1. Plasma treatment effect on charge carrier concentrations and surface traps in a-InGaZnO thin-film transistors.
- Author
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Jae-Sung Kim, Min-Kyu Joo, Ming Xing Piao, Seung-Eon Ahn, Yong-Hee Choi, Ho-Kyun Jang, and Gyu-Tae Kim
- Subjects
THIN films spectra ,CHARGE carriers ,CONCENTRATION functions ,PHOTOELECTRON spectroscopy ,NOBLE gases ,ZINC compounds - Abstract
Various plasma treatment effects such as oxygen (O
2 ), nitrogen (N2 ), and argon (Ar) on amorphous indium gallium zinc oxide thin-film transistors (a-IGZO TFTs) are investigated. To study oxygen stoichiometry in a-IGZO TFTs with respect to various plasma environments, X-ray photoelectron spectroscopy was employed. The results showed that oxygen vacancies were reduced by O2 and N2 plasmas while they were increased after Ar plasma treatment. Additionally, the effects of plasma treatment on trap distribution in bulk and surface channels were explored by means of low-frequency noise analysis. Details of the mechanisms used for generating and restoring traps on the surface and bulk channel are presented. [ABSTRACT FROM AUTHOR]- Published
- 2014
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