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One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still suffers from Dolan-bridge shadow evaporation process. Here, we report on a robust wafer-scale Al/AlOx/Al Dolan-bridge Josephson junction (JJ) process using preliminary shadow evaporation bias resist mask correction and comprehensive oxidation optimization. We introduce topology correction model for two-layer resist mask biasing at a wafer-scale, which takes into account an evaporation source geometry. It results in Josephson junction area variation coefficient improvement down to 1.1% for the critical dimensions from 130x170 nm2 to 130x670 nm2 over 70x70 mm2 (49 cm2) wafer working area. Next, we investigate JJ oxidation process (oxidation method, pressure and time) and its impact on a room temperature resistance reproducibility. Finally, we combine both shadow evaporation bias correction and oxidation best practices for 4-inch wafers improving room temperature resistance variation coefficient down to 6.0/5.2/4.1% for 0.025 {\mu}m2 JJ area and 4.0/3.4/2.3% for 0.090 {\mu}m2 JJ area for 49/25/16 cm2 wafer working area correspondingly. The proposed model and oxidation method can be useful for robust wafer-scale superconducting quantum processors fabrication.

Tunable couplers have recently become one of the most powerful tools for implementing two-qubit gates between superconducting qubits. A tunable coupler typically includes a nonlinear element, such as a SQUID, which is used to tune the resonance frequency of an LC circuit connecting two qubits. Here we propose a complimentary approach where instead of tuning the resonance frequency of the tunable coupler by applying a quasistatic control signal, we excite by microwave the degree of freedom associated with the coupler itself. Due to strong effective longitudinal coupling between the coupler and the qubits, the frequency of this transition strongly depends on the computational state, leading to different phase accumulations in different states. Using this method, we experimentally demonstrate a CZ gate of 44 ns duration on a fluxonium-based quantum processor, obtaining a fidelity of $97.6\pm 0.4 \%$ characterized by cross-entropy benchmarking., Comment: 8 pages, 7 figures, 1 table

Superconducting fluxonium qubits provide a promising alternative to transmons on the path toward large-scale superconductor-based quantum computing due to their better coherence and larger anharmonicity. A major challenge for multi-qubit fluxonium devices is the experimental demonstration of a scalable crosstalk-free multi-qubit architecture with high fidelity single-qubit and two-qubit gates, single-shot readout and state initialization. Here, we present a two-qubit fluxonium-based quantum processor with a tunable coupler element following our theoretical proposal [DOI: 10.1063/5.0064800]. We experimentally demonstrate fSim-type and controlled-Z gates with $99.55\%$ and $99.23\%$ fidelities, respectively. The residual ZZ interaction is suppressed down to the few kHz level. Using a galvanically coupled flux control line, we implement high fidelity single-qubit gates and ground state initialization with a single arbitrary waveform generator channel per qubit., Comment: 18 pages, 18 figures

We explore experimentally a quantum metamaterial based on a superconducting chip with 25 frequency-tunable transmon qubits coupled to a common coplanar resonator. The collective bright and dark modes are probed via the microwave response, i.e., by measuring the transmission amplitude of an external microwave signal. All qubits have individual control and readout lines. Their frequency tunability allows to change the number N of resonantly coupled qubits and also to introduce a disorder in their excitation frequencies with preassigned distributions. While increasing N, we demonstrate the expected $N^{1/2}$ scaling law for the energy gap (Rabi splitting) between bright modes around the cavity frequency. By introducing a controllable disorder and averaging the transmission amplitude over a large number of realizations, we demonstrate a decay of mesoscopic fluctuations which mimics an approach towards the thermodynamic limit. The collective bright states survive in the presence of disorder when the strength of individual qubit coupling to the cavity dominates over the disorder strength., Comment: 12 pages, 9 figures. Revised version submitted in Phys. Rev. A

Recent discoveries in topological physics hold a promise for disorder-robust quantum systems and technologies. Topological states provide the crucial ingredient of such systems featuring increased robustness to disorder and imperfections. Here, we use an array of superconducting qubits to engineer a one-dimensional topologically nontrivial quantum metamaterial. By performing microwave spectroscopy of the fabricated array, we experimentally observe the spectrum of elementary excitations. We find not only the single-photon topological states but also the bands of exotic bound photon pairs arising due to the inherent anharmonicity of qubits. Furthermore, we detect the signatures of the two-photon bound edge-localized state which hints towards interaction-induced localization in our system. Our work demonstrates an experimental implementation of the topological model with attractive photon-photon interaction in a quantum metamaterial., Comment: main text+supplementary