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10. Low-Frequency Series-Resistance Analytical Modeling of Three-Dimensional Metal-Insulator-Metal Capacitors.

Author

Bajolet, Aurélie, Clerc, Raphaël, Pananakakis, G., Tsamados, Dimitrios, Picollet, Eric, Ségura, Noël, Giraudin, Jean-Christophe, Delpech, Philippe, Montës, Laurent, and Ghibaudo, Gérard

Subjects
CAPACITORS, METAL insulator semiconductors, DIELECTRIC devices, ELECTRIC equipment, ELECTRIC capacity, ENERGY storage
Abstract

This paper discusses the optimization of series resistance of nonplanar metal-insulator-metal capacitor, i.e., an original 3-D capacitor with a capacitance density of 35 nF/mm², used in very large scale integration. A fully analytical and physically based model of its series resistance versus material and geometrical parameters has been developed, in excellent agreement with both 3-D numerical simulations and experiments. Based on the modeling results, possible design strategies of series-resistance reduction are suggested; showing a reduction of the series resistance by approximately a factor of four, without any degradation of the capacitance density. [ABSTRACT FROM AUTHOR]

Published
2007
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