1. Low-Cost Microbolometer Type Infrared Detectors
- Author
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Le Yu, Yaozu Guo, Haoyu Zhu, Mingcheng Luo, Ping Han, and Xiaoli Ji
- Subjects
microbolometer ,complementary metal oxide semiconductor (CMOS)-compatible ,uncooled infrared detectors ,thermal detectors ,infrared focal plane array (IRFPA) ,read-out integrated circuit (ROIC) ,Mechanical engineering and machinery ,TJ1-1570 - Abstract
The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMOS process and simple post-CMOS micro-electro-mechanical system (MEMS) process. With the technological development, the performance of the commercialized CMOS-compatible microbolometers shows only a small gap with that of the mainstream ones. This paper reviews the basics and recent advances of the CMOS-compatible microbolometer IRFPAs in the aspects of the pixel structure, the read-out integrated circuit (ROIC), the focal plane array, and the vacuum packaging.
- Published
- 2020
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