1. Liquid Metal Oxide-assisted Integration of High-k Dielectrics and Metal Contacts for Two-Dimensional Electronics
- Author
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Venkatakrishnarao, Dasari, Mishra, Abhishek, Tarn, Yaoju, Bosman, Michel, Lee, Rainer, Das, Sarthak, Mukherjee, Subhrajit, Talha-Dean, Teymour, Zhang, Yiyu, Teo, Siew Lang, Chai, Jian Wei, Bussolotti, Fabio, Goh, Kuan Eng Johnson, and Lau, Chit Siong
- Subjects
Condensed Matter - Materials Science ,Condensed Matter - Mesoscale and Nanoscale Physics ,Physics - Applied Physics - Abstract
Two-dimensional van der Waals semiconductors are promising for future nanoelectronics. However, integrating high-k gate dielectrics for device applications is challenging as the inert van der Waals material surfaces hinder uniform dielectric growth. Here, we report a liquid metal oxide-assisted approach to integrate ultrathin, high-k HfO2 dielectric on 2D semiconductors with atomically smooth interfaces. Using this approach, we fabricated 2D WS2 top-gated transistors with subthreshold swings down to 74.5 mV/dec, gate leakage current density below 10-6 A/cm2, and negligible hysteresis. We further demonstrate a one-step van der Waals integration of contacts and dielectrics on graphene. This can offer a scalable approach toward integrating entire prefabricated device stack arrays with 2D materials. Our work provides a scalable solution to address the crucial dielectric engineering challenge for 2D semiconductors, paving the way for high-performance 2D electronics.
- Published
- 2024
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