1. Micro-Movement Measured by Laser Heterodyne Interferometer Based on Acousto-Optic Effect
- Author
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Bailin Lin, Wei Dai, Jun Sun, Mengting Xiao, Zihan He, Jianjian Wu, and Xinqi Chen
- Subjects
acousto-optic modulator ,heterodyne interference ,phase difference ,laser ,piezoelectric ceramic ,Physics ,QC1-999 - Abstract
In this experiment, the stable output of a dual-frequency laser source is obtained by an acousto-optic modulator due to the Bragg diffraction effect. Furthermore, the non-polarized dual-laser heterodyne interferometer is designed to measure the micro-movement of stacked piezoelectric (PZT) ceramic. This micro-movement can be dynamically determined by comparing the phase difference between the conference beam and measuring beam. The results indicate that the micro-movement of PZT ceramic changes linearly with the driven-voltage in the range of 0–30 V and the sensitivity of movement to voltage is 58.3 nm/V, which is very close to the theoretical value and this laser heterodyne interferometer can be applied for calibrating parameters of PZT ceramic.
- Published
- 2022
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