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Background. A change in ambient temperature has a significant impact on the output signal of a wave solid-state gyroscope – an angular velocity sensor (WSSG-AVS), so it is mandatory to control and compensate for this effect. Materials and methods. The experimental results of determining the dependence of the frequency of natural oscillations of the WSSG-AVS resonator with piezoelectric control on the values of the ambient temperature are described. Results and conclusions. The experimental results show that each temperature corresponds to only one value of the frequency of natural oscillations. This allows compensation for temperature effects by tracking natural frequency values and using them to form conversion function correction factors. This eliminates the need to use an additional temperature sensor to compensate for the systematic error of the WSSG-AVS.

Background. Despite the high modern level of science and technology development, the problems of physical measurements remain relevant due to extreme operating conditions of primary measuring instruments (sensors), which take place in the rocket-space technology, including the problems of measuring displacements. he development of a displacement sensor operating at high temperatures of up to 600 °C imposes restrictions on the materials and wires used to manufacture inductor coils, due to the fact that there are few materials that are sufficiently strong to withstand such high temperatures (ceramics, seals). Materials and methods. Methods of integral and differential calculus, theory of electric circuits and electromagnetic field were used to solve the tasks. A computer-aided design system was used in the design of sensor structures AutoCAD. Results. As a result of the conducted work on the development of a linear displacement sensor, a large technological reserve was obtained for further work on the creation of high-temperature displacement sensors with different measurement ranges for the products of rocket and space technology.

Background. The actual problem in the development of new types of aviation products is the creation of angular displacement sensors with high stability, measurement accuracy and reliability. Materials and methods. The methods of integral and differential calculus, the theory of electric circuits and electromagnetic field were used to solve the problems. The computer-aided design system KOMPAS was used in the design of sensor structures. Results. As a result of this work, a three-channel angular displacement sensor and two versions of the secondary converter have been developed. The substitution diagram of transformer angular displacement sensor on the basis of which the expression defining dependence of output EMF value on angular displacement of the sensor rotor is obtained.

Background. The subject of research is the technology of manufacturing a hightemperature contactless displacement sensor. The aim of the work is to determine the features of the technology of manufacturing a high-temperature non-contact displacement sensor using technology of microelectromechanical systems (MEMS). Materials and methods. To implement a high-temperature non-contact displacement sensor, MEMS technology is used. The features of technological preparation of production for the manufacture of a cermet body and a sensitive element consisting of inductance coils on silicon substrates are considered. Results. The use of MEMS technology for the manufacture of a hightemperature displacement transducer provides advantages such as reliability, miniaturization, multicomponent and high degree of integration. In particular, the use of a cermet body and inductors on silicon substrates allows the displacement sensor to operate at high temperatures – up to 600 °С. Conclusions. The technological solutions described in the article for the manufacture of cermet bodies and silicon substrates allow satisfying modern trends in the development of space technology due to extreme operating conditions, as well as obtaining a large technological backlog necessary for further work on the creation of high-temperature displacement sensors of various measurement ranges.