, tuning range, and on-chip area. Piezoelectric actuation could resolve all these challenges. Standard materials possess piezoelectric coefficients on the order of ${0.01}~\text{nm/V}$, suggesting extremely small on-chip actuation using potentials on the order of one volt. Here we propose and demonstrate compact piezoelectric actuators, called nanobenders, that transduce tens of nanometers per volt. By leveraging the non-uniform electric field from submicron electrodes, we generate bending of a piezoelectric nanobeam. Combined with a sliced photonic crystal cavity to sense displacement, we show tuning of an optical resonance by $\sim 5~\text{nm/V}~({0.6}~\text{THz/V})$ and between $1520$ and $1560~\text{nm}$ ($\sim 400$ linewidths) with only $ {4}~\text{V}$. Finally, we consider other tunable nanophotonic components enabled by nanobenders., Comment: 24 pages, 5 + 12 figures

Efficient interconversion of both classical and quantum information between microwave and optical frequency is an important engineering challenge. The optomechanical approach with gigahertz-frequency mechanical devices has the potential to be extremely efficient due to the large optomechanical response of common materials, and the ability to localize mechanical energy into a micron-scale volume. However, existing demonstrations suffer from some combination of low optical quality factor, low electrical-to-mechanical transduction efficiency, and low optomechanical interaction rate. Here we demonstrate an on-chip piezo-optomechanical transducer that systematically addresses all these challenges to achieve nearly three orders of magnitude improvement in conversion efficiency over previous work. Our modulator demonstrates acousto-optic modulation with $V_{\pi} = {0.02}$ V. We show bidirectional conversion efficiency of $10^{-5}$ with ${3.3}$ microwatts red-detuned optical pump, and $5.5\%$ with $323$ microwatts blue-detuned pump. Further study of quantum transduction at millikelvin temperatures is required to understand how the efficiency and added noise are affected by reduced mechanical dissipation, thermal conductivity, and thermal capacity., Comment: 20 pages, 14 figures

The need for highly accurate, labor-intensive optical alignment has been a major hurdle in our ability to leverage the power of complex photonic integrated circuits. There is a strong need for tolerant and passive alignment methods that enable interrogation at any point in a photonic circuit. Various promising and scalable photonic packaging techniques have been under development, but few methods compatible with low-temperature operation have been reported. Here, we demonstrate alignment-free $25\%$ coupling efficiency from an optical fiber to a silicon optomechanical crystal at 7 mK in a dilution refrigerator. Our coupling scheme uses angle-polished fibers glued to the surface of the chip. The technique paves the way for scalable integration of optical technologies at low temperatures, circumventing the need for optical alignment in a highly constrained cryogenic environment. The technique is broadly applicable to studies of low-temperature optical physics and to emerging quantum photonic technologies., Comment: 6 pages, 4 figures

Demonstrating a device that efficiently connects light, motion, and microwaves is an outstanding challenge in classical and quantum photonics. We make significant progress in this direction by demonstrating a photonic crystal resonator on thin-film lithium niobate (LN) that simultaneously supports high-$Q$ optical and mechanical modes, and where the mechanical modes are coupled piezoelectrically to microwaves. For optomechanical coupling, we leverage the photoelastic effect in LN by optimizing the device parameters to realize coupling rates $g_0/2\pi\approx 120~\textrm{kHz}$. An optomechanical cooperativity $C>1$ is achieved leading to phonon lasing. Electrodes on the nanoresonator piezoelectrically drive mechanical waves on the beam that are then read out optically allowing direct observation of the phononic bandgap. Quantum coupling efficiency of $\eta\approx10^{-8}$ from the input microwave port to the localized mechanical resonance is measured. Improvements of the microwave circuit and electrode geometry can increase this efficiency and bring integrated ultra-low-power modulators and quantum microwave-to-optical converters closer to reality., Comment: 20 pages, including appendices

The coherent states that describe the classical motion of a mechanical oscillator do not have well-defined energy, but are rather quantum superpositions of equally-spaced energy eigenstates. Revealing this quantized structure is only possible with an apparatus that measures the mechanical energy with a precision greater than the energy of a single phonon, $\hbar\omega_\text{m}$. One way to achieve this sensitivity is by engineering a strong but nonresonant interaction between the oscillator and an atom. In a system with sufficient quantum coherence, this interaction allows one to distinguish different phonon number states by resolvable differences in the atom's transition frequency. Such dispersive measurements have been studied in cavity and circuit quantum electrodynamics where experiments using real and artificial atoms have resolved the photon number states of cavities. Here, we report an experiment where an artificial atom senses the motional energy of a driven nanomechanical oscillator with sufficient sensitivity to resolve the quantization of its energy. To realize this, we build a hybrid platform that integrates nanomechanical piezoelectric resonators with a microwave superconducting qubit on the same chip. We excite phonons with resonant pulses of varying amplitude and probe the resulting excitation spectrum of the qubit to observe phonon-number-dependent frequency shifts $\approx 5$ times larger than the qubit linewidth. Our result demonstrates a fully integrated platform for quantum acoustics that combines large couplings, considerable coherence times, and excellent control over the mechanical mode structure. With modest experimental improvements, we expect our approach will make quantum nondemolition measurements of phonons an experimental reality, leading the way to new quantum sensors and information processing approaches that use chip-scale nanomechanical devices., Comment: 16 pages, 10 figures

Reducing energy dissipation is a central goal of classical and quantum technologies. Optics achieved great success in bringing down power consumption of long-distance communication links. With the rise of mobile, quantum and cloud technologies, it is essential to extend this success to shorter links. Electro-optic modulators are a crucial contributor of dissipation in such links. Numerous variations on important mechanisms such as free-carrier modulation and the Pockels effect are currently pursued, but there are few investigations of mechanical motion as an electro-optic mechanism in silicon. In this work, we demonstrate electrical driving and optical read-out of a 7.2 GHz mechanical mode of a silicon photonic waveguide. The electrical driving is capacitive and can be implemented in any material system. The measurements show that the mechanically-mediated optical phase modulation is two orders of magnitude more efficient than the background phase modulation in our system. Our demonstration is an important step towards efficient opto-electro-mechanical devices in a scalable photonic platform., Comment: 33 pages, 6 figures